公开(公告)号：US20250022676A1

公开(公告)日：2025-01-16

申请号：US18669862

申请日：2024-05-21

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiaki KUSUNOKI ,  Masahiro FUKUTA ,  Yusuke SAKAI ,  Soichiro MATSUNAGA ,  Tomoya IGARI

IPC: H01J37/073

Abstract: An electron beam device includes a Schottky emitter that is capable of reproducing collapse of a shape of a facet in a short time without adding hardware. Also, a method of operating a Schottky emitter includes applying a first electric field to the Schottky emitter while heating the Schottky emitter at a first temperature, and then applying a second electric field to the Schottky emitter while heating the Schottky emitter at a second temperature. The first temperature is higher than an operation temperature of the Schottky emitter and the second temperature. The first electric field is equal to or higher than an operation electric field of the Schottky emitter and lower than the second electric field. The second temperature is equal to or higher than the operation temperature and lower than the first temperature. The second electric field is higher than the operation electric field and the first electric field.

公开(公告)号：US20240379318A1

公开(公告)日：2024-11-14

申请号：US18691071

申请日：2021-10-19

Applicant: Hitachi High-Tech Corporation

Inventor： Keigo KASUYA ,  Shuhei ISHIKAWA ,  Kenji TANIMOTO ,  Shunichi WATANABE ,  Takashi DOI ,  Yusuke SAKAI

IPC: H01J37/073 ,  H01J37/28

Abstract: Provided is a charged particle beam device that can precisely manage a temperature at which a cold field emitter is heated. A charged particle beam device includes: a cold field emitter including a tip having a sharpened distal end, a filament connected to the tip, and an auxiliary electrode covering the filament and having an opening from which the tip protrudes; an extraction electrode to which an extraction voltage for extracting electrons from the cold field emitter is applied; and an acceleration electrode to which an acceleration voltage for accelerating the electrons extracted from the cold field emitter is applied. When the tip and the filament are heated, thermionic electrons emitted from the tip and the filament are collected by the auxiliary electrode to measure a current by applying a positive voltage with respect to the tip to the auxiliary electrode.