Add one process step to control the SI distribution of Alsicu to
improved metal residue process window
    1.
    发明授权
    Add one process step to control the SI distribution of Alsicu to improved metal residue process window 失效
    添加一个过程步骤来控制Alsicu的SI分布,以改善金属残留过程窗口

    公开(公告)号:US5994219A

    公开(公告)日:1999-11-30

    申请号:US90498

    申请日:1998-06-04

    CPC classification number: H01L21/28512 H01L21/76838

    Abstract: A new method of metal deposition with reduced metal residue after metal etching by cooling the wafer before metal deposition is described. A first patterned conducting layer is provided overlying a dielectric layer on the surface of a semiconductor substrate. The wafer is cooled to a temperature of less than about 20.degree. C. Thereafter, a metal layer is deposited overlying the first patterned conducting layer. The metal layer is etched away where it is not covered by a mask to complete formation of the metal line. Cooling of the wafer before metal deposition decreases the metal residue found after metal etching.

    Abstract translation: 描述了在金属沉积之前通过冷却晶片在金属蚀刻之后金属沉积减少的新方法。 第一图案化导电层设置在半导体衬底的表面上覆盖介电层。 将晶片冷却至低于约20℃的温度。此后,沉积覆盖第一图案化导电层的金属层。 金属层被蚀刻掉,其未被掩模覆盖以完成金属线的形成。 在金属沉积之前,晶片的冷却减少金属蚀刻后发现的金属残留。

    PIXEL STRUCTURE AND MANUFACTURING METHOD THEREOF
    2.
    发明申请
    PIXEL STRUCTURE AND MANUFACTURING METHOD THEREOF 有权
    像素结构及其制造方法

    公开(公告)号:US20130161604A1

    公开(公告)日:2013-06-27

    申请号:US13541757

    申请日:2012-07-04

    Abstract: A pixel structure and a manufacturing method thereof are provided. The pixel structure includes a substrate, a scan line, a data line, a first insulating layer, an active device, a second insulating layer, a common electrode and a first pixel electrode. The data line crossed to the scan line is disposed on the substrate and includes a linear transmitting part and a cross-line transmitting part. The first insulating layer covering the scan line and the linear transmitting part is disposed between the scan line and the cross-line transmitting part. The active device, including a gate, an oxide channel, a source and a drain, is connected to the scan line and the data line. The second insulating layer is disposed on the oxide channel and the linear transmitting part. The common electrode is disposed above the linear transmitting part. The first pixel electrode is connected to the drain.

    Abstract translation: 提供像素结构及其制造方法。 像素结构包括基板,扫描线,数据线,第一绝缘层,有源器件,第二绝缘层,公共电极和第一像素电极。 与扫描线交叉的数据线设置在基板上,并且包括线性透射部分和交叉线传输部分。 覆盖扫描线的第一绝缘层和线性透射部分设置在扫描线和交叉线传输部分之间。 包括栅极,氧化物通道,源极和漏极的有源器件连接到扫描线和数据线。 第二绝缘层设置在氧化物通道和线性透射部分上。 公共电极设置在线状发送部的上方。 第一像素电极连接到漏极。

    Pixel structure
    3.
    发明授权
    Pixel structure 有权
    像素结构

    公开(公告)号:US08426894B2

    公开(公告)日:2013-04-23

    申请号:US13163780

    申请日:2011-06-20

    CPC classification number: H01L29/458 H01L27/124 H01L27/1288

    Abstract: A pixel structure includes a scan line, a data line, an active element, a first passivation layer, a second passivation layer and a pixel electrode. The data line includes a first data metal segment and a second data metal layer. The active element includes a gate electrode, an insulating layer, a channel layer, a source and a drain. The channel layer is positioned on the insulating layer above the gate electrode. The source and the drain are positioned on the channel layer. The source is coupled to the data line. The first passivation layer and the second passivation layer cover the active element and form a first contact hole to expose a part of the drain. The second passivation layer covers a part edge of the drain. The pixel electrode is disposed across the second passivation layer and coupled to the drain via the first contact hole.

