High numerical aperture optical focusing device for use in data storage systems
    1.
    发明授权
    High numerical aperture optical focusing device for use in data storage systems 有权
    用于数据存储系统的高数值孔径光学聚焦装置

    公开(公告)号:US06185051B2

    公开(公告)日:2001-02-06

    申请号:US09338785

    申请日:1999-06-23

    IPC分类号: G02B1318

    摘要: A near-field optical or MO data storage system uses an optical focusing device for focusing an incident optical beam to a small size focal spot. The optical focusing device includes an optically transmissive body which is defined by a generally flat incident surface, a flat, bottom surface disposed opposite and parallel to the incident surface, and a reflective side coated with a reflective layer for reflecting the optical beam through the body toward the bottom surface. The bottom surface defines a focal plane on which the focal spot is formed, for generating a localized evanescent field. The focal spot is located along a central axis P, in very close proximity to the data storage disk, such that the localized evanescent field interacts with the disk, for enabling data to be transduced to and from the disk by effecting near field coupling. An electro-magnetic coil or coil assembly, can optionally be formed on the bottom surface, co-axially with the focal spot, for generating a desired write magnetic field. The reflective side of the optical focusing device preferably has a parabola shaped curvature, but other shapes can alternatively be selected. For example, the side curvature can have a tilted parabola shape.

    摘要翻译: 近场光学或MO数据存储系统使用光聚焦装置将入射光束聚焦到小尺寸焦点。 该光学聚焦装置包括光学透射体,其由大致平坦的入射表面,与入射表面相对并平行设置的平坦的底表面限定,反射面涂覆有反射层,用于将光束反射通过本体 朝向底面。 底表面限定焦平面,焦平面形成在其上,用于产生局部渐逝场。 焦点沿着中心轴P位于数据存储盘非常接近处,使得局部的消逝场与磁盘相互作用,以通过进行近场耦合使数据能够被传送到磁盘。 电磁线圈或线圈组件可以可选地形成在底表面上,与焦斑同轴地形成,以产生所需的写入磁场。 光学聚焦装置的反射侧优选地具有抛物线形曲率,但是也可以选择其它形状。 例如,侧曲率可以具有倾斜的抛物线形状。

    High numerical aperture optical focusing device having a conical incident facet and a parabolic reflector for use in data storage systems
    2.
    发明授权
    High numerical aperture optical focusing device having a conical incident facet and a parabolic reflector for use in data storage systems 有权
    具有锥形入射面和用于数据存储系统的抛物面反射器的高数值孔径光学聚焦装置

    公开(公告)号:US06377535B1

    公开(公告)日:2002-04-23

    申请号:US09179279

    申请日:1998-10-26

    IPC分类号: G11B7135

    摘要: An optical focusing device for focusing an incident optical beam onto a focal plane, as a focal spot. The optical focusing device includes an incident central refractive facet upon which an optical beam impinges, and a high-index glass body through which the incident optical beam passes toward a bottom reflective surface. The bottom reflective surface reflects the optical beam through the body, toward a peripheral reflector. The peripheral reflector focuses the optical beam toward a focal plane on which the focal spot is formed. The focal plane is defined within a pedestal that forms part of the optical focusing device, and that extends from the bottom reflective surface. The central facet is conically shaped for refracting the incident optical beam away from the pedestal, onto the bottom reflective surface. The peripheral reflector surrounds the central facet and can have various appropriate shapes, such as an aspherical shape or a tilted parabolic shape, which compensates for the conical factor and aberrations introduced by the central facet. The top surface includes the central facet and the peripheral facet, and can be made substantially flat using diffractive optical elements or Fresnel optics.

    摘要翻译: 一种用于将入射光束聚焦到焦平面上的聚焦装置作为焦点。 光聚焦装置包括光束入射的入射中心折射面和入射光束通过其朝向底部反射表面的高折射率玻璃体。 底部反射表面将光束通过主体反射到外围反射器。 外围反射器将光束聚焦到其上形成焦点的焦平面上。 焦平面被限定在形成光学聚焦装置的一部分的基座内,并且从底部反射表面延伸。 中心小面是圆锥形的,用于将入射光束从基座折回到底部反射表面上。 外围反射器围绕中心小平面并且可以具有各种适当的形状,例如非球面形状或倾斜的抛物线形状,其补偿由中心小面引入的锥形因子和像差。 顶表面包括中心小面和外围小面,并且可以使用衍射光学元件或菲涅耳光学器件使其基本上平坦。

    Near field magneto-optical head made using wafer processing techniques
    3.
    发明授权
    Near field magneto-optical head made using wafer processing techniques 失效
    使用晶片处理技术制造的近场磁光头

