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    Charged-particle radiation apparatus
    1.
    发明授权
    Charged-particle radiation apparatus 有权
    带电粒子辐射装置

    公开(公告)号：US09053902B2

    公开(公告)日：2015-06-09

    申请号：US14356191

    申请日：2012-11-12

    Applicant: Hitachi High-Technologies Corporation ,  TOTO LTD.

    Inventor： Yuta Ebine ,  Shinichi Tomita ,  Sukehiro Ito ,  Toshihiro Aoshima

    IPC: H01J37/26 ,  G21K5/00 ,  H01J37/252 ,  H01J37/244

    CPC classification number: H01J37/244 ,  H01J37/023 ,  H01J37/252 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24415 ,  H01J2237/24475

    Abstract: In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15).

    Abstract translation: 为了提供一种能够在执行X射线元素分析之前的阶段中对经过X射线分析的样本中的分析位置进行评估和区分的带电粒子辐射装置，并且使分析人员能够 本发明提供了一种具有X射线检测器的带电粒子辐射装置，其中第一背散射电子检测器（15）在同一轴线上 X射线检测器（12（25-30））的X射线检测面与X射线检测器（12）一体地或独立地设置，X射线检测器（X射线检测器 12）与第一后向散射电子检测器（15）的背散射电子信号的检测同时或分开。

    Charged particle beam apparatus
    2.
    发明授权
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US08921786B2

    公开(公告)日：2014-12-30

    申请号：US14191769

    申请日：2014-02-27

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

    IPC: H01J37/28 ,  H01J37/20 ,  G01N13/10 ,  H01J37/18 ,  H01J37/16 ,  H01J37/244

    CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

    Abstract: Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

    Abstract translation: 提供一种能够在空气气氛或气体环境中观察观察目标样品的带电粒子束装置或带电粒子显微镜，而不会对传统的高真空带电粒子显微镜的构造进行显着变化。 在构成为使用薄膜（10）分离真空环境和空气气氛（或气体环境）的带电粒子束装置中，能够保持薄膜（10）的附件（121），其内部 可以在空气气氛中保持，或者将气体环境插入到高真空带电粒子显微镜的真空室（7）中。 附件（121）被真空密封并固定到真空样品室的真空隔板。 通过用氦气或具有比大气气体如氮气或水蒸气更低的质量的轻质气体代替附件中的气氛来进一步改善图像质量。

    ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE
    3.
    发明申请
    ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE 有权
    电场放电型电子源

    公开(公告)号：US20140197725A1

    公开(公告)日：2014-07-17

    申请号：US14239144

    申请日：2012-09-24

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Sukehiro Ito

    IPC: H01J37/073

    CPC classification number: H01J37/073 ,  H01J1/16 ,  H01J1/3044 ,  H01J9/025 ,  H01J9/04 ,  H01J37/06 ,  H01J2237/06316 ,  H01J2237/06341

    Abstract: Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source.

    Abstract translation: 增加作为扩散源和供应源的氧化锆的体积或重量，延长场致发射型电子源的寿命引起扩散和供给源本身或钨针容易受到损伤的问题。 作为另一个问题，虽然考虑使用薄膜形成扩散和供应源以避免上述问题，但是难以稳定地获得超过8000小时的实际寿命。 已经发现，通过提供在扩散和供给源中不产生切屑或裂纹的场发射型电子源，可以稳定地获得超过8000小时的实际寿命，并且可以延长使用寿命，同时增加使用量 扩散和供应源。

    CHARGED PARTICLE BEAM APPARATUS
    7.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 审中-公开
    充电颗粒光束装置

    公开(公告)号：US20150076347A1

    公开(公告)日：2015-03-19

    申请号：US14552477

    申请日：2014-11-24

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

    IPC: H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

    CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

    Abstract: Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

    Abstract translation: 提供一种能够在空气气氛或气体环境中观察观察目标样品的带电粒子束装置或带电粒子显微镜，而不会对传统的高真空带电粒子显微镜的构造进行显着变化。 在构成为使用薄膜（10）分离真空环境和空气气氛（或气体环境）的带电粒子束装置中，能够保持薄膜（10）的附件（121），其内部 可以在空气气氛中保持，或者将气体环境插入到高真空带电粒子显微镜的真空室（7）中。 附件（121）被真空密封并固定到真空样品室的真空隔板。 通过用氦气或具有比大气气体如氮气或水蒸气更低的质量的轻质气体代替附件中的气氛来进一步改善图像质量。

    CHARGED PARTICLE BEAM DEVICE AND INCLINED OBSERVATION IMAGE DISPLAY METHOD
    8.
    发明申请
    CHARGED PARTICLE BEAM DEVICE AND INCLINED OBSERVATION IMAGE DISPLAY METHOD 有权
    充电颗粒光束装置和内置观察图像显示方法

    公开(公告)号：US20150001393A1

    公开(公告)日：2015-01-01

    申请号：US14370736

    申请日：2012-12-20

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Wataru Kotake ,  Shigeru Kawamata ,  Sukehiro Ito

    IPC: H01J37/24 ,  H01J37/28 ,  H01J37/26

    CPC classification number: H01J37/24 ,  H01J37/1478 ,  H01J37/21 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/2611

    Abstract: A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time the primary electron beam (4) scans the surface of a sample (15) over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam (4) is adjusted by a focal point-adjusting coil (14) based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample (15) for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (31). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously.

    Abstract translation: 用于带电粒子束装置（100）的控制装置（50）每次通过倾斜线圈（11,12）将一次电子束（4）的照射轴向左，向右或向右倾斜， 光束（4）通过单个扫描线扫描样品（15）的表面。 当照射轴改变时，基于照射轴的倾斜度，通过焦点调节线圈（14）调节一次电子束（4）的焦点，以便进行左倾斜的观察图像， 每个扫描线的样品（15）的表面的非倾斜观察图像或右倾斜观察图像。 在同一显示装置（31）上同时显示直到此为止的扫描线的左倾斜观察图像，非倾斜观察图像和右倾斜观察图像。 以这种方式，可以同时拍摄和显示聚焦的非倾斜观察图像和聚焦的倾斜观察图像。

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