    Abstract translation: 像素结构包括扫描线,数据线,有源元件,第一钝化层,第二钝化层和像素电极。 数据线包括第一数据金属段和第二数据金属层。 有源元件包括栅电极,绝缘层,沟道层,源极和漏极。 沟道层位于栅电极上方的绝缘层上。 源极和漏极位于沟道层上。 源耦合到数据线。 第一钝化层和第二钝化层覆盖有源元件并形成第一接触孔以暴露漏极的一部分。 第二钝化层覆盖漏极的一部分边缘。 像素电极跨越第二钝化层设置并且经由第一接触孔耦合到漏极。

    Reflective type touch-sensing display panel and manufacturing method thereof
    4.
    发明授权
    Reflective type touch-sensing display panel and manufacturing method thereof 有权
    反射式触摸感应显示面板及其制造方法

    公开(公告)号:US08330880B2

    公开(公告)日:2012-12-11

    申请号:US12781805

    申请日:2010-05-17

    CPC classification number: G02F1/135 H01J9/24

    Abstract: A reflective type touch-sensing display panel including a front substrate, scan lines, data lines, pixel structures, photo-sensors, readout devices, a rear substrate and a reflective display medium is provided. The front substrate has an inner surface. The scan lines and the data lines are on the inner surface of the front substrate and intersected to each other. The pixel structures are disposed on the inner surface of the front substrate, and each pixel structure is electrically connected to one of the scan lines and one of the data lines correspondingly. The photo-sensors are disposed on the inner surface of the front substrate. Each readout device is electrically connected to one of the photo-sensor correspondingly. The rear substrate is disposed opposite to the front substrate. The reflective display medium is sealed between the front substrate and the rear substrate.

    Abstract translation: 提供了包括前基板,扫描线,数据线,像素结构,光传感器,读出装置,后基板和反射显示介质的反射型触摸感测显示面板。 前基板具有内表面。 扫描线和数据线位于前基板的内表面上并彼此相交。 像素结构设置在前基板的内表面上,并且每个像素结构相应地电连接到扫描线之一和数据线之一。 光传感器设置在前基板的内表面上。 每个读出装置相应地电连接到一个光电传感器。 后基板与前基板相对设置。 反射显示介质被密封在前基板和后基板之间。

    Pixel designs of improving the aperture ratio in an LCD
    5.
    发明授权
    Pixel designs of improving the aperture ratio in an LCD 有权
    像素设计提高了LCD中的开口率

    公开(公告)号:US08179490B2

    公开(公告)日:2012-05-15

    申请号:US12483390

    申请日:2009-06-12

    Abstract: This invention in one aspect relates to a pixel structure. In one embodiment, the pixel structure includes a scan line formed on a substrate and a data line formed over the substrate defining a pixel area, a switch formed inside the pixel area on the substrate, a shielding electrode having a first portion and a second portion extending from the first portion, and formed over the scan line, the data line and the switch, where the first portion is overlapped with the switch and the second portion is overlapped with the data line, and a pixel electrode having a first portion and a second portion extending from the first portion, and formed over the shielding electrode in the pixel area, where the first portion is overlapped with the first portion of the shielding electrode so as to define a storage capacitor therebetween and the second portion has no overlapping with the second portion of the shielding electrode.

    Abstract translation: 本发明在一个方面涉及像素结构。 在一个实施例中,像素结构包括形成在衬底上的扫描线和形成在衬底上的限定像素区域的数据线,形成在衬底上的像素区域内的开关,具有第一部分和第二部分的屏蔽电极 从第一部分延伸并且在扫描线上形成数据线和开关,其中第一部分与开关重叠,并且第二部分与数据线重叠,并且具有第一部分和第二部分的像素电极 第二部分从第一部分延伸并且形成在像素区域中的屏蔽电极之上,其中第一部分与屏蔽电极的第一部分重叠,以便在其间限定存储电容器,并且第二部分与第二部分不重叠 屏蔽电极的第二部分。

