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公开(公告)号：US20100084262A1
公开(公告)日：2010-04-08
申请号：US12244298
申请日：2008-10-02
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： The present invention relates to a method for manufacturing a perpendicular recording magnetic head. The method for manufacturing a perpendicular recording magnetic head according to the present invention includes first to third steps. At the first step, a main magnetic pole layer is formed on a foundation layer. At the second step, a main magnetic pole forming mask whose recording-medium-facing surface is of an inverted trapezoidal shape is formed on the main magnetic pole layer. At the third step, a main magnetic pole whose recording-medium-facing surface is of an inverted trapezoidal shape is formed by performing ion milling on a laminated structure including the foundation layer and the main magnetic pole layer from a direction which makes a given angle with a lamination direction according to a bevel angle of the inverted trapezoidal shape.
摘要翻译： 本发明涉及一种用于制造垂直记录磁头的方法。 根据本发明的用于制造垂直记录磁头的方法包括第一至第三步骤。 在第一步骤中，在基础层上形成主磁极层。 在第二步骤中，在主磁极层上形成有记录介质相对表面为倒梯形形状的主磁极形成掩模。 在第三步骤中，通过对包括基础层和主磁极层的叠层结构进行离子铣削，形成具有倒梯形形状的记录介质相对表面的主磁极， 具有根据倒梯形形状的斜角的层叠方向。
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2.发明授权公开(公告)号：US08102622B2
公开(公告)日：2012-01-24
申请号：US12318645
申请日：2009-01-05
申请人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
发明人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： In a perpendicular magnetic write head manufacturing method a magnetic layer is formed on a substrate. On the magnetic layer, first and second nonmagnetic layers are formed with different materials. A mask pattern is formed on the second nonmagnetic layer, and the second nonmagnetic layer in a region not covered with the mask pattern is removed. Thereby, the patterned second nonmagnetic layer is formed while leaving the first nonmagnetic layer. The mask pattern is removed and a milling process is selectively performed on the first nonmagnetic layer and the magnetic layer with the patterned second nonmagnetic layer as a mask to remove all of the first nonmagnetic layer in an exposed region and to dig down the magnetic layer in the exposed region, thereby forming a main magnetic pole layer having an inclined part whose thickness decreases with distance from an edge position of the patterned second nonmagnetic layer.
摘要翻译： 在垂直磁性写入头制造方法中，在衬底上形成磁性层。 在磁性层上，第一和第二非磁性层由不同的材料形成。 在第二非磁性层上形成掩模图案，并且去除未被掩模图案覆盖的区域中的第二非磁性层。 由此，形成图案化的第二非磁性层，同时离开第一非磁性层。 去除掩模图案，并且在第一非磁性层和具有图案化的第二非磁性层的磁性层上选择性地进行研磨工艺作为掩模，以去除暴露区域中的所有第一非磁性层，并将 从而形成具有倾斜部分的主磁极层，该倾斜部分的厚度随着距图案化的第二非磁性层的边缘位置的距离而减小。
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3.发明申请公开(公告)号：US20100172054A1
公开(公告)日：2010-07-08
申请号：US12318645
申请日：2009-01-05
申请人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
发明人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： In a perpendicular magnetic write head manufacturing method a magnetic layer is formed on a substrate. On the magnetic layer, first and second nonmagnetic layers are formed with different materials. A mask pattern is formed on the second nonmagnetic layer, and the second nonmagnetic layer in a region not covered with the mask pattern is removed Thereby, the patterned second nonmagnetic layer is formed while leaving the first nonmagnetic layer. The mask pattern is removed and a milling process is selectively performed on the first nonmagnetic layer and the magnetic layer with the patterned second nonmagnetic layer as a mask to remove all of the first nonmagnetic layer in an exposed region and to dig down the magnetic layer in the exposed region, thereby forming a main magnetic pole layer having an inclined part whose thickness decreases with distance from an edge position of the patterned second nonmagnetic layer.
