公开(公告)号：US08294337B2

公开(公告)日：2012-10-23

申请号：US12748714

申请日：2010-03-29

申请人： Hiroki Kawai ,  Makoto Furuhata ,  Akinori Yamada ,  Yuji Hamayama

发明人： Hiroki Kawai ,  Makoto Furuhata ,  Akinori Yamada ,  Yuji Hamayama

IPC分类号： H03H9/205

CPC分类号： H01L41/1132 ,  G01C19/5607 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/21

摘要： A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.

摘要翻译： 弯曲振动片包括基座和从其延伸的振动臂，每对振动臂具有沿着所述一对振动臂对准的方向的一个主表面沿所述振动臂的延伸方向形成的第一凹槽， 和在另一个主表面上与第一槽并排形成的第二槽，第一和第二槽部的深度之和大于一个主表面与另一个主表面之间的间隔，质量部分为 设置在所述一对振动臂中的每一个上，在作为所述第一凹槽的开口侧的一个主表面上，所述第一凹槽朝向与所述振动臂彼此面对的内侧相反的外侧形成。

公开(公告)号：US08362854B2

公开(公告)日：2013-01-29

申请号：US12729759

申请日：2010-03-23

申请人： Makoto Furuhata ,  Akinori Yamada ,  Yuji Hamayama

发明人： Makoto Furuhata ,  Akinori Yamada ,  Yuji Hamayama

IPC分类号： H03H9/21 ,  H01L41/04

CPC分类号： H03H9/215

摘要： A flexural vibration piece including a vibrator having a first region on which a compressive stress or a tensile stress acts and a second region on which a tensile stress acts when a compressive stress acts on the first region and a compressive stress acts when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path formed of a material having a thermal conductivity higher than the vibrator and that thermally connects the regions, wherein when m is the number of heat conduction paths, ρth is the thermal resistivity of the heat conduction path, ρv is the thermal resistivity of the vibrator, tv is the thickness of the vibrator in a direction orthogonal to the first plane, and tth is the thickness of the heat conduction path, a relationship of tth≧(1/m)×tv×(ρth/ρv) is satisfied.

摘要翻译： 一种弯曲振动片，包括具有作用于其上的压缩应力或拉伸应力的第一区域的振动器和当压缩应力作用在第一区域上时拉伸应力起作用的第二区域，并且当拉伸应力作用时，压缩应力作用 在第一区域上进行弯曲振动， 以及由导热率高于振动器的材料形成的热传导路径，并且热连接该区域，其中当m是热传导路径的数量时，热传导路径的热阻为＆rgr; v是振动器的热阻率，tv是振动器在与第一平面正交的方向上的厚度，tth是导热路径的厚度，tth≥（1 / m）×tv×（ ＆rgr; th /＆rgr; v）满足。

公开(公告)号：US08232707B2

公开(公告)日：2012-07-31

申请号：US12729481

申请日：2010-03-23

申请人： Makoto Furuhata ,  Takashi Yamazaki ,  Yuji Hamayama

发明人： Makoto Furuhata ,  Takashi Yamazaki ,  Yuji Hamayama

IPC分类号： H01L41/04

CPC分类号： H03H9/215 ,  H03H9/02102 ,  H03H9/02133

摘要： A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.

摘要翻译： 弯曲振动片包括弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域， 当拉伸应力作用在第一区域上时，施加压缩应力，并且在第一平面中进行弯曲振动。 弯曲振动片还包括在第一区域和第二区域附近的导热路径，该热传导路径由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接 地区。

公开(公告)号：US08405283B2

公开(公告)日：2013-03-26

申请号：US13534623

申请日：2012-06-27

申请人： Makoto Furuhata ,  Takashi Yamazaki ,  Yuji Hamayama

发明人： Makoto Furuhata ,  Takashi Yamazaki ,  Yuji Hamayama

IPC分类号： H01L41/04

CPC分类号： H03H9/215 ,  H03H9/02102 ,  H03H9/02133

摘要： A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.