    Electrophoresis display pixel and display apparatus
    6.
    发明授权
    Electrophoresis display pixel and display apparatus 有权
    电泳显示像素和显示装置

    公开(公告)号:US08174493B2

    公开(公告)日:2012-05-08

    申请号:US12638959

    申请日:2009-12-15

    CPC classification number: G09G3/3446 G02F1/167 G02F2001/1676

    Abstract: An electrophoresis display pixel including an electrophoresis display film, a substrate, a first active device, a second active device, a first electrode, and a second electrode is provided. The substrate is disposed on the electrophoresis display film, and the substrate has a transparent region and a non-transparent region. The first active device and the second active device are disposed on the substrate and located in the non-transparent region. The first electrode is disposed on the substrate, located in the transparent region, and electrically connected to the first active device. The second electrode is disposed on the substrate, located in the non-transparent region, and electrically connected to the second active device. A light passes through the transparent region and enters the electrophoresis display film to be displayed. A display apparatus including the abovementioned electrophoresis display pixel is also provided.

    Abstract translation: 提供了包括电泳显示膜,基板,第一有源器件,第二有源器件,第一电极和第二电极的电泳显示像素。 基板设置在电泳显示膜上,基板具有透明区域和不透明区域。 第一有源器件和第二有源器件设置在衬底上并且位于不透明区域中。 第一电极设置在基板上,位于透明区域中,并电连接到第一有源器件。 第二电极设置在基板上,位于非透明区域中,并电连接到第二有源器件。 光通过透明区域并进入电泳显示膜以显示。 还提供了包括上述电泳显示像素的显示装置。

    Active matrix substrate
    7.
    发明授权
    Active matrix substrate 有权
    有源矩阵基板

    公开(公告)号:US08149228B2

    公开(公告)日:2012-04-03

    申请号:US11308644

    申请日:2006-04-17

    CPC classification number: G02F1/134336 G02F2001/134345 G02F2201/52

    Abstract: An active matrix substrate including a substrate, a plurality of scan lines, a plurality of data lines and a plurality of sub-pixels is provided. The scan lines and the data lines are disposed on the substrate, and define a plurality of sub-pixel regions distributed in a delta arrangement. The sub-pixels corresponding to the sub-pixel regions are disposed on the substrate. The sub-pixels are electrically connected with corresponding scan lines and corresponding data lines. Between two sub-pixel regions corresponding to any two adjacent sub-pixels at a same side of one scan line, there are two data lines. Each sub-pixel includes an active device and a pixel electrode. The active device is electrically connected with a corresponding scan line and a corresponding data line. The pixel electrode is electrically connected with the active device, and extends from the sub-pixel region corresponding to the sub-pixel to a position over the data line.

    Abstract translation: 提供了包括基板,多条扫描线,多条数据线和多个子像素的有源矩阵基板。 扫描线和数据线设置在基板上,并且限定以三角形排列分布的多个子像素区域。 对应于子像素区域的子像素设置在基板上。 子像素与相应的扫描线和对应的数据线电连接。 在与一条扫描线同侧的任意两个相邻子像素对应的两个子像素区域之间,存在两条数据线。 每个子像素包括有源器件和像素电极。 有源器件与相应的扫描线和相应的数据线电连接。 像素电极与有源器件电连接,并且从对应于子像素的子像素区域延伸到数据线上方的位置。

    Color filter and manufacturing method thereof
    8.
    发明授权
    Color filter and manufacturing method thereof 有权
    滤色器及其制造方法

    公开(公告)号:US08034517B2

    公开(公告)日:2011-10-11

    申请号:US11933421

    申请日:2007-11-01

    CPC classification number: G02B5/201 G02B5/223 G02F1/133516

    Abstract: A manufacturing method of a color filter comprising the following steps is provided. At first, a transparent substrate is provided. Next, a black matrix is formed on the transparent substrate to define a plurality of pixel areas on the transparent substrate. Then, an isolation layer is formed and patterned on the black matrix and then Red/Green/Blue color filter inks are filled into each of the pixel areas separately by inkjet printing. After that, the color filter inks are dried to form color filter units and optionally the isolation layer can further be patterned to form plenty of photo spacers on the black matrix. The isolation layers prevented the color filter inks from spilling out of the pixel areas and color mixing problems during color filter inkjet fabrication. Besides, it is characterized that the color filter units can be formed with even thickness.

