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公开(公告)号：US20120248305A1
公开(公告)日：2012-10-04
申请号：US13368549
申请日：2012-02-08
申请人： Hiroyuki NODA , Mitsuru ONUMA , Yoko SATO , Koji ISHIGURO , Hidetoshi MOROKUMA , Shigeo OTSUKI , Nami IBI
发明人： Hiroyuki NODA , Mitsuru ONUMA , Yoko SATO , Koji ISHIGURO , Hidetoshi MOROKUMA , Shigeo OTSUKI , Nami IBI
CPC分类号： H01J49/0022 , H01J49/0013 , H05K7/20136
摘要： In the spectrometer, heavy loads are arranged centrally inside a case having a height smaller than a width, and having a depth smaller than the height. The heavy loads include a vacuum chamber, a vacuum pump which evacuates the vacuum chamber, a sample introduction unit which introduces a sample to be measured and evaporates the sample, an ionization unit which ionizes the evaporated sample and provides it to the vacuum chamber, and an ion detection unit which is connected to the vacuum chamber. Circuit board storage units which store a plurality of circuit boards with a predetermined space therebetween are formed on both sides along a width direction of the case.
摘要翻译： 在光谱仪中，重负荷被布置在具有小于宽度的高度的壳体的中央内部，并且具有比该高度更小的深度。 重负荷包括真空室，抽空真空室的真空泵，引入待测样品并蒸发样品的样品引入单元，离子化蒸发的样品并将其提供给真空室的离子化单元，以及 离子检测单元，连接到真空室。 在壳体的宽度方向的两侧形成存储有多个电路板的电路板存储单元。
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公开(公告)号：US20120112061A1
公开(公告)日：2012-05-10
申请号：US13289633
申请日：2011-11-04
申请人： Hidetoshi MOROKUMA , Yuichiro HASHIMOTO , Masuyuki SUGIYAMA , Masuyoshi YAMADA , Hideki HASEGAWA
发明人： Hidetoshi MOROKUMA , Yuichiro HASHIMOTO , Masuyuki SUGIYAMA , Masuyoshi YAMADA , Hideki HASEGAWA
IPC分类号： H01J49/04
CPC分类号： H01J49/0013 , H01J49/0031 , H01J49/0422 , H01J49/0495 , H01J49/10 , H01J49/105 , H01J49/24 , H01J49/26
摘要： A mass spectrometer of reduced size and weight is provided which is capable to conduct highly accurate mass spectroscopy. The mass spectrometer includes an ion source adapted to ionize gas flowing in from outside in order to ionize a measurement sample and a mass spectroscopy section for separating the ionized measurement sample. The ion source has its interior reduced in pressure by differential pumping from the mass spectroscopy section and ionizes the gas when the interior pressure rises as it inhales the gas, and the mass spectroscopy section separates the ionized measurement sample when its interior pressure falls after inhale of the gas. The mass spectrometer may further include a restriction device for suppressing a flow rate of the gas the ion source inhales and an open/close device for opening and closing a flow of the gas the ion source inhales.
摘要翻译： 提供了减小尺寸和重量的质谱仪，其能够进行高精度的质谱。 质谱仪包括离子源，其适于使从外部流入的气体电离，以便电离测量样品和用于分离离子化测量样品的质谱部分。 离子源的内部通过从质谱分析部分的差分泵送而在内部减压，并且当吸入气体时内部压力升高时电离气体，质谱仪分离离子化测量样品，当其内部压力在吸入后 气体。 质谱仪还可以包括用于抑制离子源吸入的气体的流量的限制装置和用于打开和关闭离子源吸入的气体流的打开/关闭装置。
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公开(公告)号：US20110253889A1
公开(公告)日：2011-10-20
申请号：US13084930
申请日：2011-04-12
申请人： Masako ISHIMARU , Yuichiro HASHIMOTO , Hideki HASEGAWA , Masuyoshi YAMADA , Masuyuki SUGIYAMA , Hidetoshi MOROKUMA
发明人： Masako ISHIMARU , Yuichiro HASHIMOTO , Hideki HASEGAWA , Masuyoshi YAMADA , Masuyuki SUGIYAMA , Hidetoshi MOROKUMA
CPC分类号： H01J49/145
摘要： An analyzer performs dielectric barrier discharge and ionization of a sample by a reaction between the sample and excited molecules or ions generated by the dielectric barrier discharge at a pressure lower than an atmospheric pressure.
摘要翻译： 分析仪通过在低于大气压的压力下通过介电阻挡放电产生的样品和激发的分子或离子之间的反应来进行介电阻挡放电和样品的离子化。
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公开(公告)号：US20130056633A1
公开(公告)日：2013-03-07
申请号：US13667386
申请日：2012-11-02
CPC分类号： H01J49/0422 , H01J49/0013 , H01J49/0495 , H01J49/24
摘要： A mass spectrometer having a resolution improved by introducing ions into a mass spectrometry part with a high efficiency is provided with a small-sized, simple configuration. The mass spectrometer includes an opening/closing mechanism provided between a sample introducing piping part for introducing a sample into the mass spectrometry part and the mass spectrometry part to conduct gas introduction intermittently and control sample passage. The mass spectrometer further includes a pump mechanism to evacuate a high pressure side of the sample introducing piping part, that is, an opposite side of the opening/closing mechanism to the mass spectrometry part to have a pressure in a range of 100 to 10,000 Pa.
