公开(公告)号：US20250022676A1

公开(公告)日：2025-01-16

申请号：US18669862

申请日：2024-05-21

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiaki KUSUNOKI ,  Masahiro FUKUTA ,  Yusuke SAKAI ,  Soichiro MATSUNAGA ,  Tomoya IGARI

IPC: H01J37/073

Abstract: An electron beam device includes a Schottky emitter that is capable of reproducing collapse of a shape of a facet in a short time without adding hardware. Also, a method of operating a Schottky emitter includes applying a first electric field to the Schottky emitter while heating the Schottky emitter at a first temperature, and then applying a second electric field to the Schottky emitter while heating the Schottky emitter at a second temperature. The first temperature is higher than an operation temperature of the Schottky emitter and the second temperature. The first electric field is equal to or higher than an operation electric field of the Schottky emitter and lower than the second electric field. The second temperature is equal to or higher than the operation temperature and lower than the first temperature. The second electric field is higher than the operation electric field and the first electric field.

公开(公告)号：US20230352262A1

公开(公告)日：2023-11-02

申请号：US17928401

申请日：2020-06-29

Applicant: Hitachi High-Tech Corporation

Inventor： Keigo KASUYA ,  Shuhei ISHIKAWA ,  Kenji TANIMOTO ,  Takashi DOI ,  Soichiro MATSUNAGA ,  Hiroshi MORITA ,  Daigo KOMESU ,  Kenji MIYATA

IPC: H01J37/065 ,  H01J37/073 ,  H01J37/28

CPC classification number: H01J37/065 ,  H01J37/073 ,  H01J37/28

Abstract: In an electron source including a suppressor electrode having an opening at one end portion thereof in a direction along a central axis and an electron emission material having a distal end protruding from the opening, the suppressor electrode further includes a receding portion receding to a position farther from the distal end of the electron emission material than the opening in the direction along the central axis at a position in an outer peripheral direction than the opening, and at least a part of the receding portion is disposed within a diameter of 2810 μm from a center of the opening. Accordingly, an electron source, an electron gun, and a charged particle beam device such as an electron microscope using the same, in which a machine difference in a device performance due to an axial shift between the electron emission material and the suppressor electrode is reduced, are implemented.

公开(公告)号：US20220199349A1

公开(公告)日：2022-06-23

申请号：US17601421

申请日：2019-04-18

Applicant: Hitachi High-Tech Corporation

Inventor： Keigo KASUYA ,  Akira IKEGAMI ,  Kazuhiro HONDA ,  Masahiro FUKUTA ,  Takashi DOI ,  Souichi KATAGIRI ,  Aki TAKEI ,  Soichiro MATSUNAGA

IPC: H01J37/073

Abstract: A large current electron beam is stably emitted from an electron gun of a charged particle beam device. The electron gun of the charged particle beam device includes: a SE tip 202; a suppressor 303 disposed rearward of a distal end of the SE tip; a cup-shaped extraction electrode 204 including a bottom surface and a cylindrical portion and enclosing the SE tip and the suppressor; and an insulator 208 holding the suppressor and the extraction electrode. A shield electrode 301 of a conductive metal having a cylindrical portion 302 is provided between the suppressor and the cylindrical portion of the extraction electrode. A voltage lower than a voltage of the SE tip is applied to the shield electrode.

公开(公告)号：US20230298845A1

公开(公告)日：2023-09-21

申请号：US18016764

申请日：2020-07-20

Applicant: Hitachi High-Tech Corporation

Inventor： Kazuhiro HONDA ,  Hiroyuki ITO ,  Takashi DOI ,  Soichiro MATSUNAGA

IPC: H01J37/05 ,  H01J37/12 ,  H01J37/09 ,  H01J37/244

CPC classification number: H01J37/05 ,  H01J37/12 ,  H01J37/09 ,  H01J37/244 ,  H01J2237/057 ,  H01J2237/04924 ,  H01J2237/0475 ,  H01J2237/24485

Abstract: A decelerating electrode of this energy filter comprises: an electrode pair that has an opening; and a cavity portion that provided in a rotationally symmetrical manner with the center of the opening as the optical axis. Voltages with electric potentials that are substantially the same as that of a charged particle beam are independently applied to the both sides of the decelerating electrode. When an electrical field protrudes into the cavity portion provided in the decelerating electrode, a saddle point having the same electric potential as that of incident charged particles is formed inside the decelerating electrode. The saddle point acts as a high pass filter for incident charged particles at an energy resolution of 1 mV or less. By analyzing charged particles which have been energy-separated, it is possible to measure the energy spectrum and ΔE at the high resolution of 1 mV or less. In addition, by causing the energy-separated charged particle beam to converge and scan on the sample surface with an electron lens, it is possible to obtain an SEM/STEM image with a high resolution (see FIG. 3).

公开(公告)号：US20220351934A1

公开(公告)日：2022-11-03

申请号：US17621503

申请日：2019-07-02

Applicant: Hitachi High-Tech Corporation

Inventor： Erina KAWAMOTO ,  Soichiro MATSUNAGA ,  Souichi KATAGIRI ,  Keigo KASUYA ,  Takashi DOI ,  Tetsuya SAWAHATA ,  Minoru YAMAZAKI

IPC: H01J37/077 ,  H01J37/18 ,  H01J37/075

Abstract: The invention provides an electron beam apparatus that reduces a time required for an electron gun chamber to which a sputter ion pump and a non-evaporable getter pump are connected to reach an extreme high vacuum state. The electron beam apparatus includes an electron gun configured to emit an electron beam and the electron gun chamber to which the sputter ion pump and the non-evaporable getter pump are connected. The electron beam apparatus further includes a gas supply unit configured to supply at least one of hydrogen, oxygen, carbon monoxide, and carbon dioxide to the electron gun chamber.

公开(公告)号：US20210327674A1

公开(公告)日：2021-10-21

申请号：US17260612

申请日：2018-08-27

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Toshiaki KUSUNOKI ,  Tomihiro HASHIZUME ,  Keigo KASUYA ,  Noriaki ARAI ,  Hiromitsu SEINO ,  Minoru KANEDA ,  Takashi OHSHIMA ,  Soichiro MATSUNAGA

IPC: H01J37/065 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28

Abstract: The invention provides an electron source including a columnar chip of a hexaboride single crystal, a metal pipe that holds the columnar chip of the hexaboride single crystal, and a filament connected to the metal pipe at a central portion. The columnar chip of the hexaboride single crystal is formed into a cone shape at a portion closer to a tip than a portion held in the metal pipe, and a tip end portion having the cone shape has a (310) crystal face. Schottky electrons are emitted from the (310) crystal face. According to the invention, it is possible to provide a novel electron source having monochromaticity, long-term stability of an emitter current, and high current density.