    公开(公告)号:US6130779A

    公开(公告)日:2000-10-10

    申请号:US111098

    申请日:1998-07-06

    摘要: The method of making and self-aligning a magneto-optical head at a wafer level is as follows: A flat optical substrate is molded or heat pressed in batches as a wafer level to form the desired lens shapes. Coil cavities or depressions are simultaneously formed with the lens to accommodate the coil assembly. Conductive plugs are formed in proximity to the cutting lines, for wire bonding attachment to the coil. The plugs are filled with a conductive material such as copper. The plugs do not extend through the entire depth of the optical wafer, thus further facilitating the mass production of the integrated heads. The slider body wafer is formed from silicon or other appropriate material. The slider body wafer and the lens/coil wafer are bonded. Coils and pedestals are formed on the lens / coil plate using thin-film processing techniques. Reflective surfaces are deposited on the bottom surface of the substrate, opposite the lens. The mirror material around the pedestal areas and plugs is masked and removed. An alumina layer is then deposited to define the air bearing surface and the pedestal. Yokes are then formed by means of lithography and plating in the base and sides of the depressions to assume a desired shape. A series of alternating insulating layers and conductive coil layers is formed. A protective layer seals the coil assembly, and is lapped to correct the lens thickness and to provide proper focal plane.

    摘要翻译: 在晶片级别制造和自动对准磁光头的方法如下:平板光学基板被成型或成批地热压成晶片级以形成所需的透镜形状。 线圈腔或凹陷部分与透镜同时形成以容纳线圈组件。 导电插塞形成在切割线附近,用于与线圈的引线接合。 塞子填充有诸如铜的导电材料。 插头不延伸穿过光学晶片的整个深度,从而进一步促进了集成头的批量生产。 滑块体晶片由硅或其它合适的材料形成。 滑块体晶片和透镜/线圈晶片接合。 使用薄膜加工技术在透镜/线圈板上形成线圈和基座。 反射表面沉积在基底的与透镜相对的底表面上。 底座区域和插头周围的镜子材料被遮蔽并移除。 然后沉积氧化铝层以限定空气轴承表面和基座。 然后通过在凹部的基部和侧面中的光刻和电镀形成轭以呈现期望的形状。 形成一系列交替绝缘层和导电线圈层。 保护层密封线圈组件,并且被研磨以校正透镜厚度并提供适当的焦平面。

    Wafer processing techniques for near field magneto-optical head
    4.
    发明授权
    Wafer processing techniques for near field magneto-optical head 有权
    近场磁光头的晶片处理技术

    公开(公告)号:US6094803A

    公开(公告)日:2000-08-01

    申请号:US234615

    申请日:1999-01-21

    摘要: A method of making and self-aligning a disk data storage read/write head that uses a catadioptric focusing device (or lens) having a high numerical aperture (NA), which does not introduce significant spot aberration on a storage medium. The manufacturing process of the head is carried out at a wafer level, and is facilitated significantly by the flatness of the focusing device. An exemplary manufacturing process is implemented as follows: A lens coil/plate is formed by molding a flat optical substrate to form the desired lens shapes. Coil cavities or depressions are formed simultaneously with the lens to accommodate a coil. Conductive plugs are formed in proximity to cutting lines for wire bonding attachment to the coil. A slider wafer is formed and bonded to the lens/coil wafer. Coils and pedestals are also formed on the lens/coil plate using thin-film processing techniques, and reflective surfaces are deposited on the bottom surface of the substrate, opposite the lens. The focusing device includes an incident surface, a reflective surface, a focal pedestal, and a body. The incident surface is generally flat and is comprised of a central diffractive, optically transmissive surface and a peripheral reflector. The peripheral reflector is comprised of a reflective-diffractive surface, or alternatively, a reflective-kinoform phase profile.

    摘要翻译: 一种制造和自对准使用具有高数值孔径(NA)的反折射聚焦装置(或透镜)的盘数据存储读/写头的方法,其不会在存储介质上引入显着的像差。 头的制造过程在晶片级进行,并且由于聚焦装置的平坦度而显着地促进。 示例性制造过程如下实现:透镜线圈/板通过模制平面光学基板以形成所需的透镜形状而形成。 线圈腔或凹陷部与透镜同时形成以容纳线圈。 导电插塞形成在切割线附近,用于引线接合附接到线圈。 滑块晶片形成并结合到透镜/线圈晶片。 使用薄膜处理技术也在透镜/线圈板上形成线圈和基座,并且反射表面沉积在与透镜相对的基板的底表面上。 聚焦装置包括入射表面,反射表面,焦点基座和主体。 入射表面通常是平坦的,并且由中心衍射,光学透射表面和外围反射器组成。 外围反射器由反射衍射表面或者反射型kinoform相位轮廓构成。

