Polishing pad and polisher
    1.
    发明授权
    Polishing pad and polisher 失效
    抛光垫和抛光机

    公开(公告)号:US06544104B1

    公开(公告)日:2003-04-08

    申请号:US10049664

    申请日:2002-02-15

    IPC分类号: B24B4900

    摘要: A window member (11) having an intentionally designed distribution of refractive index is used, as a transparent window member in a light transmission area of a polishing pad for detecting the end point of polishing by a CMP method. This window member (11) has areas (11a) having a high refractive index and areas (11b) having a low refractive index in its window face. In a cross section normal to the window face, the high-refractive index areas (11a) and the low-refractive index areas (11b) are alternately arranged in stripes. These areas (11a and 11b) in the window face are in a Fresnel zone plate arrangement in which the first area (center circle) is a bright one (area having a high refractive index). A plurality of such Fresnel zone plates (F) are arrayed in a matrix in the window face of the window member (11).

    摘要翻译: 使用具有有意设计的折射率分布的窗构件(11)作为用于通过CMP方法检测抛光终点的抛光垫的透光区域中的透明窗构件。该窗构件(11)具有 具有高折射率的区域(11a)和在其窗口面中具有低折射率的区域(11b)。 在垂直于窗口的横截面中,高折射率区域(11a)和低折射率区域(11b)以条纹交替排列。 窗口中的这些区域(11a和11b)是菲涅尔区域板布置,其中第一区域(中心圆)是明亮的(具有高折射率的区域)。 多个这样的菲涅尔带板(F)以矩阵形式排列在窗构件(11)的窗面中。

    Biaxially oriented polylactic acid-based resin films
    2.
    发明申请
    Biaxially oriented polylactic acid-based resin films 有权
    双轴取向聚乳酸类树脂膜

    公开(公告)号:US20050008815A1

    公开(公告)日:2005-01-13

    申请号:US10493387

    申请日:2002-10-29

    摘要: The present invention provides a biaxially oriented film of a polylactic acid resin that is suitable for films for bags and packaging films for various windows, particularly films for outlook window envelopes. The film is biodegradable and, as films for outlook window envelopes, is superior in the coating adaptability for an antistatic agent, a lubricant and an antiblocking agent or the like and in the high-speed cutting property. The present invention discloses a biaxially oriented film of a polylactic acid resin comprising not less than 50% by weight of a polylactic acid resin, which has a storage modulus E′at 80° C. within the range from 10 MPa to 3,000 MPa, as determined by the test method for temperature dependency of dynamic viscoelasticity, in accordance with JIS K7198 (method A); a heat shrinkage of not higher than 10%, upon heating at 80° C. for 10 seconds; and a tear strength in the width direction (TD direction) of the film of 10 to 200 mN, as determined in accordance with JIS K7128 (method B).

    摘要翻译: 本发明提供了适用于各种窗用袋和包装膜的聚乳酸树脂的双轴取向膜,特别是用于外观窗口包膜的膜。 该膜是可生物降解的,并且作为外观窗口信封的膜,在抗静电剂,润滑剂和防粘连剂等的涂布适应性方面以及在高速切割性方面是优异的。 本发明公开了一种聚乳酸树脂的双轴取向膜,其包含不低于50重量%的聚乳酸树脂,其储能模量E'为80℃,为10MPa〜3000MPa,为 根据JIS K7198(方法A)由动态粘弹性的温度依赖性测试方法确定; 热收缩率不高于10%,在80℃加热10秒钟; 以及根据JIS K7128(方法B)测定的膜的宽度方向(TD方向)的撕裂强度为10〜200mN。

    Biaxially oriented polylactic acid-based resin films
    3.
    发明授权
    Biaxially oriented polylactic acid-based resin films 有权
    双轴取向聚乳酸类树脂膜

    公开(公告)号:US07175917B2

    公开(公告)日:2007-02-13

    申请号:US10493387

    申请日:2002-10-29

    摘要: The present invention provides a biaxially oriented film of a polylactic acid resin that is suitable for films for bags and packaging films for various windows, particularly films for outlook window envelopes. The film is biodegradable and, as films for outlook window envelopes, is superior in the coating adaptability for an antistatic agent, a lubricant and an antiblocking agent or the like and in the high-speed cutting property.The present invention discloses a biaxially oriented film of a polylactic acid resin comprising not less than 50% by weight of a polylactic acid resin, which has a storage modulus E′at 80° C. within the range from 10 MPa to 3,000 MPa, as determined by the test method for temperature dependency of dynamic viscoelasticity, in accordance with JIS K7198 (method A); a heat shrinkage of not higher than 10%, upon heating at 80° C. for 10 seconds; and a tear strength in the width direction (TD direction) of the film of 10 to 200 mN, as determined in accordance with JIS K7128 (method B).

    摘要翻译: 本发明提供了适用于各种窗用袋和包装膜的聚乳酸树脂的双轴取向膜,特别是用于外观窗口包膜的膜。 该膜是可生物降解的,并且作为外观窗口信封的膜,在抗静电剂,润滑剂和防粘连剂等的涂布适应性方面以及在高速切割性方面是优异的。 本发明公开了一种聚乳酸树脂的双轴取向膜,其包含不低于50重量%的聚乳酸树脂,其储能模量E'为80℃,为10MPa〜3000MPa,为 根据JIS K7198(方法A)由动态粘弹性的温度依赖性测试方法确定; 热收缩率不高于10%,在80℃加热10秒钟; 以及根据JIS K7128(方法B)测定的膜的宽度方向(TD方向)的撕裂强度为10〜200mN。

    Expanded fluorine type resin products and a preparation process thereof
    4.
    发明授权
    Expanded fluorine type resin products and a preparation process thereof 失效
    膨胀型氟树脂产品及其制备方法

    公开(公告)号:US5814409A

    公开(公告)日:1998-09-29

    申请号:US921528

    申请日:1997-09-02

    摘要: The present invention relates to an expanded product comprising a thermoplastic fluroine type resin which does not have a cross-linking structure and has an expansion ratio of between 4-fold and 30-fold and a closed cell percentage of 40% or more. The expanded product contains at least one interface comprising layers having different cell densities and has a distribution index (Sc) and a coefficient of variation (Cv) of the maximum diameter of an open cell present at an optional cross section of each layer of 0

    摘要翻译: 本发明涉及一种膨胀产品,其包含不具有交联结构且膨胀率在4倍至30倍之间的热塑性氟仿型树脂,闭孔率为40%以上。 膨胀产品包含至少一个界面,其包含具有不同细胞密度的层,并且具有分布指数(Sc)和存在于每个层0的任意横截面处的开放细胞的最大直径的变异系数(Cv) 分别由以下等式表示:Sc =(LMax.-LMin。)/ Lav。(1)Cv = SD / Lav。(2)其中,LMax 。,LMin。 和拉夫。 分别表示开放细胞的最大直径的最大值,最小值和平均值; SD表示标准偏差。 膨胀产品可以用作电子材料的抛光布,并且不会使边缘变钝,长时间表现出稳定的抛光性能,并且具有优异的机械强度如撕裂强度和抗压强度,压缩前后的介电常数 膨胀产品,以及优异的耐电压性。