摘要翻译： 弯曲振动片包括弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域， 当拉伸应力作用在第一区域上时，施加压缩应力，并且在第一平面中进行弯曲振动。 弯曲振动片还包括在第一区域和第二区域附近的导热路径，该热传导路径由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接 地区。

公开(公告)号：US08432087B2

公开(公告)日：2013-04-30

申请号：US12878629

申请日：2010-09-09

申请人： Akinori Yamada ,  Makoto Furuhata

发明人： Akinori Yamada ,  Makoto Furuhata

IPC分类号： H03H9/19 ,  H03H9/21

CPC分类号： H03H9/21 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator element includes: a base portion; and a resonating arm extending in a first direction from the base portion, wherein the resonating arm includes a first surface, a second surface facing the first surface, a first side surface extending in the first direction so as to connect the first and second surfaces, and a second side surface facing the first side surface, wherein the resonating arm includes a first width portion having a first width and a second width portion provided at a root of the resonating arm so as to have a second width larger than the first width, wherein the resonating arm includes a groove portion provided on at least one of the first and second surfaces so as to extend in the first direction, the groove portion in the second width portion having a width larger than a width of the groove portion in the first width portion, and wherein a sum of the width between the groove portion in the second width portion and the first side surface and the width between the groove portion in the second width portion and the second side surface is smaller than a sum of the width between the groove portion in the first width portion and the first side surface and the width between the groove portion in the first width portion and the second side surface.

摘要翻译： 谐振器元件包括：基部; 以及从所述基部沿第一方向延伸的谐振臂，其中所述谐振臂包括第一表面，面向所述第一表面的第二表面，沿所述第一方向延伸以便连接所述第一表面和所述第二表面的第一侧表面， 以及面对所述第一侧面的第二侧面，其中所述谐振臂包括具有第一宽度的第一宽度部分和设置在所述谐振臂的根部处的第二宽度部分，以具有大于所述第一宽度的第二宽度， 其中所述谐振臂包括设置在所述第一和第二表面中的至少一个上以沿所述第一方向延伸的凹槽部分，所述第二宽度部分中的所述凹槽部分的宽度大于所述第一和第二表面中的所述凹槽部分的宽度 宽度部分，并且其中第二宽度部分中的槽部分和第一侧表面之间的宽度与第二宽度部分中的槽部分之间的宽度之和 所述第二侧面小于所述第一宽度部的槽部与所述第一侧面之间的宽度与所述第一宽度部的槽部与所述第二侧面的宽度的和。

公开(公告)号：US20090058226A1

公开(公告)日：2009-03-05

申请号：US12204746

申请日：2008-09-04

申请人： Makoto Furuhata ,  Masahiro Oshio ,  Takamitsu Higuchi

发明人： Makoto Furuhata ,  Masahiro Oshio ,  Takamitsu Higuchi

IPC分类号： H01L41/04 ,  G01P15/09

CPC分类号： G01P15/097 ,  G01C19/5607 ,  G01P15/09 ,  H03H9/21

摘要： A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section. The absolute value of the piezoelectric g constant of the detection piezoelectric section is larger than the absolute value of the piezoelectric g constant of the drive piezoelectric section.

摘要翻译： 音叉振荡片包括：基座; 一对摆动臂，其基本上彼此平行地延伸; 驱动压电元件，其设置在每个摆动臂的至少一个主表面或侧表面上，以通过由施加的电荷引起的压电变形来允许振荡臂的弯曲振荡; 检测压电元件设置在与设置有驱动压电元件的每个振荡臂的表面相对的表面上，以将由振荡臂的弯曲振荡引起的压电变形转换为充电并输出电荷。 驱动压电元件具有驱动压电部。 检测用压电元件具有检测压电部。 驱动压电部的压电d常数的绝对值大于检测压电部的压电d常数的绝对值。 检测用压电部的压电g常数的绝对值大于驱动压电部的压电体g的绝对值。

公开(公告)号：US07078847B2

公开(公告)日：2006-07-18

申请号：US10771786

申请日：2004-02-04

申请人： Osamu Miyazawa ,  Yasuharu Hashimoto ,  Tsukasa Funasaka ,  Makoto Furuhata

发明人： Osamu Miyazawa ,  Yasuharu Hashimoto ,  Tsukasa Funasaka ,  Makoto Furuhata

IPC分类号： H01L41/08

CPC分类号： H01L41/0913 ,  H02N2/004 ,  H02N2/103

摘要： A rectangular vibrating plate 10 in which a piezoelectric element and a reinforcing plate are stacked is supported on a main plate by a support member 11, and is urged toward the rotor 100 by an elastic force of the support member 11. This brings a projection 36 provided on the vibrating plate 10 into abutment with an outer peripheral surface of the rotor 100. In this construction, when the vibrating plate 10 vibrates in the horizontal direction in the figure by an applied voltage from a driving circuit (not shown), the rotor 100 is rotated in a clockwise direction in accordance with the displacement of the projection 36 due to the vibration.

