摘要:
A SiC device includes: a substrate; a drift layer; a base region; a source region; a channel layer connecting the drift layer and the source region; a gate oxide film on the channel layer and the source region; a gate electrode on the gate oxide film; an interlayer insulation film with a contact hole having a barrier layer and a BPSG insulation film on the gate electrode; a source electrode having upper and lower wiring electrodes on the interlayer insulation film and in the contact hole for connecting the base region and the source region; and a drain electrode on the substrate. The barrier layer prevents a Ni component in the lower wiring electrode from being diffused into the BPSG insulation film.
摘要:
A SiC device includes: a substrate; a drift layer; a base region; a source region; a channel layer connecting the drift layer and the source region; a gate oxide film on the channel layer and the source region; a gate electrode on the gate oxide film; an interlayer insulation film with a contact hole having a barrier layer and a BPSG insulation film on the gate electrode; a source electrode having upper and lower wiring electrodes on the interlayer insulation film and in the contact hole for connecting the base region and the source region; and a drain electrode on the substrate. The barrier layer prevents a Ni component in the lower wiring electrode from being diffused into the BPSG insulation film.
摘要:
A method for manufacturing a SiC semiconductor device includes: forming an impurity layer in a SiC layer; and forming an oxide film on the SiC layer. The forming the impurity layer includes: implanting an impurity in the SiC layer; applying a cap layer on the SiC layer; annealing the cap layer to be transformed to a carbon layer; annealing the SiC layer to activate the impurity with covering the SiC layer with the carbon layer; removing the carbon layer; and performing a sacrifice oxidation process. The performing the sacrifice oxidation process includes: forming a sacrifice oxide film; and removing the sacrifice oxide film. The forming the oxide film is performed after the performing the sacrifice oxidation process.
摘要:
A method for manufacturing a SiC semiconductor device includes: forming an impurity layer in a SiC layer; and forming an oxide film on the SiC layer. The forming the impurity layer includes: implanting an impurity in the SiC layer; applying a cap layer on the SiC layer; annealing the cap layer to be transformed to a carbon layer; annealing the SiC layer to activate the impurity with covering the SiC layer with the carbon layer; removing the carbon layer; and performing a sacrifice oxidation process. The performing the sacrifice oxidation process includes: forming a sacrifice oxide film; and removing the sacrifice oxide film. The forming the oxide film is performed after the performing the sacrifice oxidation process.
摘要:
A spatial information detecting device for accurately detecting information of a target space is provided. This device has photoelectric converters for receiving a reflection light from the space, in which a flashing light is being irradiated, a charge storage portion formed in each of the photoelectric converters by applying a control voltage to electrodes on each of the photoelectric converters, a controller for controlling the number of electrodes, to which the control voltage is applied, such that an area of the charge storage portion changes based on a flash cycle of the flashing light, and an amplitude-image generator for generating an amplitude image having pixel values, each of which is provided by a difference between electric charges collected in a lighting period of the flashing light by a charge storage portion and the electric charges collected in a non-lighting period of the flashing light by another charge storage portion.
摘要:
A speech signal input from a microphone is distributed by a distribution amplifier. Using output signals of a filter group of cos phase having cut-off frequency moderate on low frequency side and steep on high frequency side and of similar filter group of sin phase, stability index is calculated based on magnitude of amplitude modulation and magnitude of frequency modulation of the signals, by stability index calculating portion and fundamental frequency extracting portion. Based on the result of calculation, approximate value of fundamental frequency is calculated based on an output of a channel indicating maximum stability, and based on the approximate value of fundamental frequency, instantaneous frequency extracting portion extracts precise instantaneous frequency as fundamental frequency, interpolating value of instantaneous frequency from adjacent frequency channels.
摘要:
A speech recognition method in which input speech signals are converted to digital signals and then time sequentially converted to cepstrum coefficients or logarithmic spectra. Dynamic spectrum time sequence is obtained by time frequency filtering of cepstrum coefficients, or masked spectrum time sequence is obtained by time frequency masking of the logarithmic vector time sequence. Based on the dynamic cepstrum time sequence or masked spectrum time sequence obtained in this manner, speech is recognized.
摘要:
A cushion body includes a main body made of elastic foam and having at opposite sides thereof first and second surfaces between which a thickness is defined, the main body being formed with a plurality of holes in a direction of the thickness, a plurality of columnar elastic members positioned in the plural holes, respectively, the plural columnar elastic members being different from the main body in elasticity, a first surface member made of elastic foam similar to the elastic foam of the main body, the first surface member being connected to the first surface of the main body, and a second surface member made of elastic foam similar to the elastic foam of the main body, the second surface member being connected to the second surface of the main body.
摘要:
The automatic gang switch having a heat ray sensor is fixedly mounted on a mounting frame having a generally rectangular opening. The length of a housing of the switch is approximately two thirds of that of the generally rectangular opening of the mounting frame, while the width of the housing is approximately equal to that of the generally rectangular opening of the mounting frame. The switch includes a human body detecting section for detecting heat rays emitted from a human body and a circuit section. The circuit section includes a control circuit for generating a control signal to turn a load on for a predetermined operation holding time when the human body detecting section generates a detection signal, a load control circuit connected to a power source and the load in series for turning on or off power supply to the load depending on the control signal, an off-time power circuit connected in parallel with the load control circuit and having an input impedance with which the load is not driven when the load control circuit is off, the off-time power circuit supplying an electric power to the control circuit when the load control circuit is off, and an on-time power circuit for supplying the electric power to the control circuit when the load control circuit is on. The switch further includes a time setting section for setting an operation holding time and a mode setting section for changing over an operation mode of the control circuit.
摘要:
At a smoothing spectrogram calculation portion, a triangular interpolation function having a frequency width twice that of the fundamental frequency of a signal is obtained based on information on the fundamental frequency of the signal. The interpolation function and a spectrum obtained at an adaptive frequency analysis portion are convoluted in the direction of frequency. Then, using a triangular interpolation function having a time length twice that of a fundamental period, the spectrum interpolated in the frequency direction described above is further interpolated in the temporal direction, in order to produce a smoothed spectrogram having the space between grid points on the time-frequency plane filled with the surface of a bilinear function. Using the smoothed spectrogram, a speech sound is transformed. Therefore, the influence of periodicity in the frequency direction and the temporal direction can be reduced.