Adhering substance collecting device and inspection system

    公开(公告)号:US11371915B2

    公开(公告)日:2022-06-28

    申请号:US16305812

    申请日:2017-05-29

    申请人: Hitachi, Ltd.

    摘要: In order to detach substances stably from an inspection object, an adhering substance collecting device includes: ejection openings configured to eject gas; a housing on which the ejection openings are provided; and supporting portions which are installed on a surface of the housing on which the ejection openings are provided, and have a prescribed height. The supporting portions include protruded portions formed on the housing. The supporting portions each have a cuboid shape, and are installed such that a distance therebetween becomes smaller toward a direction of a recovery opening that is configured to collect substances having been detached from an inspection object, from the gas.

    ANALYSIS DEVICE AND ANALYSIS METHOD
    2.
    发明申请
    ANALYSIS DEVICE AND ANALYSIS METHOD 审中-公开
    分析装置和分析方法

    公开(公告)号:US20150235831A1

    公开(公告)日:2015-08-20

    申请号:US14704460

    申请日:2015-05-05

    申请人: HITACHI, LTD.

    IPC分类号: H01J49/04

    摘要: Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.

    摘要翻译: 提供了一种在连续收集和冷凝颗粒时实时分析颗粒的技术。 作为检测对象物质的作为检测对象物质的气体和/或颗粒被从吹扫区域5的空气流除去。将取出的样品抽吸并在采样区域10被冷凝并取样,并且样品的离子 在离子源21处产生,然后在质量分析区域23进行质量分析。对获得的质谱进行测定,确定是否存在从检测目标物质得到的质谱,以及监测器27 显示其结果。 因此,可以实时,及时且误码率较小的连续检测附着于认证对象2的检测对象物质。

    Ionization device
    3.
    发明授权

    公开(公告)号:US10466214B2

    公开(公告)日:2019-11-05

    申请号:US15764249

    申请日:2015-12-09

    申请人: HITACHI, LTD.

    摘要: In order to implement a high-sensitivity mass spectrometry through an improvement in solvent removal efficiency during electrospray ionization and the like, an ionization device is provided with a light guide path 28 which guides light from a light source to sample microparticles generated by a micronization device to irradiate the microparticles. A closest distance d2 between a spatial area 34 in which the sample microparticles are present and a distal end 29 of the light guide path is greater than or equal to 0.1 mm and less than or equal to 20 mm. A closest distance d1 between an area of light irradiation 35 by the light guide path and any of a sample surface, a micronization device, and a sample holding unit that is the closest is greater than or equal to 0.01 mm and less than or equal to 10 mm.

    Analysis device and analysis method
    5.
    发明授权
    Analysis device and analysis method 有权
    分析装置及分析方法

    公开(公告)号:US09214324B2

    公开(公告)日:2015-12-15

    申请号:US14704460

    申请日:2015-05-05

    申请人: HITACHI, LTD.

    IPC分类号: G01N1/22 H01J49/04

    摘要: Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.

    摘要翻译: 提供了一种在连续收集和冷凝颗粒时实时分析颗粒的技术。 作为检测对象物质的作为检测对象物质的气体和/或颗粒被从吹扫区域5的空气流除去。将取出的样品抽吸并在采样区域10被冷凝并取样,并且样品的离子 在离子源21处产生,然后在质量分析区域23进行质量分析。对获得的质谱进行测定,确定是否存在从检测目标物质得到的质谱,以及监测器27 显示其结果。 因此,可以实时,及时且误码率较小的连续检测附着于认证对象2的检测对象物质。