    High NA catadioptric focusing device having flat diffractive surfaces
    5.
    发明授权
    High NA catadioptric focusing device having flat diffractive surfaces 有权
    具有平坦衍射面的高NA反射折射聚焦装置

    公开(公告)号:US5986995A

    公开(公告)日:1999-11-16

    申请号:US234620

    申请日:1999-01-21

    摘要: A magneto-optical head using a catadioptric focusing device comprised of an incident surface, a bottom reflective surface, a pedestal, and a body. The incident surface is generally flat and is comprised of a central diffractive, optically transmissive facet and a peripheral facet comprised of a diffractive-reflective surface or facet. In a data writing or reading mode, an incident optical beam, such as a laser beam impinges upon the central facet, and is diffracted thereby. The incident laser beam can be collimated, convergent or divergent. The laser beam passes through the transparent body, and impinges upon the bottom reflective surface. The laser beam is then reflected by the bottom reflective surface, through the body, unto the peripheral diffractive-reflective surface. The laser beam is reflected and also diffracted by the peripheral diffractive-reflective surface as a focused beam, through the body, and is focused as a focal point located at, or in close proximity to a pedestal edge, along a central axis, in very close proximity to the disk. This will allow the focused optical beam to propagate toward, or penetrate the disk through evanescent wave coupling, for enabling the transduction of data to and from the disk.

    摘要翻译: 一种使用由入射表面,底部反射表面,基座和主体构成的反折射聚焦装置的磁光头。 入射表面通常是平坦的,并且由中心衍射光学透射小面和由衍射反射表面或小面组成的外围小面组成。 在数据写入或读取模式中,诸如激光束的入射光束照射在中心小面上并被衍射。 入射激光束可以准直,收敛或发散。 激光束穿过透明体并撞击在底部反射面上。 然后激光束被底部反射表面通过主体反射到外围的衍射反射表面。 激光束被作为聚焦光束的外围衍射反射表面反射并衍射穿过本体,并且被非常地聚焦在位于或靠近基座边缘的焦点上 靠近磁盘。 这将允许聚焦的光束通过ev逝波耦合传播或穿透光盘,以使数据能够传输到光盘。

    High numerical aperture optical focusing device for use in data storage systems
    6.
    发明授权
    High numerical aperture optical focusing device for use in data storage systems 有权
    用于数据存储系统的高数值孔径光学聚焦装置

    公开(公告)号:US06229782B1

    公开(公告)日:2001-05-08

    申请号:US09179278

    申请日:1998-10-26

    IPC分类号: G11B700

    摘要: An optical focusing device for focusing an incident optical beam onto a focal plane, as a focal spot. The optical focusing device includes an incident central refractive facet upon which an optical beam impinges, and a high-index glass body through which the incident optical beam passes toward a bottom reflective surface. The bottom reflective surface reflects the optical beam through the body, toward a peripheral reflector. The peripheral reflector focuses the optical beam toward a focal plane on which the focal spot is formed. The focal plane is defined within a pedestal that forms part of the optical focusing device, and that extends from the bottom reflective surface. The central facet is conically shaped for refracting the incident optical beam away from the pedestal, onto the bottom reflective surface. The peripheral reflector surrounds the central facet and can have various appropriate shapes, such as an aspherical shape or a tilted parabolic shape, which compensates for the conical factor and aberrations introduced by the central facet. The top surface includes the central facet and the peripheral facet, and can be made substantially flat using diffractive optical elements or Fresnel optics. The focal spot of the optical rays can be optimized using sequential quadratic program and a set of optimized coefficients.

    摘要翻译: 一种用于将入射光束聚焦到焦平面上的聚焦装置作为焦点。 光聚焦装置包括光束入射的入射中心折射面和入射光束通过其朝向底部反射表面的高折射率玻璃体。 底部反射表面将光束通过主体反射到外围反射器。 外围反射器将光束聚焦到其上形成焦点的焦平面上。 焦平面被限定在形成光学聚焦装置的一部分的基座内,并且从底部反射表面延伸。 中心小面是圆锥形的,用于将入射光束从基座折回到底部反射表面上。 外围反射器围绕中心小平面并且可以具有各种适当的形状,例如非球面形状或倾斜的抛物线形状,其补偿由中心小面引入的锥形因子和像差。 顶表面包括中心小面和外围小面,并且可以使用衍射光学元件或菲涅耳光学器件使其基本上平坦。 可以使用顺序二次程序和一组优化的系数来优化光线的焦点。

    High NA solid catadioptric focusing device having a flat kinoform phase profile
    7.
    发明授权
    High NA solid catadioptric focusing device having a flat kinoform phase profile 有权
    高NA固体反射折射聚焦装置,具有平坦的kinoform相位轮廓

