公开(公告)号：US5323208A

公开(公告)日：1994-06-21

申请号：US27776

申请日：1993-03-08

申请人： Hiroshi Fukuda ,  Tsutomu Tawa ,  Toshihide Dohi

发明人： Hiroshi Fukuda ,  Tsutomu Tawa ,  Toshihide Dohi

IPC分类号： G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G03B27/42

CPC分类号： G03F7/70308

摘要： In a reduction-type projection exposure apparatus provided by the present invention, a spatial filter having a predetermined complex amplitude-transmission distribution is fixed approximately at the pupil position of a projection lens thereof or at such a position that the spatial filter conjugates with the pupil. The complex amplitude transmittance of the spatial filter is controlled by a multiple-interference effect of the multi-layer coating forming the spatial filter or by the surface reflection occurring on the surface of the film which constitutes the spatial filter and has an index of refraction different from the air. The filter can thus be prevented from absorbing light, incurring neither thermal damage nor damage due to dissipated heat. As a result, the reduction-type projection exposure apparatus offers excellent resolution and an outstanding depth of focus.

摘要翻译： 在由本发明提供的还原型投影曝光装置中，具有预定的复振幅传播分布的空间滤光器大致固定在其投影透镜的光瞳位置处或者在空间滤光器与瞳孔共轭的位置处固定 。 空间滤波器的复振幅透射率由形成空间滤波器的多层涂层或由构成空间滤波器的膜的表面上发生的表面反射的多干涉效应控制，并且具有不同的折射率 从空中 因此，可以防止过滤器吸收光，不会导致热损伤，也不会由于散热而损坏。 结果，还原型投影曝光装置具有优异的分辨率和优异的聚焦深度。

公开(公告)号：US4577935A

公开(公告)日：1986-03-25

申请号：US347032

申请日：1982-02-08

申请人： Kazuo Yamakawa ,  Toshihide Dohi

发明人： Kazuo Yamakawa ,  Toshihide Dohi

IPC分类号： G02B9/12 ,  G02B9/34 ,  G02B13/16 ,  G02B13/18 ,  G02B3/02

CPC分类号： G02B9/34 ,  G02B13/16 ,  G02B13/18 ,  G02B9/12

摘要： Disclosed is a lens system for projecting onto a screen a video image formed on a face plate of a cathode ray tube and including, a first positive lens unit, a second positive lens unit defined between a pair of convex surfaces and a third negative lens unit having a screen side concave surface. The lens system includes at least one aspheric surface and fulfills the following condition: 1.5f

摘要翻译： 公开了一种用于将形成在阴极射线管的面板上的视频图像投影到屏幕上的透镜系统，包括：第一正透镜单元，限定在一对凸面之间的第二正透镜单元和第三负透镜单元 具有屏幕侧凹面。 透镜系统包括至少一个非球面并满足以下条件：1.5f

公开(公告)号：US5387975A

公开(公告)日：1995-02-07

申请号：US79639

申请日：1993-06-18

申请人： Futoshi Ishida ,  Kiyofumi Hashimoto ,  Toshihide Dohi ,  Takao Kobayashi ,  Yutaka Tokuyama

发明人： Futoshi Ishida ,  Kiyofumi Hashimoto ,  Toshihide Dohi ,  Takao Kobayashi ,  Yutaka Tokuyama

IPC分类号： G01B9/02 ,  G01B11/24 ,  G01B11/255 ,  G01M11/00

CPC分类号： G01B11/255

摘要： An interferometer utilizing interference whose object is the measurement of the configuration of a test surface with high precision by allowing accurate positioning to a predetermined measuring position for the measurement of the configuration of the test surface.The interferometer is equipped with an alignment pattern (4A) which generates a wave front that converges at the predetermined measuring position, as well as a wave front for measuring the configuration corresponding to the design configuration of the test surface (9), and by using a test surface-reflected beam of the wave front generated by the alignment pattern, an alignment observation optical system (8) measures the displacement of the test surface from the predetermined measuring position.

摘要翻译： 干涉仪利用干涉，其目的是通过允许精确定位到预定测量位置以测量测试表面的配置，来高精度地测量测试表面的构造。 干涉仪配备有产生在预定测量位置收敛的波前的对准图案（4A）以及用于测量与测试表面（9）的设计构造对应的配置的波前，并且通过使用 通过对准图案产生的波前的测试表面反射光束，对准观察光学系统（8）测量测试表面从预定测量位置的位移。

公开(公告)号：US4736225A

公开(公告)日：1988-04-05

申请号：US1919

申请日：1987-01-08

申请人： Masami Tanaka ,  Toshihide Dohi

发明人： Masami Tanaka ,  Toshihide Dohi

IPC分类号： G03B27/52 ,  G03B27/48 ,  G03B27/50 ,  G03B27/70

CPC分类号： G03B27/528

摘要： Disclosed is a projection device for projecting an image of an original on an object plane to an image plane for use in copying machines, facsimiles, image readers and the like. The projection device comprises a roof mirror and an optical member including a plurality of lens elements linearly aligned in the longitudinal direction of the slit. Each of the lens elements has a refractive surface and a reflective surface in facing relation with each other. At least one of said surfaces is toric in order to form an erecting real image in the longitudinal direction of the slit and an inverted real image in the lateral direction thereof.

摘要翻译： 公开了一种投影装置，用于将原稿在物平面上的图像投影到用于复印机，传真机，图像读取器等中的图像平面。 投影装置包括屋顶反射镜和包括在狭缝的纵向方向上直线对准的多个透镜元件的光学构件。 每个透镜元件具有彼此面对的折射表面和反射表面。 所述表面中的至少一个是复曲面的，以便在狭缝的纵向方向上形成竖立的真实图像，并且在横向方向上形成反转的实像。

公开(公告)号：US4235654A

公开(公告)日：1980-11-25

申请号：US912744

申请日：1978-06-05

申请人： Toshihide Dohi ,  Sigeo Kitaguchi

发明人： Toshihide Dohi ,  Sigeo Kitaguchi

IPC分类号： C03C17/32 ,  G02B5/18 ,  G02B5/20 ,  B32B17/10 ,  C03C17/30 ,  G02C7/02

CPC分类号： C03C17/32 ,  Y10S359/90

摘要： A method of producing a composite optical element such as lenses and optical filters is provided. The resulting product has a high quality precision surface with a relatively low production cost. A glass substrate is treated with a silanating agent to activate its surface. An organic polymer material can then be applied to the activated surface with a mold platen forming a desired exterior configuration. The organic polymer is then polymerized to form a relatively thin layer of cured organic material having the exterior desired surface configuration of the glass substrate. The composite optical product is then released from the mold in its final configuration in a relatively short time period.

摘要翻译： 提供了一种制造诸如透镜和滤光器的复合光学元件的方法。 所得产品具有高质量的精密表面，具有相对低的生产成本。 玻璃基底用硅烷化剂处理以活化其表面。 然后可以用形成期望的外部构造的模板来将有机聚合物材料施加到活化表面。 然后将有机聚合物聚合以形成具有玻璃基底的外部所需表面形状的相对薄的固化有机材料层。 然后，复合光学产品在相对较短的时间内以其最终配置从模具中释放出来。