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1.发明授权Method of manufacturing semiconductor device and method of treating semiconductor surface 有权制造半导体器件的方法和半导体表面处理方法公开(公告)号：US07368363B2
公开(公告)日：2008-05-06
申请号：US10983243
申请日：2004-11-08
IPC分类号： H01L21/76
CPC分类号： H01L21/3247 , H01L21/28167 , H01L21/324 , H01L29/4236
摘要： A method of manufacturing a semiconductor device includes the steps of: exposing a semiconductor surface of a substrate; annealing the substrate in a hydrogen atmosphere at a hydrogen pressure between 200 Torr and 760 Torr and a temperature between 1000° C. and 1050° C. to planarize the exposed semiconductor surface; and forming a gate insulator film on the planarized semiconductor surface.
摘要翻译： 制造半导体器件的方法包括以下步骤：使衬底的半导体表面曝光; 在氢气气氛中在200Torr和760Torr之间的氢气压力和1000℃至1050℃之间的温度下退火衬底以平坦化暴露的半导体表面; 并在平坦化的半导体表面上形成栅绝缘膜。
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2.发明申请Method of manufacturing semiconductor device and method of treating semiconductor surface 有权制造半导体器件的方法和半导体表面处理方法公开(公告)号：US20050106847A1
公开(公告)日：2005-05-19
申请号：US10983243
申请日：2004-11-08
IPC分类号： H01L21/324 , H01L21/28 , H01L21/316 , H01L21/3205 , H01L21/336 , H01L21/44 , H01L21/4763 , H01L29/423 , H01L29/78
CPC分类号： H01L21/3247 , H01L21/28167 , H01L21/324 , H01L29/4236
摘要： A method of manufacturing a semiconductor device includes the steps of: exposing a semiconductor surface of a substrate; annealing the substrate in a hydrogen atmosphere at a hydrogen pressure between 200 Torr and 760 Torr and a temperature between 1000° C. and 1050° C. to planarize the exposed semiconductor surface; and forming a gate insulator film on the planarized semiconductor surface.
摘要翻译： 制造半导体器件的方法包括以下步骤：使衬底的半导体表面曝光; 在氢气气氛中在200Torr和760Torr之间的氢气压力和1000℃至1050℃之间的温度下退火衬底以平坦化暴露的半导体表面; 并在平坦化的半导体表面上形成栅绝缘膜。
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公开(公告)号：US20050106794A1
公开(公告)日：2005-05-19
申请号：US10945556
申请日：2004-09-20
IPC分类号： H01L21/336 , H01L21/8234
CPC分类号： H01L21/28167 , H01L29/4236 , H01L29/66621
摘要： A semiconductor substrate is annealed after forming a trench in a semiconductor substrate and prior to forming a gate insulator film, at an annealing temperature T between 980° C. and 1150° C. in an atmosphere of a gas mixture containing a rare gas and hydrogen, in which the content of hydrogen is 1.3×10−18 exp(0.043T) % or lower in volume, to planarize the side wall of the trench and to round the corners of the trench at the curvature of 0.003 nm−1 or smaller. Alternatively, a semiconductor substrate with a trench formed therein is annealed prior to forming a gate insulator film, at an annealing temperature T between 980° C. and 1040° C. in an atmosphere of a gas mixture containing a rare gas and hydrogen, in which the content of hydrogen is 6.11×10−14 exp(0.0337T) % or higher in volume, to planarize the side wall of the trench but so as not to round the corners of the trench such that the curvature thereof is 0.006 nm−1 or higher. The manufacturing method according to the invention for manufacturing a semiconductor device having an insulated gate structure facilitates planarizing the gate insulator film forming region with fewer manufacturing steps and rounding the trench corners with excellent controllability.
