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公开(公告)号：US20120059612A1
公开(公告)日：2012-03-08
申请号：US13224873
申请日：2011-09-02
IPC分类号： G06F19/00
CPC分类号： G03G15/5037
摘要： A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged sample with the charged particle beam to measure a potential at a potential saddle point formed above the sample, selecting one of preset multiple structure models and a tentative space charge distribution associated with the selected structure model, calculating a space potential at the potential saddle point by electromagnetic field analysis using the selected structure model and tentative space charge distribution, comparing the calculated space potential and measured value to determine the tentative space charge distribution as a space charge distribution of the sample when an error between the space potential and the measured value is within a predetermined range, and calculating a surface charge distribution of the sample by electromagnetic field analysis based on the determined space charge distribution.
摘要翻译： 表面电荷测量分配方法包括以下步骤：用带电粒子束照射样品并以点样方式填充样品表面，用带电粒子束照射带电样品以测量在上述形成的电位鞍点处的电位 采样，选择一个预设的多重结构模型和与所选择的结构模型相关联的暂定空间电荷分布，通过使用所选择的结构模型和暂定空间电荷分布的电磁场分析来计算潜在鞍点处的空间电位，比较计算出的 空间电位和测量值，当空间电位和测量值之间的误差在预定范围内时，确定作为样本的空间电荷分布的暂定空间电荷分布，并且通过电磁场分析来计算样品的表面电荷分布 基于确定的空间ch arge分布。
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公开(公告)号：US08847158B2
公开(公告)日：2014-09-30
申请号：US13224873
申请日：2011-09-02
CPC分类号： G03G15/5037
摘要： A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged sample with the charged particle beam to measure a potential at a potential saddle point formed above the sample, selecting one of preset multiple structure models and a tentative space charge distribution associated with the selected structure model, calculating a space potential at the potential saddle point by electromagnetic field analysis using the selected structure model and tentative space charge distribution, comparing the calculated space potential and measured value to determine the tentative space charge distribution as a space charge distribution of the sample when an error between the space potential and the measured value is within a predetermined range, and calculating a surface charge distribution of the sample by electromagnetic field analysis based on the determined space charge distribution.
摘要翻译： 表面电荷测量分配方法包括以下步骤：用带电粒子束照射样品并以点样方式填充样品表面，用带电粒子束照射带电样品以测量在上述形成的电位鞍点处的电位 采样，选择一个预设的多重结构模型和与所选择的结构模型相关联的暂定空间电荷分布，通过使用所选择的结构模型和暂定空间电荷分布的电磁场分析来计算潜在鞍点处的空间电位，比较计算出的 空间电位和测量值，当空间电位和测量值之间的误差在预定范围内时，确定作为样本的空间电荷分布的暂定空间电荷分布，并且通过电磁场分析来计算样品的表面电荷分布 基于确定的空间ch arge分布。
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公开(公告)号：US20100019648A1
公开(公告)日：2010-01-28
申请号：US12586792
申请日：2009-09-28
IPC分类号： H01J29/54
CPC分类号： H01J37/063 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/06316 , H01J2237/06375 , H01J2237/065
摘要： An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.
摘要翻译： 电子枪包括：电子源; 加速电极; 用于从电子源的电子发射表面提取电子的提取电极; 用于抑制从电子源的侧表面发射电子的抑制电极; 以及电子束会聚单元，用于通过向电子发射表面施加电场而会聚从电子发射表面发射的热场发射电子的电子束。 电子束会聚单元是放置在提取电极和加速电极之间并且在其中心具有开口部分的静电透镜电极。 电压施加到静电透镜电极以会聚电子束。
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4.发明授权Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same 有权电子枪使电子源和使用其的电子束曝光装置的升华最小化公开(公告)号：US08330344B2
公开(公告)日：2012-12-11
申请号：US12586792
申请日：2009-09-28
CPC分类号： H01J37/063 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/06316 , H01J2237/06375 , H01J2237/065
摘要： An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.
摘要翻译： 电子枪包括：电子源; 加速电极; 用于从电子源的电子发射表面提取电子的提取电极; 用于抑制从电子源的侧表面发射电子的抑制电极; 以及电子束会聚单元，用于通过向电子发射表面施加电场而会聚从电子发射表面发射的热场发射电子的电子束。 电子束会聚单元是放置在提取电极和加速电极之间并且在其中心具有开口部分的静电透镜电极。 电压施加到静电透镜电极以会聚电子束。
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公开(公告)号：US20120062259A1
公开(公告)日：2012-03-15
申请号：US13231341
申请日：2011-09-13
IPC分类号： G01R31/20
CPC分类号： G01R31/2887 , G01R31/2891 , G01R31/2893
摘要： A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.
摘要翻译： 晶片检查装置包括第一和第二晶片传送机构，对准室，第二晶片传送机构和多个检查室。 第一晶片传送机构安装在第一传送区域以分别从外壳传送晶片。 对准室具有对准机构，其配置成将晶片对准用于电特性检查的检查位置。 第二晶片传送机构被配置为将晶片通过晶片保持支撑件传送在沿着第一传送区域形成的第二传送区域和对准区域中。 多个检查室被布置在沿着第二传送区域形成的检查区域，并且被配置为检查由第二晶片传送机构通过晶片保持支撑件传送的晶片的电特性。
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公开(公告)号：US20110304348A1
公开(公告)日：2011-12-15
申请号：US13159108
申请日：2011-06-13
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2887 , H01L21/67242 , H01L21/67748
摘要： Disclosed is an apparatus for driving a placing table that contributes to saving a space and reducing the weight of an inspecting apparatus. The apparatus for driving a placing table according to an exemplary embodiment of the present disclosure includes a horizontal driving mechanism that horizontally moves a placing table in an inspecting chamber, a base that supports horizontal driving mechanism, a placing table lifting mechanism (for example, air bearing) that lifts placing table from support, using compressed air in inspecting chamber, a connecting mechanism that connects horizontal driving mechanism with placing table, and a case that accommodates the horizontal driving mechanism and the base.