摘要翻译： 堆叠有压电元件和加强板的矩形振动板10通过支撑构件11支撑在主板上，并且通过支撑构件11的弹力而朝向转子100施力。 这使得设置在振动板10上的突起36与转子100的外周表面邻接。 在这种结构中，当振动板10通过来自驱动电路（未示出）的施加电压在图中的水平方向上振动时，转子100根据突起36的位移而沿顺时针方向旋转，由于 振动。

公开(公告)号：US08766515B2

公开(公告)日：2014-07-01

申请号：US13125000

申请日：2009-10-22

申请人： Makoto Furuhata ,  Takeo Funakawa ,  Takashi Yamazaki

发明人： Makoto Furuhata ,  Takeo Funakawa ,  Takashi Yamazaki

IPC分类号： H03H9/21

CPC分类号： H03H9/21 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/19 ,  H03H9/215

摘要： Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.

摘要翻译： 抑制由热弹性效应引起的Q值的劣化。 由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面和包括第四表面的表面之间的距离，所以第一和第二凹槽不会穿过包括第三凹槽的表面 表面和包括第四表面的表面。 此外，第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离，第一可膨胀部分（第一表面）和第二凹槽之间的传热路径 可膨胀部分（第二表面）不能形成为直线。 因此，使第一可膨胀部分（第一表面）和第二可膨胀部分（第二表面）之间的传热路径绕第一和第二槽弯曲并因此被延长。

公开(公告)号：US07944132B2

公开(公告)日：2011-05-17

申请号：US12892096

申请日：2010-09-28

申请人： Makoto Furuhata ,  Takashi Yamazaki

发明人： Makoto Furuhata ,  Takashi Yamazaki

IPC分类号： H01L41/08 ,  H03H9/21

CPC分类号： H03H9/215 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

摘要翻译： 具有基部的谐振器; 以及谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在一个主表面上的第一凹槽，与另一个主表面上的第一凹槽并置设置的第二凹槽，设置成与第一凹槽并排设置的第三凹槽， 所述第一槽比所述另一主面上的所述第一槽更靠近所述基部侧;以及第四槽，与所述第二槽并列设置，并且在所述主面上设置为比所述基部侧更靠近所述第二槽。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。

公开(公告)号：US07400219B2

公开(公告)日：2008-07-15

申请号：US11290570

申请日：2005-12-01

申请人： Makoto Furuhata ,  Hisakatsu Sato

发明人： Makoto Furuhata ,  Hisakatsu Sato

IPC分类号： H03H3/08 ,  H03H9/25

CPC分类号： H03H3/08 ,  H03H9/02866 ,  H03H9/02976

摘要： A surface acoustic wave (SAW) device includes at least an IC region and a SAW element region. A semiconductor element layer and wiring layer is located in the IC region, and the semiconductor element layer has a semiconductor element and an element insulating film. The wiring layer is formed by stacking wiring to connect with the semiconductor element and a wiring insulating film extending to the SAW region. The semiconductor element layer further includes a piezoelectric thin film formed above the wiring insulating film, and in the SAW element region, a SAW element is formed on the piezoelectric thin film equipped with an IDT electrode provided with a plurality of electrode fingers, and at least one layer of layer thickness adjusting films having linear shapes and arranged in parallel to and with the same pitch as the electrode fingers of the IDT electrode.

摘要翻译： 表面声波（SAW）器件至少包括IC区域和SAW元件区域。 半导体元件层和布线层位于IC区域中，半导体元件层具有半导体元件和元件绝缘膜。 布线层通过层叠布线以与半导体元件连接并且延伸到SAW区域的布线绝缘膜形成。 半导体元件层还包括形成在布线绝缘膜上方的压电薄膜，并且在SAW元件区域中，在配备有设置有多个电极指的IDT电极的压电薄膜上形成SAW元件，并且至少 一层具有直线形状并且与IDT电极的电极指平行并以相同间距排列的层厚度调节膜。