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公开(公告)号：US5626727A
公开(公告)日：1997-05-06
申请号：US504516
申请日：1995-07-20
IPC分类号： C23C14/34 , C23C14/35 , H01J37/34 , H01L21/203
CPC分类号： H01J37/347 , H01J37/3405
摘要： A sputtering apparatus uses a plurality of rectangular targets to form a thin film on a substrate, and includes a plurality of magnets disposed along both side edges of each target in such a manner that the polarities of adjacent magnets along the side edges of the targets are opposite, and polarities of the magnets confronting each other across the targets are opposite. The surfaces of at least two targets are inclined to a surface of the substrate at an angle not smaller than 30.degree. and not larger than 60.degree..
摘要翻译： 溅射装置使用多个矩形目标在基板上形成薄膜，并且包括沿着目标的两个侧边缘设置的多个磁体，使得沿着靶的侧边缘的相邻磁体的极性为 相反的，并且彼此面对的磁体的极性相反。 至少两个靶的表面以不小于30°并且不大于60°的角度倾斜到基底的表面。
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公开(公告)号：US08475692B2
公开(公告)日：2013-07-02
申请号：US12935297
申请日：2009-03-23
申请人： Hiroto Sumida , Takahiro Kurokawa , Kazunori Ishikawa , Yoshiaki Tominaga , Mikio Takezawa , Mitsuhiro Takahashi , Masahide Yokoyama
发明人： Hiroto Sumida , Takahiro Kurokawa , Kazunori Ishikawa , Yoshiaki Tominaga , Mikio Takezawa , Mitsuhiro Takahashi , Masahide Yokoyama
IPC分类号： D04H1/72
摘要： Nanofibers are manufactured while preventing explosions from occurring due to solvent evaporation. An effusing unit (201) which effuses solution (300) into a space, a first charging unit (202) which electrically charges the solution (300) by applying an electric charge to the solution (300), a guiding unit (206) which forms an air channel for guiding the manufactured nanofibers (301), a gas flow generating unit (203) which generates, inside the guiding unit (206), gas flow for transporting the nanofibers, a diffusing unit (240) which diffusing the nanofibers (301) guided by the guiding unit (206), a collecting apparatus which electrically attracts and collects the nanofibers (301), and a drawing unit (102) which draws the gas flow together with the evaporated component evaporated from the solution (300) are included.
摘要翻译： 制造纳米纤维，同时防止由于溶剂蒸发而发生爆炸。 一种将溶液（300）排出到空间中的排出单元（201），通过向溶液（300）施加电荷而对溶液（300）进行电荷的第一充电单元（202），引导单元 形成用于引导制造的纳米纤维（301）的空气通道，在引导单元（206）内部产生用于输送纳米纤维的气流的气体流产生单元（203），扩散纳米纤维的扩散单元（240） 301），引导并收集纳米纤维（301）的收集装置和从溶液（300）蒸发的蒸发成分一起吸引气流的牵伸单元（102） 包括。
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公开(公告)号：US06635330B2
公开(公告)日：2003-10-21
申请号：US10238087
申请日：2002-09-09
IPC分类号： B05B100
CPC分类号： C23C14/505 , H01J9/20 , H01K3/005 , Y10T428/131 , Y10T428/2991 , Y10T428/8305
摘要： The present invention provides a method for forming thin films, wherein thin films with a uniform thickness can be formed on substrates as objects such as spheroids, even when the films are formed by conventional film-formation methods using an incident particle beam coming from a specific direction (e.g., evaporation and sputtering). In the method, thin films are formed on substrates such as spheroids with an incident particle beam coming from a particle source located in a specific direction by performing a spin motion together with a swing motion. The spin motion is a rotation of the substrate at a constant angular velocity about the spheroidal axis. The swing motion is a rotational oscillation of the same substrate for rotationally oscillating the axis at a constant cycle in one surface, where the center of the rotational oscillation is in the vicinity of the midpoint between two focal points on the axis of the spheroid. As a result, thin films with a uniform thickness in both the peripheral direction of the substrate and in the rotational axis direction of the spin motion can be formed even on substrates including spheroids.
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公开(公告)号：US6146734A
公开(公告)日：2000-11-14
申请号：US459453
申请日：1999-12-13
申请人： Eiji Ohno , Yoshitaka Sakaue , Kenichi Nagata , Nobuo Akahira , Masahide Yokoyama , Hiroshi Hayata , Noboru Yamada
发明人： Eiji Ohno , Yoshitaka Sakaue , Kenichi Nagata , Nobuo Akahira , Masahide Yokoyama , Hiroshi Hayata , Noboru Yamada
CPC分类号： G11B7/243 , C23C14/3414 , C23C14/3464 , G11B7/26 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316 , Y10S428/913 , Y10S430/146 , Y10T428/21
摘要： The present invention is to provide a method for manufacturing the PCE optical information recording disk under control of not only the crystallization velocity but also the complex index of refraction and thus the reflectance on the disk surface.The PCE optical information recording disk is suitable to be used under the constant angular velocity (the constant rotational numbers wherein the disk has a characteristic that the crystallization velocity is designed to become faster from inside area of the disk to outside area in the radical direction thereof under control of not only the crystallization velocity but also the complex index of refraction and thus the reflectance on the disk surface.In the case of mass production and high film formation to be required, the present invention provides an effective method for manufacturing the optical disk by means of sputtering from at least two targets at the same time in a manner that the crystallization velocity is increased in a radial direction from inside area to outside area in the disk.