摘要翻译： 在垂直磁性写入头制造方法中，在衬底上形成磁性层。 在磁性层上，第一和第二非磁性层由不同的材料形成。 掩模图案形成在第二非磁性层上，并且未被掩模图案覆盖的区域中的第二非磁性层被去除。由此，在离开第一非磁性层的同时形成图案化的第二非磁性层。 去除掩模图案，并且在第一非磁性层和具有图案化的第二非磁性层的磁性层上选择性地进行研磨工艺作为掩模，以去除暴露区域中的所有第一非磁性层，并将 从而形成具有倾斜部分的主磁极层，该倾斜部分的厚度随着距图案化的第二非磁性层的边缘位置的距离而减小。
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4.发明授权Method of forming mask for dry etching and manufacturing method of magnetic head using the same method 失效使用相同的方法形成干蚀刻掩模的方法和磁头的制造方法公开(公告)号：US08303780B2
公开(公告)日：2012-11-06
申请号：US12241667
申请日：2008-09-30
CPC分类号： G11B5/1278 , G11B5/3163
摘要： The present invention relates to a method for forming a dry etching mask. A plurality of aluminum oxide films are sequentially sputtered on a material to be dry etched in such a manner that etching rate with respect to reactive ion etching increases toward a lower layer. On a laminated film of the plurality of aluminum oxide films, there is formed a first mask that has etching resistance with respect to the reactive ion etching. Reactive ion etching is performed from above the first mask to form a second mask of the laminated film.
摘要翻译： 本发明涉及一种形成干蚀刻掩模的方法。 将多个氧化铝膜依次溅射在待干蚀刻的材料上，使得相对于反应离子蚀刻的蚀刻速率向下层增加。 在多个氧化铝膜的层叠膜上形成有相对于反应离子蚀刻具有耐腐蚀性的第一掩模。 从第一掩模上方进行反应离子蚀刻，以形成层压膜的第二掩模。
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5.发明申请METHOD OF FORMING MASK FOR DRY ETCHING AND MANUFACTURING METHOD OF MAGNETIC HEAD USING THE SAME METHOD 失效使用相同方法形成干蚀刻掩模的方法和磁头的制造方法公开(公告)号：US20100078316A1
公开(公告)日：2010-04-01
申请号：US12241667
申请日：2008-09-30
IPC分类号： C25F3/02
CPC分类号： G11B5/1278 , G11B5/3163
摘要： The present invention relates to a method for forming a dry etching mask. A plurality of aluminum oxide films are sequentially sputtered on a material to be dry etched in such a manner that etching rate with respect to reactive ion etching increases toward a lower layer. On a laminated film of the plurality of aluminum oxide films, there is formed a first mask that has etching resistance with respect to the reactive ion etching. Reactive ion etching is performed from above the first mask to form a second mask of the laminated film.
摘要翻译： 本发明涉及一种形成干蚀刻掩模的方法。 将多个氧化铝膜依次溅射在待干蚀刻的材料上，使得相对于反应离子蚀刻的蚀刻速率向下层增加。 在多个氧化铝膜的层叠膜上形成有相对于反应离子蚀刻具有耐腐蚀性的第一掩模。 从第一掩模上方进行反应离子蚀刻，以形成层压膜的第二掩模。
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6.发明授权Thin film magnetic head having thermal expansion layer for suppressing thermal protrusion 有权具有用于抑制热突起的热膨胀层的薄膜磁头公开(公告)号：US07848056B2
公开(公告)日：2010-12-07
申请号：US11730155
申请日：2007-03-29
IPC分类号： G11B5/127
CPC分类号： G11B5/3133 , G11B5/3136 , G11B5/3909 , G11B2005/3996
摘要： A thin film magnetic head includes a main magnetic pole layer conducting a magnetic flux to the recording medium so that the recording medium an be magnetized in a direction orthogonal to a surface thereof; a return yoke layer disposed on a trailing side of the main magnetic pole layer; an intermediate protective layer partially disposed on a magnetic shield layer; and a thermal expansion suppressing layer having an edge located on the intermediate protective layer and being in contact with the return yoke layer in an area where the intermediate protective layer is not formed. If the thin film magnetic head is affected by ambient temperature environment, the thermal expansion suppressing layer suppresses the shift of the main magnetic pole layer and the return yoke layer toward the air bearing surface. This suppresses thermal protrusion from occurring on the thin film magnetic head due to ambient temperature environment.
