公开(公告)号：US20020105648A1

公开(公告)日：2002-08-08

申请号：US10115079

申请日：2002-04-04

Applicant: Hitachi, Ltd.

Inventor： Yasuhiko Nara ,  Kazuhisa Machida ,  Mari Nozoe ,  Hiroshi Morioka ,  Yasutsugu Usami ,  Takashi Hiroi ,  Kohichi Hayakawa ,  Maki Ito

IPC: G01N021/88

CPC classification number: G03F7/70616 ,  G03F1/84 ,  G03F7/7065 ,  G06T7/001 ,  G06T2207/30141 ,  H01J37/226 ,  H01J2237/082 ,  H01J2237/2817 ,  H01L22/12

Abstract: Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by irradiating white light, a laser beam, or a charged particle beam are set, its operating efficiency can be improved. An inspection target region of an inspection-subject substrate is displayed, and a designated map picture plane and an image of an optical microscope or an electron beam microscope of a designated region are displayed in parallel, thereby enabling a defect distribution and a defect image to be simultaneously seen. Item names of inspecting conditions and a picture plane to display, input, or instruct the contents of the inspecting conditions are integrated, those contents are overlapped to the picture plane and layer-displayed, and all of the item names are displayed in parallel in a tab format in the upper portion of the picture plane of the contents. When a desired item name is clicked, the picture plane is switched and the contents corresponding to the clicked item name are displayed.

公开(公告)号：US20030058444A1

公开(公告)日：2003-03-27

申请号：US10287706

申请日：2002-11-05

Applicant: HITACHI, LTD.

Inventor： Yasuhiko Nara ,  Kazuhisa Machida ,  Mari Nozoe ,  Hiroshi Morioka ,  Yasutsugu Usami ,  Kohichi Hayakawa ,  Maki Ito

IPC: G01B011/00

CPC classification number: G03F7/70616 ,  G03F1/84 ,  G03F7/7065 ,  G06T7/001 ,  G06T2207/30141 ,  H01J37/226 ,  H01J2237/082 ,  H01J2237/2817 ,  H01L22/12

Abstract: Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by irradiating white light, a laser beam, or a charged particle beam are set, its operating efficiency can be improved. An inspection target region of an inspection-subject substrate is displayed, and a designated map picture plane and an image of an optical microscope or an electron beam microscope of a designated region are displayed in parallel, thereby enabling a defect distribution and a defect image to be simultaneously seen. Item names of inspecting conditions and a picture plane to display, input, or instruct the contents of the inspecting conditions are integrated, those contents are overlapped to the picture plane and layer-displayed, and all of the item names are displayed in parallel in a tab format in the upper portion of the picture plane of the contents. When a desired item name is clicked, the picture plane is switched and the contents corresponding to the clicked item name are displayed.

公开(公告)号：US20020045813A1

公开(公告)日：2002-04-18

申请号：US09984615

申请日：2001-10-30

Applicant: Hitachi, Ltd.

Inventor： Hiroyuki Suzuki ,  Keiji Tsukada ,  Kazuhisa Machida ,  Takafumi Kawasaki

IPC: A61B005/05

CPC classification number: A61B5/04007 ,  G16H40/63 ,  Y10S128/922

Abstract: A method for processing biomagnetic fields generated by biocurrents resulting from activities of human brain or myocardia and its mapping apparatus are provided, which features biomagnetic measurement and its analysis, magnetic field mapping and its imaging and their waveform generation by a simple operation. Biomagnetic fields emitted from the patient are measured at a plurality of measurement positions, and a contour map of magnetic field obtained as a result of processing of these measured biomagnetic fields is imaged in the magnetic contour map display apparatus, which display apparatus comprises: the process function display area indicating process function items including measurement; and the analysis data display area which displays the waveform together with a designated measurement time, the waveform being generated during measurement at least based on the measured biomagnetic fields and during the designated measurement period of time.

Abstract translation: 提供了一种用于处理由人脑或心肌的活动产生的生物电流产生的生物磁场的方法及其映射装置，其特征在于其生物磁测量及其分析，磁场映射及其成像及其通过简单操作产生的波形。 在多个测量位置测量从患者发射的生物磁场，并且将这些测量的生物磁场的处理结果获得的磁场轮廓图成像在该磁性轮廓图显示装置中，该显示装置包括：该过程 功能显示区域指示处理功能项目，包括测量; 以及分析数据显示区域，其与指定的测量时间一起显示波形，所述波形至少基于所测量的生物磁场在测量期间以及在指定的测量时段期间产生。