Methods for manufacturing a metal-oxide thin film transistor
    1.
    发明授权
    Methods for manufacturing a metal-oxide thin film transistor 有权
    金属氧化物薄膜晶体管的制造方法

    公开(公告)号:US08927330B2

    公开(公告)日:2015-01-06

    申请号:US13572710

    申请日:2012-08-13

    IPC分类号: H01L21/363 H01L29/786

    CPC分类号: H01L29/7869

    摘要: Disclosed herein is a method for manufacturing a metal-oxide thin film transistor. The method includes the steps of: (a1) forming a gate electrode on a substrate; (a2) forming a gate insulating layer over the gate electrode; (a3) forming a metal-oxide semiconductor layer having a channel region on the gate insulating layer; (a4) forming a source electrode and a drain electrode on the metal-oxide semiconductor layer, wherein the source electrode is spaced apart from the drain electrode by a gap exposing the channel region; (a5) forming a mobility-enhancing layer on the channel region, wherein the mobility-enhancing layer is not in contact with the source electrode and the drain electrode; and (a6) annealing the metal-oxide semiconductor layer and the mobility-enhancing layer in an environment at a temperature of about 200° C. to 350° C.

    摘要翻译: 本文公开了一种制造金属氧化物薄膜晶体管的方法。 该方法包括以下步骤:(a1)在基板上形成栅电极; (a2)在所述栅电极上形成栅极绝缘层; (a3)在栅极绝缘层上形成具有沟道区的金属氧化物半导体层; (a4)在所述金属氧化物半导体层上形成源电极和漏电极,其中所述源电极通过所述沟道区域露出的间隙与所述漏电极间隔开; (a5)在沟道区上形成迁移率增强层,其中迁移率增强层不与源电极和漏电极接触; 和(a6)在约200℃至350℃的温度的环境中退火金属氧化物半导体层和迁移率增强层。

    Metal oxide semiconductor transistor

    公开(公告)号:US09647138B2

    公开(公告)日:2017-05-09

    申请号:US13480742

    申请日:2012-05-25

    摘要: A metal oxide semiconductor transistor includes a gate, a metal oxide active layer, a gate insulating layer, a source, and a drain. The metal oxide active layer has a first surface and a second surface, and the first surface faces to the gate. The gate insulating layer is disposed between the gate and the metal oxide active layer. The source and the drain are respectively connected to the metal oxide active layer. The second surface defines a mobility enhancing region between the source and the drain. An oxygen content of the metal oxide active layer in the mobility enhancing region is less than an oxygen content of the metal oxide active layer in the region outside the mobility enhancing region. The metal oxide semiconductor transistor has high carrier mobility.

    METAL OXIDE SEMICONDUCTOR TRANSISTOR
    3.
    发明申请
    METAL OXIDE SEMICONDUCTOR TRANSISTOR 有权
    金属氧化物半导体晶体管

    公开(公告)号:US20120313084A1

    公开(公告)日:2012-12-13

    申请号:US13480742

    申请日:2012-05-25

    IPC分类号: H01L29/22 H01L51/30

    摘要: A metal oxide semiconductor transistor includes a gate, a metal oxide active layer, a gate insulating layer, a source, and a drain. The metal oxide active layer has a first surface and a second surface, and the first surface faces to the gate. The gate insulating layer is disposed between the gate and the metal oxide active layer. The source and the drain are respectively connected to the metal oxide active layer. The second surface defines a mobility enhancing region between the source and the drain. An oxygen content of the metal oxide active layer in the mobility enhancing region is less than an oxygen content of the metal oxide active layer in the region outside the mobility enhancing region. The metal oxide semiconductor transistor has high carrier mobility.

    摘要翻译: 金属氧化物半导体晶体管包括栅极,金属氧化物有源层,栅极绝缘层,源极和漏极。 金属氧化物活性层具有第一表面和第二表面,并且第一表面面向栅极。 栅极绝缘层设置在栅极和金属氧化物有源层之间。 源极和漏极分别连接到金属氧化物活性层。 第二表面限定了源极和漏极之间的迁移率增强区域。 迁移率增强区域中的金属氧化物活性层的氧含量小于迁移率增强区域外的区域中的金属氧化物活性层的氧含量。 金属氧化物半导体晶体管具有高载流子迁移率。

    Self-aligned top-gate thin film transistors and method for fabricating same
    4.
    发明申请
    Self-aligned top-gate thin film transistors and method for fabricating same 审中-公开
    自对准顶栅薄膜晶体管及其制造方法

    公开(公告)号:US20120018718A1

    公开(公告)日:2012-01-26

    申请号:US12927835

    申请日:2010-11-26

    IPC分类号: H01L29/12 H01L21/04

    摘要: A self-aligned top-gate thin film transistor and a fabrication method thereof. The method includes preparing a substrate having sequentially formed thereon an oxide semiconductor layer, a dielectric layer, and a metallic layer, wherein the oxide semiconductor layer includes first and second connecting regions that are not covered by the dielectric layer and the metallic layer thereon respectively, the first and second connecting regions having a property of a conductor after undergone a heating process or an ultraviolet irradiation; and a source electrode and a drain electrode formed on the substrate and connected to the first and second connecting regions, respectively. Therefore, the contact resistance of the first and second connecting regions can be reduced without the process of ion dopants as required by prior art techniques, thereby simplifying the manufacturing process. Also, the source electrode and the drain electrode can be exactly relocated and further increase performance of the device.

