公开(公告)号：US09012842B2

公开(公告)日：2015-04-21

申请号：US14370736

申请日：2012-12-20

Applicant: Hitachi High-Technologies Corporation

Inventor： Wataru Kotake ,  Shigeru Kawamata ,  Sukehiro Ito

IPC: H01J37/00 ,  H01J37/24 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/24 ,  H01J37/1478 ,  H01J37/21 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/2611

Abstract: A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time the primary electron beam (4) scans the surface of a sample (15) over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam (4) is adjusted by a focal point-adjusting coil (14) based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample (15) for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (31). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously.

Abstract translation: 用于带电粒子束装置（100）的控制装置（50）每次通过倾斜线圈（11,12）将一次电子束（4）的照射轴向左，向右或向右倾斜， 光束（4）通过单个扫描线扫描样品（15）的表面。 当照射轴改变时，基于照射轴的倾斜度，通过焦点调节线圈（14）调节一次电子束（4）的焦点，以便进行左倾斜的观察图像， 每个扫描线的样品（15）的表面的非倾斜观察图像或右倾斜观察图像。 在同一显示装置（31）上同时显示直到此为止的扫描线的左倾斜观察图像，非倾斜观察图像和右倾斜观察图像。 以这种方式，可以同时拍摄和显示聚焦的非倾斜观察图像和聚焦的倾斜观察图像。

公开(公告)号：US20150124077A1

公开(公告)日：2015-05-07

申请号：US14397475

申请日：2013-04-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Naohiko Fukaya ,  Kenji Kitagawa ,  Masakazu Yagi ,  Yukie Hiratsuka ,  Wataru Kotake

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J2237/1504 ,  H01J2237/216 ,  H01J2237/2485 ,  H01J2237/2611

Abstract: A charged particle beam adjustment assistance device that can assist work to adjust a charged particle beam apparatus having a three-dimensional observing function and reduce human labor and man-hours required for adjustment value inputting is provided.An adjustment value acquiring unit generates optimal three-dimensional adjustment value information on the basis of two-dimensional adjustment value information and two/three-dimensional adjustment value correspondence information generated according to information inputted from a charged particle beam adjuster terminal, transmits the three-dimensional adjustment value information to the charged particle beam apparatus, and sets the three-dimensional adjustment value information therein. Therefore, the charged particle beam adjuster can reduce adjusting work required for three-dimensional observation and facilitate the work of observing three-dimensional images.

Abstract translation: 提供一种带电粒子束调节辅助装置，其能够辅助工作来调整具有三维观察功能的带电粒子束装置，并减少调节值输入所需的人力和工时。 调整值获取单元基于二维调整值信息和根据从带电粒子束调节器终端输入的信息生成的二维/三维调整值对应信息生成最佳三维调整值信息， 将三维调整值信息设置在带电粒子束装置中，并设定三维调整值信息。 因此，带电粒子束调节器可以减少三维观察所需的调整工作，便于观察三维图像的工作。

公开(公告)号：US20150001393A1

公开(公告)日：2015-01-01

申请号：US14370736

申请日：2012-12-20

Applicant: Hitachi High-Technologies Corporation

Inventor： Wataru Kotake ,  Shigeru Kawamata ,  Sukehiro Ito

IPC: H01J37/24 ,  H01J37/28 ,  H01J37/26

CPC classification number: H01J37/24 ,  H01J37/1478 ,  H01J37/21 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/2611

Abstract: A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time the primary electron beam (4) scans the surface of a sample (15) over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam (4) is adjusted by a focal point-adjusting coil (14) based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample (15) for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (31). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously.

Abstract translation: 用于带电粒子束装置（100）的控制装置（50）每次通过倾斜线圈（11,12）将一次电子束（4）的照射轴向左，向右或向右倾斜， 光束（4）通过单个扫描线扫描样品（15）的表面。 当照射轴改变时，基于照射轴的倾斜度，通过焦点调节线圈（14）调节一次电子束（4）的焦点，以便进行左倾斜的观察图像， 每个扫描线的样品（15）的表面的非倾斜观察图像或右倾斜观察图像。 在同一显示装置（31）上同时显示直到此为止的扫描线的左倾斜观察图像，非倾斜观察图像和右倾斜观察图像。 以这种方式，可以同时拍摄和显示聚焦的非倾斜观察图像和聚焦的倾斜观察图像。