摘要翻译： 薄膜磁头包括将磁通量传导到记录介质的主磁极层，使得记录介质在与其表面正交的方向上被磁化; 设置在所述主磁极层的后侧的返回磁轭层; 部分设置在磁屏蔽层上的中间保护层; 以及热膨胀抑制层，其具有位于中间保护层上的边缘，并且在没有形成中间保护层的区域中与返回轭层接触。 如果薄膜磁头受到环境温度环境的影响，则热膨胀抑制层抑制主磁极层和返回磁轭层向空气轴承表面的移动。 这抑制了由于环境温度环境而在薄膜磁头上发生的热突起。
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7.发明申请Thin film magnetic head, head gimbal assembly, head arm assembly, magnetic disk device and method of forming thin film magnetic head 有权薄膜磁头，头万向架组件，头臂组件，磁盘装置和薄膜磁头形成方法公开(公告)号：US20080239583A1
公开(公告)日：2008-10-02
申请号：US11730155
申请日：2007-03-29
IPC分类号： G11B5/33
CPC分类号： G11B5/3133 , G11B5/3136 , G11B5/3909 , G11B2005/3996
摘要： The thin film magnetic head includes a main magnetic pole layer conducting a magnetic flux to the recording medium so that the recording medium an be magnetized in a direction orthogonal to a surface thereof; a return yoke layer disposed on a trailing side of the main magnetic pole layer; an intermediate protective layer partially disposed on a magnetic shield layer; and a thermal expansion suppressing layer having an edge located on the intermediate protective layer and being in contact with the return yoke layer in an area where the intermediate protective layer is not formed. If the thin film magnetic head is affected by ambient temperature environment, the thermal expansion suppressing layer suppresses the shift of the main magnetic pole layer and the return yoke layer toward the air bearing surface. This suppresses thermal protrusion from occurring on the thin film magnetic head due to ambient temperature environment.
摘要翻译： 薄膜磁头包括将磁通量传导到记录介质的主磁极层，使得记录介质在与其表面正交的方向上被磁化; 设置在所述主磁极层的后侧的返回磁轭层; 部分设置在磁屏蔽层上的中间保护层; 以及热膨胀抑制层，其具有位于中间保护层上的边缘，并且在没有形成中间保护层的区域中与返回轭层接触。 如果薄膜磁头受到环境温度环境的影响，则热膨胀抑制层抑制主磁极层和返回磁轭层向空气轴承表面的移动。 这抑制了由于环境温度环境而在薄膜磁头上发生的热突起。
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8.发明申请公开(公告)号：US20090273863A1
公开(公告)日：2009-11-05
申请号：US12000519
申请日：2007-12-13
申请人： Hidetaka Kawano , Hiromichi Umehara , Takamitsu Sakamoto , Koichi Otani , Noriaki Kasahara , Naoto Matono
发明人： Hidetaka Kawano , Hiromichi Umehara , Takamitsu Sakamoto , Koichi Otani , Noriaki Kasahara , Naoto Matono
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49032 , Y10T29/49055 , Y10T156/10
摘要： A perpendicular recording thin-film magnetic head comprises a main magnetic pole having a tip main magnetic pole part extending in a height direction from a medium-opposing surface and a base main magnetic pole part connected to the tip main magnetic pole part on a side opposite from the medium-opposing surface side and wider than the tip main magnetic pole part in a track width direction; a return yoke extending in the height direction from the medium-opposing surface and magnetically coupling with the base main magnetic pole part at a position distanced from the medium-opposing surface in the height direction, while opposing the tip main magnetic pole part through a write gap layer in a bit length direction in the medium-opposing surface; and a main magnetic pole adjacent magnetic shield layer extending along at least part of side faces of the main magnetic pole other than the medium-opposing surface as seen in a laminating direction, while holding a nonmagnetic layer between the main magnetic pole and the main magnetic pole adjacent magnetic shield layer.
