公开(公告)号：US20030155508A1

公开(公告)日：2003-08-21

申请号：US10309277

申请日：2002-12-26

Applicant: Hitachi, Ltd.

Inventor： Hiroyuki Suzuki ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Yasutsugu Usami ,  Shuji Sugiyama

IPC: G21K007/00 ,  G01N023/00

CPC classification number: H01J37/28 ,  H01J2237/082 ,  H01J2237/2826

Abstract: A workpiece holder for holding a workpiece, which is used for an electron beam application apparatus for processing a workpiece by irradiating the surface of said workpiece with an electron beam, or observing the surface state of a workpiece by detecting secondary electrons produced from the workpiece by irradiation of the workpiece with an electron beam, includes a positioning portion which comes closer to an end portion of said workpiece when said workpiece holder holds the workpiece, thereby positioning the workpiece, in which the surface height of the end portion of the workpiece is nearly equal to the height of said positioning portion.

Abstract translation: 用于保持工件的工件保持器，其用于通过用电子束照射所述工件的表面来处理工件的电子束施加装置，或通过检测从工件产生的二次电子来观察工件的表面状态， 用电子束照射工件时，包括定位部分，当所述工件保持器保持工件时，定位部分靠近所述工件的端部，从而定位工件，其中工件的端部的表面高度接近 等于所述定位部分的高度。

公开(公告)号：US20020019589A1

公开(公告)日：2002-02-14

申请号：US09948857

申请日：2001-09-10

Applicant: Hitachi, Ltd.

Inventor： Keiji Tsukada ,  Akihiko Kandori ,  Tsuyoshi Miyashita ,  Hiroyuki Suzuki ,  Hitoshi Sasabuchi

IPC: A61B005/05

CPC classification number: A61B5/04005 ,  A61B5/04008 ,  A61B5/0444 ,  G01R33/0206 ,  G01R33/0358

Abstract: A magnetic field measurement apparatus comprises a plurality of magnetometers each comprising SQUID's and three detection coils each of which detects each of three orthogonal directional magnetic field components ( Bx, By, Bz) of a magnetic field generated from a subject to be inspected, a display which displays time variation of waveform of magnitude null{square root}(Bx2nullBy2nullBz2)null of magnetic field synthesized by square sum of each of the three orthogonal directional magnetic field components of the magnetic field generated from the subject to be inspected, a holding means for holding Dewar's vessel for arranging magnetometers therein, and a controlling means for controlling a positional relationship between the subject to be inspected and the Dewar's vessel. Accurate time variation of magnetic field generated from the subject to be inspected can be detected without influence of positional change of the subject to be inspected, by simultaneously measuring each of three orthogonal directional magnetic field components ( Bx, By, Bz) of a magnetic field generated from current sources in the subject to be inspected.

Abstract translation: 磁场测量装置包括多个磁力计，每个磁力计包括SQUID和三个检测线圈，每个检测线圈检测从被检查对象产生的磁场的三个正交方向磁场分量（Bx，By，Bz）中的每一个;显示器 其显示由待检查对象产生的磁场的三个正交方向磁场分量中的每一个的平方和合成的磁场的幅度{{平方根}（Bx2 + By2 + Bz2）}的波形的时间变化， 用于将杜瓦尔的容器放置在其中以放置磁力计的保持装置，以及用于控制待检查对象与杜瓦尔船只之间的位置关系的控制装置。 通过同时测量磁场的三个正交方向磁场分量（Bx，By，Bz）中的每一个，可以检测从被检查对象产生的磁场的精确时间变化，而不受被检查对象的位置变化的影响 从当前来源产生的被检查对象。

公开(公告)号：US20040193037A1

公开(公告)日：2004-09-30

申请号：US10810812

申请日：2004-03-29

Applicant: Hitachi, Ltd.