摘要翻译： 本发明提供一种用于制造PCE光学信息记录盘的方法，该方法不仅可以控制结晶速度，而且可以控制复合折射率，从而在盘表面上的反射率。 PCE光学信息记录盘适用于以恒定角速度（其中盘具有结晶速度设计成从盘的内部区域到其沿自由度方向的外部区域变得更快的特性的恒定角速度 不仅可以控制结晶速度，而且可以控制复杂的折射率，从而提高光盘表面的反射率。在大量生产和需要高成膜的情况下，本发明提供了一种制造光盘的有效方法 通过同时从至少两个靶的溅射以使得结晶速度在盘的内部区域到外部区域的径向方向上增加的方式。
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公开(公告)号：US5082545A
公开(公告)日：1992-01-21
申请号：US450920
申请日：1989-12-14
申请人： Kunio Tanaka , Youichi Ohnishi , Masahide Yokoyama
发明人： Kunio Tanaka , Youichi Ohnishi , Masahide Yokoyama
CPC分类号： C23C14/3421 , C23C14/0036 , C23C14/34 , H01J37/34 , H01J37/3497
摘要： A sputtering apparatus to be used in reactive sputtering which mixes a reactive gas into a discharge gas so as to form chemical compound thin membranes.A heating means is provided for heating the target. Light such as infrared rays or the like, and laser beams are ideal as the heating means. A thermometer for applying light is preferable to measure the temperature of at least one portion of the target for controlling the heating condition of the target. The composition of the thin membrane to be formed by the reactive sputtering can may be made constant.
摘要翻译： 用于反应溅射中的溅射装置，其将反应气体混合到放电气体中以形成化合物薄膜。 提供用于加热靶的加热装置。 诸如红外线等的光和激光束是加热装置的理想选择。 优选用于施加光的温度计来测量靶的至少一部分的温度以控制靶的加热条件。 可以使通过反应性溅射形成的薄膜的组成恒定。
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公开(公告)号：US20110156319A1
公开(公告)日：2011-06-30
申请号：US13062123
申请日：2009-09-10
CPC分类号： D01D5/0061 , D01D5/0069 , D01D5/18 , D04H1/4382 , D04H1/728
摘要： A container having a plurality of orifices in an outer peripheral wall and having a space communicating with the orifices is rotated to extrude an electrically charged raw material liquid containing a polymer material from the space through the orifices by centrifugal force. This allows the electrically charged raw material liquid to form a fibrous material. At this time, the raw material liquid is supplied to the space in which the raw material liquid is filled by a raw material liquid pump so that the raw material liquid is extruded from the orifices at a predetermined pressure. That is, the raw material liquid in the space is pressurized. Also, the shape of the space in the container is set so that the centrifugal force exerted on the raw material liquid is constant.
摘要翻译： 在外周壁具有多个孔并具有与孔连通的空间的容器旋转，以通过离心力从孔中挤出含有聚合物材料的带电原料液。 这使得带电的原料液体形成纤维材料。 此时，由原料液泵将原料液供给到原料液填充的空间，使原料液以规定压力从孔口挤出。 也就是说，空间中的原料液被加压。 此外，容器中的空间的形状被设定为使得施加在原料液体上的离心力恒定。
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7.发明授权Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation 失效薄膜形成方法，涂有薄膜的球体，使用球体的灯泡和用于成膜的设备公开(公告)号：US06472022B1
公开(公告)日：2002-10-29
申请号：US09537622
申请日：2000-03-29
IPC分类号： B05B100
CPC分类号： C23C14/505 , H01J9/20 , H01K3/005 , Y10T428/131 , Y10T428/2991 , Y10T428/8305
摘要： The present invention provides a method for forming thin films, wherein thin films with a uniform thickness can be formed on substrates as objects such as spheroids, even when the films are formed by conventional film-formation methods using an incident particle beam coming from a specific direction (e.g., evaporation and sputtering). In the method, thin films are formed on substrates such as spheroids with an incident particle beam coming from a particle source located in a specific direction by performing a spin motion together with a swing motion. The spin motion is a rotation of the substrate at a constant angular velocity about the spheroidal axis. The swing motion is a rotational oscillation of the same substrate for rotationally oscillating the axis at a constant cycle in one surface, where the center of the rotational oscillation is in the vicinity of the midpoint between two focal points on the axis of the spheroid. As a result, thin films with a uniform thickness in both the peripheral direction of the substrate and in the rotational axis direction of the spin motion can be formed even on substrates including spheroids.