摘要翻译： 垂直记录薄膜磁头包括：主磁极，其具有从介质相对表面在高度方向上延伸的尖端主磁极部分和在相对侧的一侧连接到尖端主磁极部分的基极主磁极部分 从所述中等相对面侧开始并且比所述尖端主磁极部在轨道宽度方向上宽; 回转轭，其从中间相对表面在高度方向上延伸，并且在距离介质相对表面在高度方向上远离的位置处与基部主磁极部分磁耦合，同时通过写入方式与尖端主磁极部分相对 中间相对表面中的位长度方向上的间隙层; 以及与沿着层叠方向观察的中间相对面以外的主磁极的至少一部分的侧面相邻的磁屏蔽层的主磁极，同时在主磁极和主磁体之间保持非磁性层 极相邻磁屏蔽层。
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9.发明申请公开(公告)号：US20090052094A1
公开(公告)日：2009-02-26
申请号：US11892541
申请日：2007-08-23
申请人： Koichi Otani , Hiromichi Umehara , Naoto Matono , Takamitsu Sakamoto , Noriaki Kasahara , Hidetaka Kawano
发明人： Koichi Otani , Hiromichi Umehara , Naoto Matono , Takamitsu Sakamoto , Noriaki Kasahara , Hidetaka Kawano
IPC分类号： G11B5/33
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3133 , G11B5/6064
摘要： A magnetic head includes a pole layer, a first and a second shield disposed to sandwich the pole layer, and a nonmagnetic layer disposed around the first shield. The pole layer includes a first portion having an end face located in a medium facing surface, and a second portion that is located farther from the medium facing surface than is the first portion. The second portion is greater in thickness than the first portion. A bottom surface of the second portion is located closer to a substrate than is a bottom surface of the first portion. The first shield has a first top surface portion opposed to the bottom surface of the first portion with the first gap layer in between. The nonmagnetic layer has a second top surface portion opposed to the bottom surface of the second portion with the first gap layer in between. A difference in level is formed between the first and the second top surface portion such that the second top surface portion is located closer to the substrate than is the first top surface portion.
摘要翻译： 磁头包括极层，设置成夹住极层的第一和第二屏蔽件以及围绕第一屏蔽件设置的非磁性层。 极层包括具有位于介质面向表面中的端面的第一部分和比第一部分更远离介质面向表面的第二部分。 第二部分的厚度大于第一部分。 第二部分的底表面比第一部分的底表面更靠近基底。 第一屏蔽具有与第一部分的底表面相对的第一顶表面部分，其间具有第一间隙层。 非磁性层具有与第二部分的底表面相对的第二顶表面部分，其间具有第一间隙层。 在第一顶表面部分和第二顶表面部分之间形成水平差，使得第二顶表面部分比第一顶表面部分更靠近基底。
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10.发明授权公开(公告)号：US08000064B2
公开(公告)日：2011-08-16
申请号：US12000519
申请日：2007-12-13
申请人： Hidetaka Kawano , Hiromichi Umehara , Takamitsu Sakamoto , Koichi Otani , Noriaki Kasahara , Naoto Matono
发明人： Hidetaka Kawano , Hiromichi Umehara , Takamitsu Sakamoto , Koichi Otani , Noriaki Kasahara , Naoto Matono
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49032 , Y10T29/49055 , Y10T156/10
摘要： A perpendicular recording thin-film magnetic head comprises a main magnetic pole having a tip main magnetic pole part extending in a height direction from a medium-opposing surface and a base main magnetic pole part connected to the tip main magnetic pole part on a side opposite from the medium-opposing surface side and wider than the tip main magnetic pole part in a track width direction; a return yoke extending in the height direction from the medium-opposing surface and magnetically coupling with the base main magnetic pole part at a position distanced from the medium-opposing surface in the height direction, while opposing the tip main magnetic pole part through a write gap layer in a bit length direction in the medium-opposing surface; and a main magnetic pole adjacent magnetic shield layer extending along at least part of side faces of the main magnetic pole other than the medium-opposing surface as seen in a laminating direction, while holding a nonmagnetic layer between the main magnetic pole and the main magnetic pole adjacent magnetic shield layer.
摘要翻译： 垂直记录薄膜磁头包括：主磁极，其具有从介质相对表面在高度方向上延伸的尖端主磁极部分和在相对侧的一侧连接到尖端主磁极部分的基极主磁极部分 从所述中等相对面侧开始并且比所述尖端主磁极部在轨道宽度方向上宽; 回转轭，其从中间相对表面在高度方向上延伸，并且在距离介质相对表面在高度方向上远离的位置处与基部主磁极部分磁耦合，同时通过写入方式与尖端主磁极部分相对 中间相对表面中的位长度方向上的间隙层; 以及与沿着层叠方向观察的中间相对面以外的主磁极的至少一部分的侧面相邻的磁屏蔽层的主磁极，同时在主磁极和主磁体之间保持非磁性层 极相邻磁屏蔽层。
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