Inventor： Keiji Tsukada ,  Akihiko Kandori ,  Kenichi Okajima ,  Hitoshi Sasabuchi ,  Hiroyuki Suzuki ,  Shoji Kondo ,  Yasuaki Komiyama

IPC: A61B005/05

CPC classification number: A61B5/04005 ,  G01R33/0354 ,  G01R33/10

Abstract: A biomagnetic field measuring apparatus has a plurality of fluxmeters disposed externally of a living body and each including a superconducting quantum interference device (SQUID) for detecting a biomagnetic field generated from the living body, the plurality of fluxmeters being operative to detect a temporal change of a component of the biomagnetic field in a first direction which is vertical to the surface of the living body, an operation processor for performing computation for determining a temporal change of a value proportional to a root of square sum of differential value of the first-direction magnetic field component in second and third directions which cross the first direction and computation for integrating the temporal change of the value over a predetermined interval to determine an integral value, and a display for displaying the determined integral value. Distribution of magnetic fields generated from the heart is determined with a small number of fluxmeters.

公开(公告)号：US20030138665A1

公开(公告)日：2003-07-24

申请号：US10306361

申请日：2002-11-27

Applicant: Hitachi, Ltd.

Inventor： Tetsuya Kanbe ,  Yotsuo Yahisa ,  Hiroyuki Suzuki ,  Hidekazu Kashiwase

IPC: B32B009/00

CPC classification number: G11B5/7325 ,  G11B5/66 ,  Y10S428/90 ,  Y10T428/12465 ,  Y10T428/12854 ,  Y10T428/265

Abstract: An inplane magnetic recording medium having high S/N and thermal stability and a reliable magnetic storage device having surface recording density of 50 megabit/mm2 or more is described. The magnetic recording medium includes magnetic layers formed on a nonmagnetic substrate with a plurality of ground layers therebetween, at least one of the ground layers formed from an alloy of a body-centered cubic structure containing Cr as a main component and B of from 2 atomic % to 12 atomic %. Main components of the magnetic layers include a lower magnetic layer containing Co and Cr of from 10 atomic % to 16 atomic %, with film thickness of from 1.5 nm to 4.5 nm, and an upper magnetic layer containing Co, coupling anti-ferromagnetically with the lower magnetic layer through nonmagnetic intermediate layers.

Abstract translation: 描述了具有高S / N和热稳定性的内置磁记录介质和具有50兆比特/平方毫米或更大的表面记录密度的可靠的磁存储装置。 磁记录介质包括形成在非磁性基底上的磁性层，其间具有多个接地层，至少一个接地层由以Cr为主要成分的体心立方结构的合金形成，B为2原子 ％至12原子％。 磁性层的主要成分包括含有10原子％〜16原子％的Co和Cr的下部磁性层，膜厚为1.5nm〜4.5nm，上部磁性层为Co，与铁素体 通过非磁性中间层降低磁性层。

公开(公告)号：US20020045813A1

公开(公告)日：2002-04-18

申请号：US09984615

申请日：2001-10-30

Applicant: Hitachi, Ltd.

Inventor： Hiroyuki Suzuki ,  Keiji Tsukada ,  Kazuhisa Machida ,  Takafumi Kawasaki

IPC: A61B005/05

CPC classification number: A61B5/04007 ,  G16H40/63 ,  Y10S128/922

Abstract: A method for processing biomagnetic fields generated by biocurrents resulting from activities of human brain or myocardia and its mapping apparatus are provided, which features biomagnetic measurement and its analysis, magnetic field mapping and its imaging and their waveform generation by a simple operation. Biomagnetic fields emitted from the patient are measured at a plurality of measurement positions, and a contour map of magnetic field obtained as a result of processing of these measured biomagnetic fields is imaged in the magnetic contour map display apparatus, which display apparatus comprises: the process function display area indicating process function items including measurement; and the analysis data display area which displays the waveform together with a designated measurement time, the waveform being generated during measurement at least based on the measured biomagnetic fields and during the designated measurement period of time.

