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公开(公告)号：US12076832B2
公开(公告)日：2024-09-03
申请号：US16791881
申请日：2020-02-14
发明人： Jong Wook Yun , Eun Sun Joeng , Hye Young Heo , Jang Won Seo
IPC分类号： B24B37/24 , B24B7/22 , B24D11/00 , C08J9/12 , H01L21/306
CPC分类号： B24B37/24 , B24B7/228 , B24D11/00 , C08J9/12 , H01L21/30625 , C08J2375/04
摘要： The present invention provides a polishing pad whose crosslinking density is adjusted to enhance the performance of the CMP process such as polishing rate and cut pad rate. In addition, in the process for preparing a polishing pad according to the embodiment, it is possible to implement such a crosslinking density by a simple method of controlling the preheating temperature of the mold for curing. Thus, the polishing pad may be applied to a process of preparing a semiconductor device, which comprises a CMP process, to provide a semiconductor device such as a wafer of excellent quality.
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公开(公告)号：US11970650B2
公开(公告)日：2024-04-30
申请号：US18094511
申请日：2023-01-09
发明人： Negus B. Adefris
IPC分类号： B24D11/00 , B24D3/14 , C04B35/111 , C04B35/628 , C09K3/14
CPC分类号： C09K3/1409 , B24D3/14 , B24D11/00 , C04B35/1115 , C04B35/62815 , C04B35/62886 , C04B2235/3206 , C04B2235/3218 , C04B2235/3225 , C04B2235/3227 , C04B2235/3275 , C04B2235/602 , C04B2235/72 , C04B2235/94
摘要： Shaped ceramic abrasive particles include a first surface having a perimeter having a perimeter comprising at least first and second edges. A first region of the perimeter includes the second edge and extends inwardly and terminates at two corners defining first and second acute interior angles. The perimeter has at most four corners that define acute interior angles. A second surface is disposed opposite, and not contacting, the first surface. A peripheral surface is disposed between and connects the first and second surfaces. The peripheral surface has a first predetermined shape. Methods of making the shaped ceramic abrasive particles, and abrasive articles including them are also disclosed.
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公开(公告)号：US11951655B2
公开(公告)日：2024-04-09
申请号：US17877911
申请日：2022-07-30
申请人： Shreya Majumdar
发明人： Shreya Majumdar
IPC分类号： B29B17/02 , B09B3/30 , B09B101/75 , B09B101/85 , B24D11/00
CPC分类号： B29B17/02 , B09B3/30 , B09B2101/75 , B09B2101/85 , B24D11/00 , B29B2017/0217 , B29B2017/0293
摘要： A method of separating constituent layers from a paper-plastic laminate material includes disposing a sheet of a paper-plastic laminate material on a first surface. The paper-plastic laminate material includes a paper layer on a first side and a plastic layer on a second side. The method also includes moving an abrasive second surface over the paper layer on the first side to contact the paper layer and separate portions of the paper layer from the plastic layer. The method further includes collecting the separated portions of the paper layer and providing the separated portions of the paper layer as input to a paper recycling process, and collecting the plastic layer and providing the plastic layer as input to a plastic recycling process. The method may help increase recycling rates of paper and plastic, reduce raw material harvesting, reduce pollution and habitat destruction, and improve the quality of recycled material.
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公开(公告)号：US11931856B2
公开(公告)日：2024-03-19
申请号：US17592706
申请日：2022-02-04
申请人： SK enpulse Co., Ltd.
发明人： Sunghoon Yun , Hye Young Heo , Jang Won Seo
IPC分类号： B24D11/00 , B24B37/24 , B24B37/26 , H01L21/321
CPC分类号： B24B37/24 , B24B37/26 , B24D11/00 , B24D11/003 , H01L21/3212
摘要： Embodiments relate to a polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors, a process for preparing the same, and a process for preparing a semiconductor device using the same. In the polishing pad according to the embodiment, the size (or diameter) and distribution of a plurality of pores are adjusted, whereby the polishing performance such as polishing rate and within-wafer non-uniformity can be further enhanced.
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公开(公告)号：US20240016154A9
公开(公告)日：2024-01-18
申请号：US17454677
申请日：2021-11-12
申请人： SoClean, Inc.