摘要翻译： 本发明提供了一种形成薄膜的方法，其中，即使当使用来自特定的粒子束的入射粒子束的常规成膜方法形成膜时，也可以在诸如球体的物体的基板上形成具有均匀厚度的薄膜 方向（如蒸发和溅射）。 在该方法中，通过与摆动运动一起执行旋转运动，在具有来自位于特定方向的粒子源的入射粒子束的基底上形成薄膜，例如球体。 旋转运动是围绕球球轴以恒定角速度旋转基底。 摆动是同一基板的旋转振动，用于在一个表面中以恒定周期旋转轴的旋转振动，其中旋转振荡的中心在球体的轴线上的两个焦点之间的中点附近。 结果，即使在包括球体的基板上也可以形成在基板的圆周方向上和旋转轴的旋转轴方向上具有均匀厚度的薄膜。
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公开(公告)号：US5865961A
公开(公告)日：1999-02-02
申请号：US578030
申请日：1995-12-26
IPC分类号： C23C14/35
CPC分类号： C23C14/35
摘要： A magnetron sputtering apparatus has a plurality of ring-shaped flat targets with different diameters disposed about one center axis. The apparatus includes magnets having the same polarity as each other and placed on both front surface side and rear surface side of each of the targets along an inner circumferential edge thereof, and magnets having the same polarity as each other and placed on both front surface side and rear surface side of each of the targets along an outer circumferential edge thereof. The magnets placed along the inner and outer circumferential edges are placed in such a way that the magnets along the inner circumferential edge and the magnets along the outer circumferential edge become opposite in polarity to each other.
摘要翻译： 磁控溅射装置具有围绕一个中心轴设置的多个具有不同直径的环形平板靶。 该装置包括彼此极性相同并且沿着其内圆周边缘放置在每个靶的前表面侧和后表面侧上的磁体，以及彼此具有相同极性的磁体并且放置在两个前表面侧 并且每个靶的后表面侧沿着其外圆周边缘。 沿着内周缘和外周边缘放置的磁体以这样的方式放置，使得沿着内圆周边缘的磁体和沿着外圆周边缘的磁体彼此极性相反。
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公开(公告)号：US5558749A
公开(公告)日：1996-09-24
申请号：US499194
申请日：1995-07-07
申请人： Masahide Yokoyama , Hiroshi Hayata
发明人： Masahide Yokoyama , Hiroshi Hayata
CPC分类号： H01J37/3408 , C23C14/35
摘要： A magnetron sputtering apparatus has a ring-shaped flat target and includes magnets of the same polarity respectively arranged at a front side and a rear side of the target extending along an inner peripheral edge of the target, and magnets of the same polarity respectively arranged at the front side and the rear side of the target extending along an outer peripheral edge of the target. The magnets extending along the inner peripheral edge of the target are inverted in polarity relative to the other magnets extending along the outer peripheral edge of the target.
摘要翻译： 磁控溅射装置具有环形平板靶，并且包括分别设置在靶的内周边缘处延伸的靶的前侧和后侧的相同极性的磁体和分别布置在 靶的前侧和后侧沿着靶的外周边缘延伸。 沿着靶的内周边缘延伸的磁体相对于沿着靶的外围边缘延伸的其它磁体的极性反转。
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公开(公告)号：US08524140B2
公开(公告)日：2013-09-03
申请号：US13062123
申请日：2009-09-10
CPC分类号： D01D5/0061 , D01D5/0069 , D01D5/18 , D04H1/4382 , D04H1/728
摘要： A container having a plurality of orifices in an outer peripheral wall and having a space communicating with the orifices is rotated to extrude an electrically charged raw material liquid containing a polymer material from the space through the orifices by centrifugal force. This allows the electrically charged raw material liquid to form a fibrous material. At this time, the raw material liquid is supplied to the space in which the raw material liquid is filled by a raw material liquid pump so that the raw material liquid is extruded from the orifices at a predetermined pressure. That is, the raw material liquid in the space is pressurized. Also, the shape of the space in the container is set so that the centrifugal force exerted on the raw material liquid is constant.
摘要翻译： 在外周壁具有多个孔并具有与孔连通的空间的容器旋转，以通过离心力从孔中挤出含有聚合物材料的带电原料液。 这使得带电的原料液体形成纤维材料。 此时，由原料液泵将原料液供给到原料液填充的空间，使原料液以规定压力从孔口挤出。 也就是说，空间中的原料液被加压。 此外，容器中的空间的形状被设定为使得施加在原料液体上的离心力恒定。
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