公开(公告)号：US20240213003A1

公开(公告)日：2024-06-27

申请号：US17908306

申请日：2021-07-13

Applicant: Hitachi High-Tech Corporation

Inventor： Shota UMEDA ,  Kenji TAMAKI ,  Masahiro SUMIYA ,  Yoshito KAMAJI

IPC: H01J37/32 ,  G01M99/00

CPC classification number: H01J37/32963 ,  G01M99/005

Abstract: A diagnosis device that uses information from state sensors provided in a plasma processing apparatus for plasma processing a specimen to diagnose deterioration states of components configuring the plasma processing apparatus includes an execution unit that computes and calculates deterioration degree of each of the components configuring the plasma processing apparatus on the basis of the information from the state sensors, and an analysis unit that sets a computation condition for computing and calculating the deterioration degree by the execution unit on the basis of the information from the state sensors and calculates a maintenance period of the plasma processing apparatus on the basis of the information of the deterioration degree of each of the components configuring the plasma processing apparatus computed and calculated by the execution unit, and makes it possible to decide deterioration degree computation condition having high robustness for each of the components.

公开(公告)号：US20240111281A1

公开(公告)日：2024-04-04

申请号：US18375734

申请日：2023-10-02

Applicant: Hitachi High-Tech Corporation

Inventor： Kenji TAMAKI ,  Wataru KANNO ,  Takashi DOI ,  Fumihiro SASAJIMA

IPC: G05B23/02 ,  G05B13/04

CPC classification number: G05B23/0283 ,  G05B13/048 ,  G05B23/024

Abstract: A deterioration prediction system for a semiconductor manufacturing equipment or a semiconductor inspection equipment, including: an input device receiving, as an input, time series data indicating a state of the equipment; a deterioration prediction device having an estimation unit discriminating fluctuation in the time series data into fluctuation caused by changing setting of the equipment and fluctuation caused by deterioration of the equipment and estimating a time point when the setting is changed, a division unit dividing the time series data into the plurality of periods bounded by the time points, a discrimination unit discriminating at least a trend component from the fluctuation in the time series data in the period, and a prediction unit predicting the deterioration of the equipment based on at least the trend component; and an output device outputting a result of the prediction.