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公开(公告)号：US20120059612A1
公开(公告)日：2012-03-08
申请号：US13224873
申请日：2011-09-02
IPC分类号： G06F19/00
CPC分类号： G03G15/5037
摘要： A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged sample with the charged particle beam to measure a potential at a potential saddle point formed above the sample, selecting one of preset multiple structure models and a tentative space charge distribution associated with the selected structure model, calculating a space potential at the potential saddle point by electromagnetic field analysis using the selected structure model and tentative space charge distribution, comparing the calculated space potential and measured value to determine the tentative space charge distribution as a space charge distribution of the sample when an error between the space potential and the measured value is within a predetermined range, and calculating a surface charge distribution of the sample by electromagnetic field analysis based on the determined space charge distribution.
摘要翻译： 表面电荷测量分配方法包括以下步骤：用带电粒子束照射样品并以点样方式填充样品表面，用带电粒子束照射带电样品以测量在上述形成的电位鞍点处的电位 采样，选择一个预设的多重结构模型和与所选择的结构模型相关联的暂定空间电荷分布，通过使用所选择的结构模型和暂定空间电荷分布的电磁场分析来计算潜在鞍点处的空间电位，比较计算出的 空间电位和测量值，当空间电位和测量值之间的误差在预定范围内时，确定作为样本的空间电荷分布的暂定空间电荷分布，并且通过电磁场分析来计算样品的表面电荷分布 基于确定的空间ch arge分布。
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公开(公告)号：US08847158B2
公开(公告)日：2014-09-30
申请号：US13224873
申请日：2011-09-02
CPC分类号： G03G15/5037
摘要： A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged sample with the charged particle beam to measure a potential at a potential saddle point formed above the sample, selecting one of preset multiple structure models and a tentative space charge distribution associated with the selected structure model, calculating a space potential at the potential saddle point by electromagnetic field analysis using the selected structure model and tentative space charge distribution, comparing the calculated space potential and measured value to determine the tentative space charge distribution as a space charge distribution of the sample when an error between the space potential and the measured value is within a predetermined range, and calculating a surface charge distribution of the sample by electromagnetic field analysis based on the determined space charge distribution.
摘要翻译： 表面电荷测量分配方法包括以下步骤：用带电粒子束照射样品并以点样方式填充样品表面，用带电粒子束照射带电样品以测量在上述形成的电位鞍点处的电位 采样，选择一个预设的多重结构模型和与所选择的结构模型相关联的暂定空间电荷分布，通过使用所选择的结构模型和暂定空间电荷分布的电磁场分析来计算潜在鞍点处的空间电位，比较计算出的 空间电位和测量值，当空间电位和测量值之间的误差在预定范围内时，确定作为样本的空间电荷分布的暂定空间电荷分布，并且通过电磁场分析来计算样品的表面电荷分布 基于确定的空间ch arge分布。
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公开(公告)号：US20100019648A1
公开(公告)日：2010-01-28
申请号：US12586792
申请日：2009-09-28
IPC分类号： H01J29/54
CPC分类号： H01J37/063 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/06316 , H01J2237/06375 , H01J2237/065
摘要： An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.
摘要翻译： 电子枪包括：电子源; 加速电极; 用于从电子源的电子发射表面提取电子的提取电极; 用于抑制从电子源的侧表面发射电子的抑制电极; 以及电子束会聚单元，用于通过向电子发射表面施加电场而会聚从电子发射表面发射的热场发射电子的电子束。 电子束会聚单元是放置在提取电极和加速电极之间并且在其中心具有开口部分的静电透镜电极。 电压施加到静电透镜电极以会聚电子束。
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4.发明授权Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same 有权电子枪使电子源和使用其的电子束曝光装置的升华最小化公开(公告)号：US08330344B2
公开(公告)日：2012-12-11
申请号：US12586792
申请日：2009-09-28
CPC分类号： H01J37/063 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/06316 , H01J2237/06375 , H01J2237/065
摘要： An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.
摘要翻译： 电子枪包括：电子源; 加速电极; 用于从电子源的电子发射表面提取电子的提取电极; 用于抑制从电子源的侧表面发射电子的抑制电极; 以及电子束会聚单元，用于通过向电子发射表面施加电场而会聚从电子发射表面发射的热场发射电子的电子束。 电子束会聚单元是放置在提取电极和加速电极之间并且在其中心具有开口部分的静电透镜电极。 电压施加到静电透镜电极以会聚电子束。
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5.发明授权Radio communications apparatus, radio communications method, and radio communications system for reducing overhead of a transmit frame 有权无线电通信装置，无线电通信方法和用于减少发射帧的开销的无线电通信系统公开(公告)号：US08681746B2
公开(公告)日：2014-03-25
申请号：US12783141
申请日：2010-05-19
IPC分类号： H04W4/00
CPC分类号： H04B7/0691 , H04B7/0623 , H04B7/0626 , H04L1/0029 , H04L1/06 , H04L1/1896 , H04L5/0023 , H04L5/0048
摘要： A radio communications apparatus is disclosed which includes a generator which generates a transmit frame; and a transmitter which transmits the transmit frame via multiple transmit antennas. In the radio communications apparatus, the transmit frame includes a predetermined number of resource elements having a predetermined frequency bandwidth and a predetermined symbol period, and the generator generates the transmit frame such that the number of transmit antennas which are identifiable from a location of the resource element taken up by a pilot signal in a certain transmit frame is less than the number of transmit antennas which are identifiable from the location of the resource element taken up by the pilot signal in a retransmission transmit frame of the certain transmit frame.
摘要翻译： 公开了一种无线电通信装置，其包括产生发送帧的发生器; 以及经由多个发送天线发送发送帧的发送机。 在无线电通信装置中，发送帧包括具有预定频率带宽和预定符号周期的预定数量的资源元素，并且生成器生成发送帧，使得可以从资源的位置识别的发送天线的数量 在特定发送帧中由导频信号占据的元素小于在特定发送帧的重发送帧中由导频信号占据的资源元素的位置可识别的发送天线的数量。
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