摘要翻译： 半导体衬底在半导体衬底中形成沟槽之后，在形成栅极绝缘膜之前，在含有稀有气体和氢气的气体混合物的气氛中，在980℃至1150℃之间的退火温度T下进行退火 ，其中氢的含量为1.3×10 -6（体积）％（体积）％以下，以使沟槽的侧壁平坦化，并以沟槽的角部 0.003nm -1以下。 或者，在形成栅极绝缘膜之前，在含有稀有气体和氢气的气体混合物的气氛中，在980℃至1040℃之间的退火温度T下对其中形成有沟槽的半导体衬底进行退火， 其中氢的含量为6.11×10 -6 -14％（0.0337T）％或更高的体积，以使沟槽的侧壁平坦化，但是不会围绕沟槽的角落，使得 其曲率为0.006nm±1以上。 根据本发明的用于制造具有绝缘栅极结构的半导体器件的制造方法有利于以较少的制造步骤平坦化栅绝缘膜形成区域并且以优良的可控性对沟槽角进行四舍五入。
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4.发明授权Quantum entanglement photon-pair producing device and quantum entanglement photon pair producing method 失效量子纠缠光子对产生装置和量子纠缠光子对的产生方法公开(公告)号：US07570419B2
公开(公告)日：2009-08-04
申请号：US12224289
申请日：2007-03-01
申请人： Keiichi Edamatsu , Ryosuke Shimizu
发明人： Keiichi Edamatsu , Ryosuke Shimizu
CPC分类号： G02F1/39 , B82Y10/00 , G06N99/002
摘要： In one embodiment of the present invention, a quantum entangled photon-pair producing device is disclosed which includes a superposed state generating device for generating a superposed state of photon-pairs entering through N (N≧2) different incident optical paths and being composed of photons having different polarization directions, and a light-guide device for separating the photon-pairs entering through the N (e.g. N is two) incident optical paths into photons having a first polarization direction (e.g. horizontally polarized light) and those having a second polarization direction (e.g. vertically polarized light) and guiding the photons having the first polarization direction and entering through the i-th (1≦i≦N) (e.g. the first) incident optical path and photons having the second polarization direction and entering through the (N−i+1) (e.g. the second) incident optical path to the i-th (e.g. the first) exit optical path through optical paths having the same optical path length. Therefore, quantum entangled photons of N channels having a quantum correlation with regard to the polarization direction can be produced. With this, a quantum entangled photon-pair producing device capable of producing quantum entangled photon-pairs of multi-channel having a quantum correlation with regard to the polarization direction with high production efficiency is realized.
摘要翻译： 在本发明的一个实施例中，公开了一种量子纠缠光子对产生装置，其包括用于产生通过N（N> = 2）个不同入射光路进入的光子对的叠加状态的叠加状态产生装置， 的光子具有不同的偏振方向，以及导光装置，用于将通过N（例如N是两个）入射的光子对分离成具有第一偏振方向（例如水平偏振光）的光子，并且具有第二偏振方向的光子 偏振方向（例如垂直偏振光），并引导具有第一偏振方向的光子并通过第i（1≤i≤N）（例如第一）入射光路和具有第二偏振方向的光子进入 通过具有相同光路径的光路的第（N-i + 1）（例如第二）入射光路到第i（例如第一）出射光路 H。 因此，可以产生与偏振方向有量子相关性的N个通道的量子纠缠光子。 由此，实现了能够以高生产效率产生与极化方向有量子相关性的多通道量子纠缠光子对的量子纠缠光子对产生装置。
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5.发明授权Head position recognition method, a speed calculation method, and a head movement speed control device 失效头部位置识别方法，速度计算方法和头部移动速度控制装置
公开(公告)号：US5383068A
公开(公告)日：1995-01-17
申请号：US883209
申请日：1992-05-14
申请人： Ryosuke Shimizu , Tetsurou Takaoka
发明人： Ryosuke Shimizu , Tetsurou Takaoka
CPC分类号： G11B5/5547 , G11B21/083
摘要： A head position recognition method, a speed calculation method, and a head movement speed control device which provide for an overall improvement in storage device performance without increasing the seek time of the data head. Discrete servo sectors are provided circumferentially to the recording medium, four servo patterns with a minimum repeat cycle of 24 tracks are written into each servo sector. The range of the head seek distance that should be obtained at the current servo sector is estimated based on the previously calculated head seek distance, and the calculated head seek speed is corrected to the true head seek distance.
