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    Method of making a color filter
    1.
    发明授权
    Method of making a color filter 失效
    制作滤色片的方法

    公开(公告)号：US5952129A

    公开(公告)日：1999-09-14

    申请号：US721202

    申请日：1996-09-26

    申请人： Hiroshi Kiguchi ,  Takao Nishikawa ,  Tatsuya Shimoda ,  Masaru Kojima ,  Sadao Kanbe

    发明人： Hiroshi Kiguchi ,  Takao Nishikawa ,  Tatsuya Shimoda ,  Masaru Kojima ,  Sadao Kanbe

    IPC分类号： G02B5/20 ,  G02B5/22 ,  G02F1/1335

    CPC分类号： G02B5/223 ,  G02F1/133516

    摘要： A process of making a color filter includes a first step of producing a master having a plurality of ink charging recesses arranged in a given pattern, a second step of charging ink of preselected colors into the ink charging recesses to form an ink layer, a third step of forming a resin layer over the master into which the ink have been charged and a fourth step of separating the ink layer and the resin layer together from the master after these layers have been cured.

    摘要翻译： 制造滤色器的过程包括制备具有以给定图案布置的多个墨水填充凹槽的母版的第一步骤，将预选颜色的墨水充入墨水填充凹部中以形成墨层的第二步骤，第三步骤 在已经充有油墨的母料上形成树脂层的步骤以及在这些层已经固化之后将油墨层和树脂层与母料分离的第四步骤。

    Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device
    9.
    发明授权
    Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device 失效
    设置有涂膜，液晶面板和电子装置的薄膜装置以及制造薄膜装置的方法

    公开(公告)号：US07067337B2

    公开(公告)日：2006-06-27

    申请号：US10190723

    申请日：2002-07-09

    申请人： Ichio Yudasaka ,  Tatsuya Shimoda ,  Sadao Kanbe ,  Wakao Miyazawa

    发明人： Ichio Yudasaka ,  Tatsuya Shimoda ,  Sadao Kanbe ,  Wakao Miyazawa

    IPC分类号： H01L21/84

    CPC分类号： G02F1/136227 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L29/66757 ,  H01L29/66765 ,  Y10T428/1064 ,  Y10T428/31663

    摘要： Any one of an insulating film forming a TFT, a silicon film and a conductive film is formed by applying a solution and annealing it. In a spin coater (102), a coating solution containing a thin film component which is supplied from a solution storage section (105) is spin-coated onto a substrate. The substrate after coating the coating solution is annealed in an annealing section (103) to form a coating film on the substrate. Additional laser annealing improves one of film characteristics, i.e., crystallinity, density and adhesiveness. Application of the coating solution or a resist by an ink jet process increases utilization of the solution and permits forming a patterned coating film. Because a thin film device in accordance with the present invention is inexpensive and has a high throughput, TFT production by a production system having high utilization of the coating solution drastically reduces initial investment and production cost of a liquid crystal display device.

    摘要翻译： 形成TFT，硅膜和导电膜的绝缘膜中的任何一种通过涂覆溶液并退火而形成。 在旋转涂布机（102）中，将从溶液储存部（105）供给的含有薄膜成分的涂布溶液旋涂在基板上。 将涂布溶液涂布后的基板在退火部（103）中退火，在基板上形成涂膜。 附加的激光退火改善膜特性，即结晶度，密度和粘附性。 涂布溶液或抗蚀剂通过喷墨工艺的应用增加了溶液的利用率并且允许形成图案化的涂膜。 由于根据本发明的薄膜器件便宜并且具有高产量，所以通过具有高涂层溶液利用率的生产系统的TFT生产大大降低了液晶显示器件的初始投资和生产成本。

    Thin film device provided with coating film, liquid crystal panel and electronic device, and method the thin film device
    10.
    发明授权
    Thin film device provided with coating film, liquid crystal panel and electronic device, and method the thin film device 失效
    具有涂膜，液晶面板和电子器件的薄膜器件，以及薄膜器件的方法

    公开(公告)号：US06593591B2

    公开(公告)日：2003-07-15

    申请号：US09325567

    申请日：1999-06-04

    申请人： Ichio Yudasaka ,  Tatsuya Shimoda ,  Sadao Kanbe ,  Wakao Miyazawa

    发明人： Ichio Yudasaka ,  Tatsuya Shimoda ,  Sadao Kanbe ,  Wakao Miyazawa

    IPC分类号： H01L3300

    CPC分类号： G02F1/136227 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L29/66757 ,  H01L29/66765 ,  Y10T428/1064 ,  Y10T428/31663

    摘要： Any one of an insulating film forming a TFT, a silicon film and a conductive film is formed by applying a solution and annealing it. In a spin coater (102), a coating solution containing a thin film component which is supplied from a solution storage section (105) is spin-coated onto a substrate. The substrate after coating the coating solution is annealed in an annealing section (103) to form a coating film on the substrate. Additional laser annealing improves one of film characteristics, i.e., crystallinity, density and adhesiveness. Application of the coating solution or a resist by an ink jet process increases utilization of the solution and permits forming a patterned coating film. Because a thin film device in accordance with the present invention is inexpensive and has a high throughput, TFT production by a production system having high utilization of the coating solution drastically reduces initial investment and production cost of a liquid crystal display device.

    摘要翻译： 形成TFT，硅膜和导电膜的绝缘膜中的任何一种通过涂覆溶液并退火而形成。 在旋转涂布机（102）中，将从溶液储存部（105）供给的含有薄膜成分的涂布溶液旋涂在基板上。 将涂布溶液涂布后的基板在退火部（103）中退火，在基板上形成涂膜。 附加的激光退火改善膜特性，即结晶度，密度和粘附性。 涂布溶液或抗蚀剂通过喷墨工艺的应用增加了溶液的利用率并且允许形成图案化的涂膜。 由于根据本发明的薄膜器件便宜并且具有高产量，所以通过具有高涂层溶液利用率的生产系统的TFT生产大大降低了液晶显示器件的初始投资和生产成本。