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57 条记录 (耗时 0.024 秒)

    ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE
    1.
    发明申请
    ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE 审中-公开
    用于加工柔性连续工件的辊对辊反应器

    公开(公告)号：US20120234314A1

    公开(公告)日：2012-09-20

    申请号：US13100201

    申请日：2011-05-03

    申请人： Howard Zolla ,  Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi ,  Robert J. Bailey

    发明人： Howard Zolla ,  Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi ,  Robert J. Bailey

    IPC分类号： F24C3/00

    CPC分类号： H01L31/0322 ,  H01L31/0749 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

    摘要： The present invention provides a reactor for preparing thin films of compound semiconductors for photovoltaic devices. The reactor includes a chamber that has a bottom surface that, in some locations, has protrusions that contact the bottom surface of the substrate having the compound semiconductor to provide uniform heating and cooling of the substrate. Interior walls of the chamber can also be lined with high thermal conductivity portions and low thermal conductivity portions interposed between high thermal conductivity portions.

    摘要翻译： 本发明提供一种用于制备用于光伏器件的化合物半导体的薄膜的反应器。 反应器包括具有底表面的室，其在一些位置具有与具有化合物半导体的衬底的底表面接触的突起，以提供衬底的均匀加热和冷却。 腔室的内壁还可以衬有高导热部分和介于高导热部分之间的低导热部分。

    ROLL-TO-ROLL EVAPORATION SYSTEM AND METHOD TO MANUFACTURE GROUP IBIIIAVIA PHOTOVOLTAICS
    4.
    发明申请
    ROLL-TO-ROLL EVAPORATION SYSTEM AND METHOD TO MANUFACTURE GROUP IBIIIAVIA PHOTOVOLTAICS 审中-公开
    滚动滚筒蒸发系统及其制造方法IBIIIAVIA PHOTOVOLTAICS

    公开(公告)号：US20120247388A1

    公开(公告)日：2012-10-04

    申请号：US13342648

    申请日：2012-01-03

    申请人： Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi

    发明人： Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi

    IPC分类号： C23C16/54

    CPC分类号： H01L21/6776 ,  C23C14/562 ,  C23C14/564 ,  H01L21/02568 ,  H01L21/02614 ,  H01L21/02631 ,  H01L31/0322 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

    摘要： The present inventions provide method and apparatus that employ constituents vaporized from one or more constituent supply source or sources to form one or more films of a precursor layer formed on a surface of a continuous flexible workpiece. Of particular significance is the implementation of vapor deposition systems that operate upon a horizontally disposed portion of a continuous flexible workpiece and a vertically disposed portion of a continuous flexible workpiece, preferably in conjunction with a short free-span zone of the portion of a continuous flexible workpiece.

    摘要翻译： 本发明提供了使用从一个或多个构成供应源或源蒸发的组分形成在连续柔性工件的表面上形成的前体层的一个或多个膜的方法和装置。 特别重要的是实施气相沉积系统，其操作在连续柔性工件的水平放置部分和连续柔性工件的垂直设置部分上，优选结合连续柔性工件部分的短自由跨距区域 工件。

    METHOD AND APPARATUS FOR FORMING CONTACT LAYERS FOR CONTINUOUS WORKPIECES
    7.
    发明申请
    METHOD AND APPARATUS FOR FORMING CONTACT LAYERS FOR CONTINUOUS WORKPIECES 审中-公开
    用于形成连续工作的接触层的方法和装置

    公开(公告)号：US20100140078A1

    公开(公告)日：2010-06-10

    申请号：US12632484

    申请日：2009-12-07

    申请人： Mustafa Pinarbasi ,  James Freitag ,  Jorge Vasquez ,  Bulent M. Basol

    发明人： Mustafa Pinarbasi ,  James Freitag ,  Jorge Vasquez ,  Bulent M. Basol

    IPC分类号： C23C14/34 ,  C23C14/56

    CPC分类号： C23C14/042 ,  C23C14/165 ,  C23C14/541 ,  C23C14/562 ,  H01L31/0322 ,  H01L31/03928 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

    摘要： The present invention provides a roll to roll system and a method to sputter deposit various conductive films on a back surface and a front surface of a continuous substrate to form protected base structures for Group IBIIIAVIA thin film solar cells. In one embodiment of the invention, a back protection film is sputter deposited onto the entire back side of the substrate in a first deposition station without transferring heat from the substrate. Next, a first front film is sputter deposited in a second deposition station to partially cover the front side of the substrate while heat is transferred from substrate by a cooling surface of a cooling mechanism in the second deposition station. The second film does not cover the edges of the substrate to avoid contaminating the cooling surface with the depositing material. Other embodiments are directed to specifics regarding the depositing of these films, adding other films, and a system for depositing the films.

    摘要翻译： 本发明提供一种卷对卷系统和一种溅射沉积连续衬底的背表面和前表面上的各种导电膜以形成IBIIIAVIA族薄膜太阳能电池的受保护的基础结构的方法。 在本发明的一个实施例中，在第一沉积站中的背衬保护膜被溅射沉积在基板的整个背面上，而不会从基板传递热量。 接下来，在第二沉积站中溅射沉积第一前膜以部分地覆盖基板的前侧，同时通过第二沉积站中的冷却机构的冷却表面从基板转移热量。 第二个膜不覆盖基板的边缘，以避免用沉积材料污染冷却表面。 其他实施例涉及关于这些膜的沉积，添加其它膜以及用于沉积膜的系统的细节。

    Roll-to-roll evaporation system and method to manufacture group IBIIAVIA photovoltaics
    9.
    发明授权
    Roll-to-roll evaporation system and method to manufacture group IBIIAVIA photovoltaics 有权
    卷对卷蒸发系统和制造IBIIIAVIA集团光伏的方法

    公开(公告)号：US08088224B2

    公开(公告)日：2012-01-03

    申请号：US12769321

    申请日：2010-04-28

    申请人： Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi

    发明人： Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi

    IPC分类号： B05C1/00

    CPC分类号： H01L21/6776 ,  C23C14/562 ,  C23C14/564 ,  H01L21/02568 ,  H01L21/02614 ,  H01L21/02631 ,  H01L31/0322 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

    摘要： The present inventions provide method and apparatus that employ constituents vaporized from one or more constituent supply source or sources to form one or more films of a precursor layer formed on a surface of a continuous flexible workpiece. Of particular significance is the implementation of vapor deposition systems that operate upon a horizontally disposed portion of a continuous flexible workpiece and a vertically disposed portion of a continuous flexible workpiece, preferably in conjunction with a short free-span zone of the portion of a continuous flexible workpiece.

    摘要翻译： 本发明提供了使用从一个或多个构成供应源或源蒸发的组分形成在连续柔性工件的表面上形成的前体层的一个或多个膜的方法和装置。 特别重要的是实施气相沉积系统，其操作在连续柔性工件的水平放置部分和连续柔性工件的垂直设置部分上，优选结合连续柔性工件部分的短自由跨距区域 工件。