Method for depositing a protective carbon coating on a data recording disk
    4.
    发明授权
    Method for depositing a protective carbon coating on a data recording disk 有权
    在数据记录盘上沉积保护性碳涂层的方法

    公开(公告)号:US06455101B1

    公开(公告)日:2002-09-24

    申请号:US09618786

    申请日:2000-07-18

    IPC分类号: B05D512

    摘要: A method and apparatus for depositing a protective film on a data recording disk, including the steps of depositing a magnetic film layer as a data recording layer on a surface of a substrate while the substrate is at a magnetic film deposition temperature; heating the substrate with the magnetic film layer thereon to a protective film deposition temperature; and depositing a protective film on the magnetic film layer while the substrate is at the protective film deposition layer; wherein the protective film deposition temperature is higher than the magnetic film deposition temperature.

    摘要翻译: 一种用于在数据记录盘上沉积保护膜的方法和装置,包括以下步骤:在基板处于磁膜沉积温度的同时,在基板的表面上沉积作为数据记录层的磁性膜层; 将其上的磁性膜层加热到保护膜沉积温度; 以及在所述基板处于保护膜沉积层的同时在所述磁性膜层上沉积保护膜; 其中保护膜沉积温度高于磁膜沉积温度。

    Apparatus for depositing a thin film on a data recording disk
    7.
    发明授权
    Apparatus for depositing a thin film on a data recording disk 有权
    用于在数据记录盘上沉积薄膜的装置

    公开(公告)号:US06571729B2

    公开(公告)日:2003-06-03

    申请号:US09985090

    申请日:2001-11-01

    IPC分类号: C23C1600

    摘要: An apparatus for depositing a protective film on a data recording disk, including the steps of depositing a magnetic film layer as a data recording layer on a surface of a substrate while the substrate is at a magnetic film deposition temperature; heating the substrate with the magnetic film layer thereon to a protective film deposition temperature; and depositing a protective film on the magnetic film layer while the substrate is at the protective film deposition layer; wherein the protective film deposition temperature is higher than the magnetic film deposition temperature.

    摘要翻译: 一种用于在数据记录盘上沉积保护膜的装置,包括以下步骤:在衬底处于磁膜沉积温度的同时,在衬底的表面上沉积磁膜层作为数据记录层; 将其上的磁性膜层加热到保护膜沉积温度; 以及在所述基板处于保护膜沉积层的同时在所述磁性膜层上沉积保护膜; 其中保护膜沉积温度高于磁膜沉积温度。

    Thin film deposition apparatus
    8.
    发明授权

    公开(公告)号:US06176932B1

    公开(公告)日:2001-01-23

    申请号:US09250033

    申请日:1999-02-12

    IPC分类号: C23C1600

    摘要: An apparatus for manufacturing information recording disks is disclosed. The apparatus includes a deposition chamber for providing an undercoat layer to a substrate to be treated, a deposition chamber for providing a magnetic recording layer on the substrate, a deposition chamber for providing a protective layer over the recording layer and a holding chamber for removing the resulting information recording disk upon completion of the process steps. The deposition chamber which provides the protective layer includes a system which selectively introduces heated plasma and oxygen into the interior of the deposition chamber to clean the interior surfaces of the chamber while the apparatus is in use. The heated plasma and oxygen interact with any excess protective layer material, resulting in the formation of a gas which is removed from the interior of the deposition chamber by a pumping system. The holding chamber is used to remove and maintain the processed information recording disk while the interior of the deposition chamber is being cleaned.

    Thin film deposition apparatus
    9.
    发明授权
    Thin film deposition apparatus 有权
    薄膜沉积装置

    公开(公告)号:US06228439B1

    公开(公告)日:2001-05-08

    申请号:US09610721

    申请日:2000-07-06

    IPC分类号: C23C1600

    摘要: An apparatus for manufacturing information recording disks is disclosed. The apparatus includes a deposition chamber for providing an undercoat layer to a substrate to be treated, a deposition chamber for providing a magnetic recording layer on the substrate, a deposition chamber for providing a protective layer over the recording layer and a holding chamber for removing the resulting information recording disk upon completion of the process steps. The deposition chamber which provides the protective layer includes a system which selectively introduces heated plasma and oxygen into the interior of the deposition chamber to clean the interior surfaces of the chamber while the apparatus is in use. The heated plasma and oxygen interact with any excess protective layer material, resulting in the formation of a gas which is removed from the interior of the deposition chamber by a pumping system. The holding chamber is used to remove and maintain the processed information recording disk while the interior of the deposition chamber is being cleaned.

    摘要翻译: 公开了一种用于制造信息记录盘的装置。 该装置包括用于向待处理的基板提供底涂层的沉积室,用于在基板上提供磁记录层的沉积室,用于在记录层上提供保护层的沉积室和用于除去 在完成处理步骤后,产生信息记录盘。 提供保护层的沉积室包括系统,该系统在加热装置使用时,将加热的等离子体和氧气选择性地引入沉积室的内部,以清洁腔室的内表面。 加热的等离子体和氧与任何过量的保护层材料相互作用,导致形成通过泵送系统从沉积室的内部移除的气体。 保持室用于在清洁沉积室的内部的同时移除并保持处理的信息记录盘。

    Chromatograph analyzing device
    10.
    发明授权
    Chromatograph analyzing device 有权
    色谱分析仪

    公开(公告)号:US08249817B2

    公开(公告)日:2012-08-21

    申请号:US12633569

    申请日:2009-12-08

    IPC分类号: G01N30/00 G06F17/40

    摘要: A chromatograph analyzing device for automatically executing a base line setting process on an unseparated peak using preset base line conditions. The chromatograph analyzing device includes a separation unit for separating a component included in a sample, and a data processing device for identifying the component of the sample and the quantity of the component in the sample by using a chromatogram obtained from the separation.

    摘要翻译: 一种色谱分析装置,用于使用预设的基线条件自动执行未分离峰值的基线设置处理。 色谱分析装置包括用于分离样品中包含的组分的分离单元和用于通过使用从分离获得的色谱图来鉴定样品的组分和样品中的组分的量的数据处理装置。