CPC分类号： A01N59/00 , C11D17/049 , C11D11/0023 , C11D3/3942 , C11D3/3947 , C09G1/04 , A01N25/08 , A01P1/00 , B24D11/00
摘要： Surface treatment articles, systems for making/loading surface treatment articles, and methods of making surface treatment articles are described. In embodiments the surface treatment articles are configured to be impregnated or otherwise loaded with a surface treatment liquid that includes a carrier and an active agent. The carrier may be or include water, and the active agent may be or include dissolved ozone, ozone degradation products, and/or ozone reaction products. The surface treatment liquid may contain a threshold concentration of active agent for a residence time that is sufficient for desired cleaning, disinfecting, and/or polishing applications.
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公开(公告)号：US11697186B2
公开(公告)日：2023-07-11
申请号：US16635116
申请日：2018-08-21
申请人： Robert Bosch GmbH
发明人： Josef Breitenmoser
CPC分类号： B24B55/102 , B24D11/00
摘要： An abrasive article, in particular a coated abrasive disc, includes a plurality of holes which are arranged in a hole pattern. The density of holes decreases from an inner region of the hole pattern to an outer region of the hole pattern. At least one hole in the hole pattern is designed as an elongated hole.
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公开(公告)号：US20230159807A1
公开(公告)日：2023-05-25
申请号：US18094511
申请日：2023-01-09
发明人： Negus B. Adefris
IPC分类号： C09K3/14 , C04B35/111 , C04B35/628 , B24D11/00 , B24D3/14
CPC分类号： C09K3/1409 , C04B35/1115 , C04B35/62815 , C04B35/62886 , B24D11/00 , B24D3/14 , C04B2235/3206 , C04B2235/3218 , C04B2235/3225 , C04B2235/3227 , C04B2235/3275 , C04B2235/602 , C04B2235/72 , C04B2235/94
摘要： Shaped ceramic abrasive particles include a first surface having a perimeter having a perimeter comprising at least first and second edges. A first region of the perimeter includes the second edge and extends inwardly and terminates at two corners defining first and second acute interior angles. The perimeter has at most four corners that define acute interior angles. A second surface is disposed opposite, and not contacting, the first surface. A peripheral surface is disposed between and connects the first and second surfaces. The peripheral surface has a first predetermined shape. Methods of making the shaped ceramic abrasive particles, and abrasive articles including them are also disclosed.
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公开(公告)号：US20190015949A1
公开(公告)日：2019-01-17
申请号：US16135444
申请日：2018-09-19
发明人： Brian D. Goers
CPC分类号： B24B55/102 , B24B55/10 , B24D11/00
摘要： An abrasive disc for use with a sanding tool having a plurality of dust collection holes includes a hole pattern consisting of six openings arranged for substantial alignment with the dust collection holes provided in the sanding tool.
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公开(公告)号：US10076819B2
公开(公告)日：2018-09-18
申请号：US14709357
申请日：2015-05-11
申请人： Barry Ulrich
发明人： Barry Ulrich
CPC分类号： B24B55/10 , B24B55/105 , B24D11/00 , B24D11/008 , B24D18/0045
摘要： A sander for use with a vacuum extraction system is provided. The sander comprises a body, a releasable retention mechanism on an upper surface adjacent each end of the body, a platen, the platen adjacent to and attached to a lower surface of the body and having a pattern of grooves, an at least one vacuum port extending through the body and platen and positioned such that the grooves in the platen are substantially directed to the at least one vacuum port, wherein the improvement comprises a perforated sandpaper sheet, the perforated sandpaper sheet comprising: an upper sandpaper layer; a lower plastic polymer foam layer; and a plurality of apertures in a plurality of series; the plurality of series of apertures in a pattern configured to align with the pattern of grooves in the platen of the sander, the plurality of apertures occupying about 5 percent of an upper surface area of the sandpaper sheet.
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公开(公告)号：US09987728B2
公开(公告)日：2018-06-05
申请号：US15400943
申请日：2017-01-06
摘要： The present invention relates generally to fixed abrasive articles comprising: abrasive particles; a binder composition; and an abrasive performance enhancing composition, wherein the abrasive particles are disposed on or in the binder composition, and wherein the abrasive performance enhancing composition is disposed overlying the abrasive particles or binder composition or both. The abrasive performance enhancing composition comprises a mixture comprising a lubricant and an anti-wear agent. In particular embodiments the abrasive performance enhancing composition further comprises a fixative material.
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