摘要翻译： 具有小型，简单的结构，提供通过以高效率将离子引入质谱部分而提高分辨率的质谱仪。 该质谱仪包括设置在用于将样品引入质谱部分的样品导入管道部分和质谱部分间歇地导入气体引入并控制样品通道的开/关机构。 质谱仪还包括泵机构，用于将样品导入管道部分的高压侧排出，即，将质量分析部件的开闭机构的相反侧压力为100〜10000Pa 。
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公开(公告)号：US20090200465A1
公开(公告)日：2009-08-13
申请号：US12423197
申请日：2009-04-14
IPC分类号： G21K7/00
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/2817
摘要： A pattern measuring method and device are provided which set a reference position for a measuring point to be measured by a scanning electron microscope and the like, based on position information of a reference pattern on an image acquired from the scanning electron microscope and based on a positional relation, detected by using design data, between the measuring point and the reference pattern formed at a position isolated from the measuring point.
摘要翻译： 提供了一种图案测量方法和装置，其基于通过扫描电子显微镜等测量的测量点的基准位置，基于从扫描电子显微镜获取的图像上的参考图案的位置信息，并基于 通过使用设计数据检测的位置关系，在测量点和形成在与测量点隔离的位置处形成的参考图案之间。
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公开(公告)号：US20100140472A1
公开(公告)日：2010-06-10
申请号：US12708148
申请日：2010-02-18
CPC分类号： G06T7/001 , G06T7/33 , G06T2207/10056 , G06T2207/30148
摘要： An evaluation method and apparatus is provided for evaluating a displacement between patterns of a pattern image by using design data representative of a plurality of patterns superimposed ideally. A first distance is measured for an upper layer pattern between a line segment of the design data and an edge of the charged particle radiation image, a second distance is measured for a lower layer pattern between a line segment of the design data and an edge of the charged particle radiation image; and an superimposition displacement is detected between the upper layer pattern and lower layer pattern in accordance with the first distance and second distance.
摘要翻译： 提供了一种评估方法和装置，用于通过使用表示叠加的多个图案的设计数据来理想地评估图案图案的图案之间的位移。 对于设计数据的线段和带电粒子辐射图像的边缘之间的上层图案测量第一距离，测量设计数据的线段与设计数据的边缘之间的较低层图案的第二距离 带电粒子辐射图像; 并且根据第一距离和第二距离在上层图案和下层图案之间检测叠加位移。
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公开(公告)号：US20130048851A1
公开(公告)日：2013-02-28
申请号：US13562435
申请日：2012-07-31
申请人： Shun KUMANO , Masuyuki SUGIYAMA , Yuichiro HASHIMOTO , Hideki HASEGAWA , Masuyoshi YAMADA , Kazushige NISHIMURA , Hidetoshi MOROKUMA
发明人： Shun KUMANO , Masuyuki SUGIYAMA , Yuichiro HASHIMOTO , Hideki HASEGAWA , Masuyoshi YAMADA , Kazushige NISHIMURA , Hidetoshi MOROKUMA
IPC分类号： H01J49/04
CPC分类号： H01J49/0431
摘要： A mass spectrometer for efficiently ionizing a sample with less carry-over. The ratio of the amount of sample gas to that of a whole headspace gas is increased by decreasing the pressure inside of a sample vessel in which the sample is sealed thereby efficiently ionizing the sample.
摘要翻译： 一种用于有效地电离样品的质谱仪，其携带较少。 样品气体与整个顶部空间气体的比例通过降低样品容器的内部压力而增加，其中样品被密封，从而有效地使样品电离。
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公开(公告)号：US20110253891A1
公开(公告)日：2011-10-20
申请号：US13085761
申请日：2011-04-13
CPC分类号： H01J49/0422 , H01J49/0013 , H01J49/0495 , H01J49/24
摘要： A mass spectrometer having a resolution improved by introducing ions into a mass spectrometry part with a high efficiency is provided with a small-sized, simple configuration. The mass spectrometer includes an opening/closing mechanism provided between a sample introducing piping part for introducing a sample into the mass spectrometry part and the mass spectrometry part to conduct gas introduction intermittently and control sample passage. The mass spectrometer further includes a pump mechanism to evacuate a high pressure side of the sample introducing piping part, that is, an opposite side of the opening/closing mechanism to the mass spectrometry part to have a pressure in a range of 100 to 10,000 Pa.
摘要翻译： 具有小型，简单的结构，提供通过以高效率将离子引入质谱部分而提高分辨率的质谱仪。 该质谱仪包括设置在用于将样品引入质谱部分的样品导入管道部分和质谱部分间歇地导入气体引入并控制样品通道的开/关机构。 质谱仪还包括泵机构，用于将样品导入管道部分的高压侧排出，即，将质量分析部件的开闭机构的相反侧压力为100〜10000Pa 。
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