摘要翻译： 一种头位置识别方法，速度计算方法以及头部移动速度控制装置，其在不增加数据头的寻道时间的情况下提供存储装置性能的总体改进。 离散伺服扇区周向地设置在记录介质上，具有24个轨迹的最小重复周期的四个伺服模式被写入每个伺服扇区。 基于先前计算的头部搜索距离来估计在当前伺服扇区处应该获得的头部搜索距离的范围，并将所计算的头部寻道速度校正为真正的头部搜索距离。
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6.发明授权Resolution enhancement of absolute track position using iterative process and position bursts 失效使用迭代过程和位置突发分辨率提高绝对轨迹位置
公开(公告)号：US5402287A
公开(公告)日：1995-03-28
申请号：US732207
申请日：1991-07-18
IPC分类号： G11B5/596
CPC分类号： G11B5/596
摘要： In the head positioning apparatus of a disk-shaped information recording medium using the sector-servo-method, track codes are recorded in advance so as to be repeated every 12 tracks in the servo sectors of the disk-shaped information recording medium, the track are reproduced with a head, and a distance between the current position of the head and a target track is detected from the reproduced signal of the track codes with a resolution of 1/2.sup.7 of track width, then the head is moved to the target track so as to decrease the distance, when the head reaches the range of the width of .+-.6 tracks of the target track, an expanded head position signal having the resolution of 1/2.sup.7 is generated, and the head is controlled on the basis of the expanded head position signal and is finally settled to the target track.
摘要翻译： 在使用扇区伺服方式的盘形信息记录介质的头定位装置中，预先记录轨道码，以便在盘状信息记录介质的伺服扇区中每12个轨道重复，轨道 用头部再现，并且以轨道宽度的1/27的分辨率从轨道码的再现信号中检测头部和目标轨道的当前位置之间的距离，然后将头移动到目标轨道 为了减小距离，当头部到达目标轨道的+/- 6个轨道的宽度的范围时，产生具有1/27分辨率的扩展的头位置信号，并且基于 的扩展头位置信号，并最终确定到目标轨道。
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7.发明授权Resolution enhancement of absolute track position using iterative process and position bursts with track following capability 失效使用具有跟踪能力的迭代过程和位置脉冲串分辨率增强绝对轨迹位置
公开(公告)号：US5396380A
公开(公告)日：1995-03-07
申请号：US730237
申请日：1991-07-15
CPC分类号： G11B5/5547
摘要： Track codes are recorded in advance so as to be repeated every 12 tracks, and burst signals .alpha. and .beta. are also recorded in advance so as to be repeated every 2 tracks, in the servo sectors of the disk-shaped information recording medium; the track codes and the burst signals .alpha. and .beta. are reproduced with a data head, and a distance between the current position of the data head and a target track is detected from the reproduced signal of the track codes with a resolution of 1/2.sup.2 of track width, then the data head is moved to the target track so as to decrease the distance; when the data head reaches the range of the width of .+-.6 tracks of the target track, an expanded data head position signal having the resolution of 1/2.sup.2 is generated; and thereby the data head is controlled.
摘要翻译： 提前记录轨道码，以便每12个轨道重复，并且在盘状信息记录介质的伺服扇区中，还预先记录突发信号α和β以便每2个磁道重复; 利用数据头再现轨道码和突发信号α和β，并根据轨道码的再现信号，以1/22的分辨率检测数据头的当前位置与目标轨道之间的距离 轨道宽度，然后将数据头移动到目标轨道，以减小距离; 当数据磁头达到目标磁道的+/- 6磁道的宽度范围时，生成分辨率为1/22的扩展数据磁头位置信号; 从而数据头被控制。
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公开(公告)号：US11104655B2
公开(公告)日：2021-08-31
申请号：US16770405
申请日：2018-12-04
申请人： Ryosuke Shimizu , Takahiro Hosono , Ichihiro Aratani , Ryo Kouchi
发明人： Ryosuke Shimizu , Takahiro Hosono , Ichihiro Aratani , Ryo Kouchi
IPC分类号： C07D307/08 , B01J23/44 , C07D309/04
摘要： A method for producing a cyclic ether represented by formula (2) includes reacting a 2-hydroxy cyclic ether, represented by formula (1), with hydrogen in the presence of a catalyst.