    公开(公告)号:US06212153B1

    公开(公告)日:2001-04-03

    申请号:US09235129

    申请日:1999-01-21

    IPC分类号: G11B700

    摘要: A magneto-optical head using a catadioptric focusing device comprised of an incident surface, a bottom reflective surface, a pedestal, and a body. The incident surface is generally flat and is comprised of a central diffractive, optically transmissive facet and a peripheral facet comprised of a kinoform phase profile. In a data writing or reading mode, an incident optical beam, such as a laser beam impinges upon the central facet, and is diffracted thereby. The incident laser beam can be collimated, convergent or divergent. The laser beam passes through the transparent body, and impinges upon the bottom reflective surface. The laser beam is then reflected by the bottom reflective surface, through the body, unto the kinoform phase profile. The laser beam is reflected and refracted by the peripheral kinoform phase profile as a focused beam, through the body, and is focused as a focal point. The focal point is preferably located at, or in close proximity to a pedestal edge, along a central axis, in very close proximity to the disk. This will allow the focused optical beam to propagate toward, or penetrate the disk through evanescent wave coupling, for enabling the transduction of data to and from the disk.

    摘要翻译: 一种使用由入射表面,底部反射表面,基座和主体构成的反折射聚焦装置的磁光头。 入射表面通常是平坦的,并且包括由中心衍射的光学透射小面和包括kinoform相位轮廓的外围小面。 在数据写入或读取模式中,诸如激光束的入射光束照射在中心小面上并被衍射。 入射激光束可以准直,收敛或发散。 激光束穿过透明体并撞击在底部反射面上。 然后,激光束被底部反射表面反射,通过主体反射到诺基亚相图。 激光束被作为聚焦光束的外围kinoform相位轮廓反射和折射通过身体,并被聚焦成焦点。 焦点优选位于非常靠近盘的中心轴处或靠近基座边缘处,或者紧邻基座边缘。 这将允许聚焦的光束通过ev逝波耦合传播或穿透光盘,以使数据能够传输到光盘。

    Turbo speed sensor diagnostic for turbocharged engines
    9.
    发明授权
    Turbo speed sensor diagnostic for turbocharged engines 有权
    用于涡轮增压发动机的Turbo速度传感器诊断

    公开(公告)号:US07937996B2

    公开(公告)日:2011-05-10

    申请号:US12141329

    申请日:2008-06-18

    申请人: Chuan He Yun Xiao

    发明人: Chuan He Yun Xiao

    IPC分类号: G01M15/00

    摘要: A method of diagnosing operation of a turbo speed sensor that monitors a turbocharger in an internal combustion engine system includes determining whether the engine system is operating in one of a high speed and a low speed range and determining a threshold turbo speed value based on whether engine system is operating in one of the high speed and the low speed range. An actual turbo speed value of the turbocharger is monitored based on a signal generated by the turbo speed sensor. The actual turbo speed value is compared to the threshold turbo speed value and a diagnostic signal is generated based on the step of comparing.

    摘要翻译: 一种诊断内燃机系统中的涡轮增压器的涡轮速度传感器的操作的方法包括:确定发动机系统是否以高速和低速范围中的一个运行,并且基于发动机是否确定阈值涡轮转速值 系统运行在高速和低速范围之一。 基于由涡轮转速传感器产生的信号来监测涡轮增压器的实际涡轮转速值。 将实际的turbo速度值与阈值turbo速度值进行比较,并且基于比较步骤生成诊断信号。

    METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
    10.
    发明申请
    METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS 有权
    清洗半导体波形的方法和装置

    公开(公告)号:US20100139710A1

    公开(公告)日:2010-06-10

    申请号:US12452367

    申请日:2007-07-05

    IPC分类号: B08B3/12 B08B13/00 B08B3/08

    摘要: An apparatus for cleaning a surface of wafer or substrate includes a plate being positioned with a gap to surface of the wafer or substrate, and the plate being rotated around an axis vertical to surface of wafer or substrate. The rotating plate surface facing surface of the wafer or substrate has grooves, regular patterns, and irregular patterns to enhance the cleaning efficiency. Another embodiment further includes an ultra sonic or mega sonic transducer vibrating the rotating plate during cleaning process.

    摘要翻译: 用于清洁晶片或基板的表面的设备包括板,其定位成与晶片或基板的表面间隔开,并且板围绕垂直于晶片或基板表面的轴线旋转。 晶片或基板的旋转板表面相对表面具有凹槽,规则图案和不规则图案以提高清洁效率。 另一个实施例还包括在清洁过程中振动旋转板的超声波或超声波传感器。