摘要翻译： 公开了一种用于驱动放置台的装置，其有助于节省空间并降低检查装置的重量。 根据本公开的示例性实施例的用于驱动放置台的装置包括水平驱动机构，其水平地移动检查室中的放置台，支撑水平驱动机构的基座，放置台提升机构（例如，空气 轴承），其从支撑件提升放置台，在检查室中使用压缩空气，将水平驱动机构与放置台连接的连接机构，以及容纳水平驱动机构和底座的壳体。
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公开(公告)号：US07963513B2
公开(公告)日：2011-06-21
申请号：US12024556
申请日：2008-02-01
申请人： Hiroshi Shimoyama , Kazuya Yano , Masaru Suzuki
发明人： Hiroshi Shimoyama , Kazuya Yano , Masaru Suzuki
IPC分类号： B23Q1/64
CPC分类号： G01R31/2887 , H01L21/682 , Y10S269/90
摘要： A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.
摘要翻译： 一种设置在水平移动平台机构上的安装装置，包括用于安装目标物体的安装台，具有小于安装台直径的直径的圆柱形升降体，用于支撑安装台，多个升降导轨 轨道设置在立面体的外周面上，以在圆周方向上以大致规则的间隔彼此隔开;多个支撑构件，每个支撑构件具有与升降导轨接合的接合体的垂直板， 固定。 此外，多个加强部分在垂直体的外周面垂直地设置，以便在圆周方向上以大致规则的间隔彼此间隔开。
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公开(公告)号：US5921075A
公开(公告)日：1999-07-13
申请号：US849996
申请日：1997-08-05
CPC分类号： F23R3/60 , F01D25/285 , F05D2230/60 , F05D2230/70
摘要： A burner replacing system has a rail mounted in a ring around the outer periphery of burners mounted radially at the middle of a gas turbine. A carriage turns around the burners via the rail; and supports a pull-out slide via a rotary shaft which turns the slide up and down in the direction of a center axis of the gas turbine. Another rotary shaft turns the slide right and left around a radial axis of the gas turbine. The slide moves in the axial direction of the burners. A hand for gripping the burner is supported by the pull-out slide via a centering slide which moves up and down in the radial direction of the burner. An alternate system has a pull-out slide which is supported by the carriage and moves forward and backward in the axial direction of the burner. A telescopic slide is supported by the pull-out slide and expands in the axial direction of the burner. The hand is provided at the edge of the telescopic slide to grip the burner.
摘要翻译： PCT No.PCT / JP96 / 03030 Sec。 371日期：1997年8月5日 102（e）日期1997年8月5日PCT PCT 1996年10月18日PCT公布。 第WO97 / 14529号公报 日期1997年04月24日燃烧器更换系统具有围绕燃气轮径向安装在燃气轮机中间的燃烧器外周围的环状轨道。 托架通过导轨转动燃烧器; 并且通过旋转轴支撑拉出滑块，所述旋转轴沿着燃气轮机的中心轴线的方向上下滑动滑块。 另一旋转轴绕着燃气轮机的径向轴线左右转动滑块。 滑块沿燃烧器的轴向移动。 用于夹紧燃烧器的手由拉出的滑块通过沿着燃烧器的径向上下移动的定心滑块来支撑。 替代系统具有由滑架支撑并沿着燃烧器的轴向方向前后移动的拉出滑块。 伸缩滑块由拉出滑块支撑，并沿着燃烧器的轴向膨胀。 手臂设置在伸缩滑块的边缘以夹紧燃烧器。
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9.发明授权公开(公告)号：US07940065B2
公开(公告)日：2011-05-10
申请号：US12363110
申请日：2009-01-30
申请人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
发明人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.
摘要翻译： 探针装置包括第一级，第二级，第三级和图像拾取器。 Z位置测量单元测量安装台的Z方向位置，并且具有在Z方向上延伸的Z刻度和用于读取Z刻度的读取单元。 计算单元根据摄像机拾取的图像相对于包括Z方向位置的驱动系统的坐标坐标位置和X方向位置获得计算出的被检查基板的探针与电极焊盘之间的接触位置 和Y方向位置由用于测量安装台的X和Y方向位置的测量单元测量。 校正单元根据下一次接触操作的变化量校正接触位置的Z方向位置。
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公开(公告)号：US20080184916A1
公开(公告)日：2008-08-07
申请号：US12020655
申请日：2008-01-28
申请人： Kazuya YANO , Hiroshi Shimoyama , Masaru Suzuki
发明人： Kazuya YANO , Hiroshi Shimoyama , Masaru Suzuki
IPC分类号： A47B9/00
CPC分类号： G12B5/00 , Y10T74/20348
摘要： A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.
摘要翻译： 安装装置包括用于安装目标物体的可垂直移动的安装台和用于使安装台旋转预定角度的旋转驱动机构。 安装台由旋转驱动机构垂直升高并旋转。 旋转驱动机构包括沿着安装台的切线方向延伸的驱动轴和经由驱动轴沿切线方向移动的移动体。 第一凸轮从动件垂直于移动体附接，第二凸轮从动件从安装台的外周面水平延伸，以与第一凸轮从动件接触。 此外，连接安装台和移动体的弹性构件使第一凸轮从动件和第二凸轮从动件彼此弹性接触。
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