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9.发明申请公开(公告)号：US20120134377A1
公开(公告)日：2012-05-31
申请号：US13376107
申请日：2010-06-03
申请人： Ryosuke Shimizu , Keiichi Edamatsu
发明人： Ryosuke Shimizu , Keiichi Edamatsu
IPC分类号： H01S3/10
CPC分类号： H04B10/70 , G02F1/35 , G02F2202/20 , H04J14/02 , H04L9/0858
摘要： A wavelength-multiplexed polarization entangled photon pair generator (1) includes: a pump light source (2); a polarization entangled photon pair generating body (4) on which pump light (3) outputted from the pump light source (2) falls; and a spectrometer (7) on which a wavelength-multiplexed parametric photon pair (5) outputted from the polarization entangled photon pair generating body 4 falls. The polarization entangled photon pair generating body (4) made of a nonlinear optical crystal (11) generates wavelength-multiplexed photon pairs by subjecting the pump light 3 to type II phase matching. As a nonlinear optical crystal 11, lithium tantalate of periodically poled structure (11A) can be used, and as a spectrometer (7), an arrayed-waveguide grating can be used. Wavelength-multiplexed polarization entangled photon pairs (5) can thus be generated with simple equipment.
摘要翻译： 波长多路复用偏振纠缠光子对发生器（1）包括：泵浦光源（2）; 偏振纠缠光子对发生体（4），泵浦光源（2）输出的泵浦光（3）落在其上; 以及从偏振纠缠光子对产生体4输出的波长多路复用参数光子对（5）的光谱仪（7）。 由非线性光学晶体（11）制成的偏振纠缠光子对产生体（4）通过对泵浦光3进行II型相位匹配来产生波长多路复用的光子对。 作为非线性光学晶体11，可以使用周期性极化结构（11A）的钽酸锂，作为光谱仪（7），可以使用阵列波导光栅。 波分复用偏振纠缠光子对（5）可以用简单的设备生成。
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公开(公告)号：US07652770B2
公开(公告)日：2010-01-26
申请号：US11990627
申请日：2006-12-06
CPC分类号： G02F1/3511 , G01J9/02 , G02F1/3519
摘要： An optical nonlinear evaluation device (1) capable of accurately evaluating the optical nonlinearity of a Kerr medium in accordance with a phase difference caused by cross-phase modulation generated in the Kerr medium includes: a polarization Sagnac interference path (3) provided with a Kerr medium (4); an optical pulse light source (7) for supplying a signal beam (Dsig); a polarization beam splitter (PBS1) for splitting the signal beam (Dsig) into a signal beam (Hsig) and a signal beam (Vsig) polarized in a direction orthogonal to the signal beam (Hsig), for supplying the signal beam (Hsig) to a first side of the Kerr medium (4), and for supplying the signal beam (Vsig) to a second side of the Kerr medium (4); a glass plate (14) for entering, onto the signal beam (Hsig), a control beam (Vcont) for causing a change in phase difference between the signal beam (Hsig) and the signal beam (Vsig); separating means for separating the control beam (Vcont) from the signal beam (Hsig) having traveled through the Kerr medium (4); and a detection section (10) provided so as to detect the phase difference between the signal beam (Hsig) and the signal beam (Vsig).
摘要翻译： 能够根据由克尔介质中产生的交叉相位调制引起的相位差精确地评估克尔介质的光学非线性的光学非线性评估装置（1）包括：提供有克尔的极化Sagnac干涉路径（3） 中等（4）; 用于提供信号光束（Dsig）的光脉冲光源（7）; 用于将信号光束（Dsig）分离成信号光束（Hsig）的偏振分束器（PBS1）和与信号光束（Hsig）正交的方向偏振的信号光束（Vsig），用于提供信号光束（Hsig） 到所述克尔介质（4）的第一侧，并且用于将所述信号光束（Vsig）提供给所述克尔介质（4）的第二侧; 用于在信号光束（Hsig）上输入用于引起信号光束（Hsig）和信号光束（Vsig）之间的相位差变化的控制光束（Vcont）的玻璃板（14）; 分离装置，用于从已经穿过克尔介质（4）的信号光束（Hsig）分离控制光束（Vcont）; 以及检测部（10），以检测信号光束（Hsig）和信号光束（Vsig）之间的相位差。
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