Abstract translation: 提供了一种用于处理由人脑或心肌的活动产生的生物电流产生的生物磁场的方法及其映射装置，其特征在于其生物磁测量及其分析，磁场映射及其成像及其通过简单操作产生的波形。 在多个测量位置测量从患者发射的生物磁场，并且将这些测量的生物磁场的处理结果获得的磁场轮廓图成像在该磁性轮廓图显示装置中，该显示装置包括：该过程 功能显示区域指示处理功能项目，包括测量; 以及分析数据显示区域，其与指定的测量时间一起显示波形，所述波形至少基于所测量的生物磁场在测量期间以及在指定的测量时段期间产生。

公开(公告)号：US20030017369A1

公开(公告)日：2003-01-23

申请号：US10067333

申请日：2002-02-07

Applicant: Hitachi, Ltd.

Inventor： Yoshiyuki Hirayama ,  Hiroyuki Suzuki ,  Hiroyuki Kataoka ,  Yotsuo Yahisa ,  Tetsuya Kanbe

IPC: G11B005/66

CPC classification number: G11B5/66 ,  G11B5/00 ,  G11B5/012 ,  G11B2005/0002 ,  G11B2005/0016

Abstract: A magnetic recording medium having at least two magnetic layers and a non-magnetic intermediate layer held between them. The first magnetic layer (which is closer to the substrate than the non-magnetic intermediate layer) is formed from an alloy composed of Co, Pr, and Cr, with Pt content being 3-9 at %. The second magnetic layer (which is farther from the substrate than the non-magnetic intermediate layer) is formed from a Co-based alloy containing Pt, Cr, and B. The first and second magnetic layers are magnetized in the mutually antiparallel direction in the absence of an applied magnetic field. The magnetic recording medium is characterized by good thermal stability for recording bits, high recording resolution, and low media noise. It is suitable for a magnetic storage for high recording density with high reliability.

Abstract translation: 具有至少两个磁性层和保持在它们之间的非磁性中间层的磁记录介质。 第一磁性层（其比非磁性中间层更靠近基板）由Co，Pr和Cr组成的合金形成，Pt含量为3-9原子％。 第二磁性层（其比非磁性中间层离基板更远）由含有Pt，Cr和B的Co基合金形成。第一和第二磁性层在相互反平行的方向上被磁化 不存在施加的磁场。 磁记录介质的特征在于用于记录位的良好热稳定性，高记录分辨率和低介质噪声。 适用于具有高可靠性的高记录密度的磁存储。

公开(公告)号：US20010009975A1

公开(公告)日：2001-07-26

申请号：US09793600

申请日：2001-02-27

Applicant: Hitachi, Ltd.

Inventor： Keiji Tsukada ,  Akihiko Kandori ,  Kenichi Okajima ,  Hitoshi Sasabuchi ,  Hiroyuki Suzuki ,  Shoji Kondo ,  Yasuaki Komiyama

IPC: A61B005/05

CPC classification number: A61B5/04005 ,  G01R33/0354 ,  G01R33/10

Abstract: A biomagnetic field measuring apparatus has a plurality of fluxmeters disposed externally of a living body and each including a superconducting quantum interference device (SQUID) for detecting a biomagnetic field generated from the living body, the plurality of fluxmeters being operative to detect a temporal change of a component of the biomagnetic field in a first direction which is vertical to the surface of the living body, an operation processor for performing computation for determining a temporal change of a value proportional to a root of square sum of differential value of the first-direction magnetic field component in second and third directions which cross the first direction and computation for integrating the temporal change of the value over a predetermined interval to determine an integral value, and a display for displaying the determined integral value. Distribution of magnetic fields generated from the heart is determined with a small number of fluxmeters.

Abstract translation: 生物磁场测量装置具有设置在生物体的外部的多个磁通量计，每个磁通量计包括用于检测从生物体产生的生物磁场的超导量子干涉装置（SQUID），所述多个磁通量计可操作以检测时间变化 生物磁场在与活体表面垂直的第一方向上的分量;运算处理器，用于执行计算，以确定与第一方向的差分值的平方和的根数成正比的值的时间变化 与第一方向交叉的第二方向和第三方向的磁场分量和用于对预定间隔内的值的时间变化进行积分的运算以确定积分值，以及用于显示所确定的积分值的显示。 由心脏产生的磁场的分布由少量的磁通计确定。

公开(公告)号：US20030111616A1

公开(公告)日：2003-06-19

申请号：US10309276

申请日：2002-12-04

Applicant: Hitachi, Ltd.