    Abstract translation: 提供了一种包括以下步骤的滤色器的制造方法。 首先,提供透明基板。 接下来,在透明基板上形成黑矩阵,以在透明基板上限定多个像素区域。 然后,在黑矩阵上形成并图案化隔离层,然后通过喷墨打印将红/绿/蓝滤色器墨水分别填充到每个像素区域中。 之后,将滤色器油墨干燥以形成滤色器单元,并且任选地隔离层可进一步图案化以在黑色矩阵上形成大量的光隔离物。 隔离层防止滤色器墨水在滤色器喷墨制造期间溢出像素区域和混色问题。 此外,其特征在于可以形成均匀厚度的滤色器单元。

    Pixel structure of liquid crystal display panel and method of making the same
    9.
    发明授权
    Pixel structure of liquid crystal display panel and method of making the same 有权
    液晶显示面板的像素结构及其制作方法

    公开(公告)号:US07839462B2

    公开(公告)日:2010-11-23

    申请号:US12204809

    申请日:2008-09-05

    Applicant: Hsiang-Lin Lin

    Inventor: Hsiang-Lin Lin

    Abstract: A pixel structure of a liquid crystal display panel and the method thereof is provided. The gate electrode and data line of the pixel structure are formed by a first patterned conductive layer, the scan line is formed by a second patterned conductive layer, and the common electrode and the pixel electrode are formed on a substrate. The common electrode, the pixel electrode, and the insulating layer disposed therebetween compose a storage capacitor. Also, the pixel or the common electrode has a slit structure.

    Abstract translation: 提供了一种液晶显示面板的像素结构及其方法。 像素结构的栅电极和数据线由第一图案化导电层形成,扫描线由第二图案化导电层形成,并且公共电极和像素电极形成在基板上。 公共电极,像素电极和设置在其间的绝缘层组成存储电容器。 此外,像素或公共电极具有狭缝结构。

    Active device array substrate and method for fabricating the same
    10.
    发明授权
    Active device array substrate and method for fabricating the same 有权
    有源器件阵列衬底及其制造方法

    公开(公告)号:US07781776B2

    公开(公告)日:2010-08-24

    申请号:US12190887

    申请日:2008-08-13

    CPC classification number: H01L27/1288 H01L27/124

    Abstract: An active device array substrate and its fabricating method are provided. According to the subject invention, the elements of an array substrate such as the thin film transistors, gate lines, gate pads, data lines, data pads and storage electrodes, are provided by forming a patterned first metal layer, an insulating layer, a patterned semiconductor layer and a patterned metal multilayer. Furthermore, the subject invention uses the means of selectively etching certain layers. Using the aforesaid means, the array substrate of the subject invention has some layers with under-cut structures, and thus, the number of the time-consuming and complicated mask etching process involved in the production of an array substrate can be reduced. The subject invention provides a relatively simple and time-saving method for producing an array substrate.

    Abstract translation: 提供一种有源器件阵列衬底及其制造方法。 根据本发明,诸如薄膜晶体管,栅极线,栅极焊盘,数据线,数据焊盘和存储电极之类的阵列基板的元件通过形成图案化的第一金属层,绝缘层,图案化 半导体层和图案化金属多层。 此外,本发明使用选择性蚀刻某些层的方法。 使用上述方法,本发明的阵列基板具有一些具有欠切割结构的层,因此可以减少与制造阵列基板有关的耗时且复杂的掩模蚀刻工艺的数量。 本发明提供了用于制造阵列基板的相对简单且省时的方法。

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