Inventor： Hiroyuki Suzuki ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Yasutsugu Usami ,  Shuji Sugiyama

IPC: H01J037/20

CPC classification number: H01J37/28 ,  H01J2237/082 ,  H01J2237/2826

Abstract: A semiconductor fabricating apparatus for fabricating a semiconductor wafer includes a processing chamber, in which a workpiece is processed by irradiating the surface of said workpiece with an electron beam, a workpiece holder including a positioning portion for positioning the workpiece. The surface height of an end portion of the workpiece is nearly equal to the height of the positioning portion when the workpiece carried in the processing chamber is held on the workpiece holder.

Abstract translation: 一种用于制造半导体晶片的半导体制造装置，包括处理室，其中通过用电子束照射所述工件的表面来加工工件，工件保持器包括用于定位工件的定位部分。 当处理室中携带的工件被保持在工件保持器上时，工件端部的表面高度几乎等于定位部分的高度。

公开(公告)号：US20030146382A1

公开(公告)日：2003-08-07

申请号：US10309275

申请日：2002-12-26

Applicant: Hitachi, Ltd.

Inventor： Hiroyuki Suzuki ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Yasutsugu Usami ,  Shuji Sugiyama

IPC: G01N023/225 ,  H01J037/28

CPC classification number: H01J37/28 ,  H01J2237/082 ,  H01J2237/2826

Abstract: Heights of a sample are calibrated by setting a calibrating substrate on a stage and then irradiating a charged particle beam onto standard marks provided on at least two kinds of surfaces having different substrate heights. Secondary charged particles produced from said irradiated standard marks on the substrate are and detected and a surface height of the irradiated portion of the substrate measured. The difference in height between the standard marks is set to be in a range containing an extent, over the entire sample, to which the height of the sample varies due to warping.

Abstract translation: 通过在台上设置校准基板，然后将带电粒子束照射到设置在具有不同衬底高度的至少两种表面上的标准标记上来校准样品的高度。 并且测量从衬底上的所述照射的标准标记产生的二次带电粒子并测量衬底的照射部分的表面高度。 标准标记之间的高度差被设定在包含整个样品的范围内，样品的高度由于翘曲而变化。

公开(公告)号：US20020173714A1

公开(公告)日：2002-11-21

申请号：US10189010

申请日：2002-07-05

Applicant: Hitachi, Ltd.

Inventor： Keiji Tsukada ,  Akihiko Kandori ,  Kenichi Okajima ,  Hitoshi Sasabuchi ,  Hiroyuki Suzuki ,  Shoji Kondo ,  Yasuaki Komiyama

IPC: A61B005/05

CPC classification number: A61B5/04005 ,  G01R33/0354 ,  G01R33/10

Abstract: A biomagnetic field measuring apparatus has a plurality of fluxmeters disposed externally of a living body and each including a superconducting quantum interference device (SQUID) for detecting a biomagnetic field generated from the living body, the plurality of fluxmeters being operative to detect a temporal change of a component of the biomagnetic field in a first direction which is vertical to the surface of the living body, an operation processor for performing computation for determining a temporal change of a value proportional to a root of square sum of differential value of the first-direction magnetic field component in second and third directions which cross the first direction and computation for integrating the temporal change of the value over a predetermined interval to determine an integral value, and a display for displaying the determined integral value. Distribution of magnetic fields generated from the heart is determined with a small number of fluxmeters.

Abstract translation: 生物磁场测量装置具有设置在生物体的外部的多个磁通量计，每个磁通量计包括用于检测从生物体产生的生物磁场的超导量子干涉装置（SQUID），所述多个磁通量计可操作以检测时间变化 生物磁场在与活体表面垂直的第一方向上的分量;运算处理器，用于执行计算，以确定与第一方向的差分值的平方和的根数成正比的值的时间变化 与第一方向交叉的第二方向和第三方向的磁场分量和用于对预定间隔内的值的时间变化进行积分的运算以确定积分值，以及用于显示所确定的积分值的显示。 由心脏产生的磁场的分布由少量的磁通计确定。