    摘要翻译: 一种自对准顶栅薄膜晶体管及其制造方法。 该方法包括制备其上依次形成有氧化物半导体层,电介质层和金属层的衬底,其中氧化物半导体层包括分别不被电介质层和金属层覆盖的第一和第二连接区域, 所述第一和第二连接区域在进行加热处理或紫外线照射之后具有导体的性质; 以及源极电极和漏电极,分别形成在所述基板上并连接到所述第一和第二连接区域。 因此,不需要现有技术所要求的离子掺杂剂的处理,可以减少第一和第二连接区域的接触电阻,从而简化了制造工艺。 此外,源电极和漏电极可以精确地定位并进一步提高器件的性能。

    SMART WINDOW AND SMART WINDOW SYSTEM USING THE SAME
    5.
    发明申请
    SMART WINDOW AND SMART WINDOW SYSTEM USING THE SAME 审中-公开
    SMART WINDOW和SMART WINDOW系统使用相同

    公开(公告)号:US20120188627A1

    公开(公告)日:2012-07-26

    申请号:US13104100

    申请日:2011-05-10

    IPC分类号: G02F1/153 G02F1/03

    摘要: A smart window includes a windowpane, at least one sensor and a wireless signal transceiver. The sensor is disposed on the windowpane and configured for detecting an environmental factor and accordingly outputting a sensing signal. The wireless signal transceiver is disposed on the windowpane and electrically connected to the sensor. The wireless signal transceiver is configured for further transmitting the sensing signal from the sensor. A smart window system includes the aforementioned smart window. The smart window and the smart window system adopt wireless communication manner to transmit the sensing signals, and thereby the smart window system has an overall modulation to an environmental factor.

    摘要翻译: 智能窗口包括窗玻璃,至少一个传感器和无线信号收发器。 传感器设置在窗玻璃上,并且被配置为检测环境因素并相应地输出感测信号。 无线信号收发器设置在窗玻璃上并电连接到传感器。 无线信号收发器被配置为进一步发送来自传感器的感测信号。 智能窗系统包括上述智能窗。 智能窗口和智能窗口系统采用无线通信方式传输感测信号,从而使智能窗口系统具有对环境因素的整体调制。

    VERTICAL ELECTRO-OPTICAL COMPONENT AND METHOD OF FABRICATING THE SAME
    6.
    发明申请
    VERTICAL ELECTRO-OPTICAL COMPONENT AND METHOD OF FABRICATING THE SAME 有权
    垂直电光元件及其制造方法

    公开(公告)号:US20120235120A1

    公开(公告)日:2012-09-20

    申请号:US13111205

    申请日:2011-05-19

    摘要: A vertical electro-optical component and a method for forming the same are provided. The vertical electro-optical component includes a substrate, a first electrode layer formed on the substrate, a patterned insulating layer formed on the first electrode layer, a metal layer formed on the patterned insulating layer, a semiconductor layer formed on the first electrode layer, and a second electrode layer formed on the semiconductor layer, wherein the semiconductor layer encapsulates the patterned insulating layer and the metal layer. The vertical electro-optical component thus has a low operational voltage of a vertical transistor and a high reaction speed of a photo diode, and may be used to form light-emitting transistors.

    摘要翻译: 提供了一种垂直电光部件及其形成方法。 垂直电光部件包括基板,形成在基板上的第一电极层,形成在第一电极层上的图案化绝缘层,形成在图案化绝缘层上的金属层,形成在第一电极层上的半导体层, 以及形成在所述半导体层上的第二电极层,其中所述半导体层封装所述图案化绝缘层和所述金属层。 因此,垂直电光部件具有垂直晶体管的低操作电压和光电二极管的高反应速度,并且可以用于形成发光晶体管。

    Vertical electro-optical component and method of fabricating the same
    9.
    发明授权
    Vertical electro-optical component and method of fabricating the same 有权
    垂直电光元件及其制造方法

    公开(公告)号:US08723165B2

    公开(公告)日:2014-05-13

    申请号:US13111205

    申请日:2011-05-19

    IPC分类号: H01L51/52 H01L51/56 H01L51/44

    摘要: A vertical electro-optical component and a method for forming the same are provided. The vertical electro-optical component includes a substrate, a first electrode layer formed on the substrate, a patterned insulating layer formed on the first electrode layer, a metal layer formed on the patterned insulating layer, a semiconductor layer formed on the first electrode layer, and a second electrode layer formed on the semiconductor layer, wherein the semiconductor layer encapsulates the patterned insulating layer and the metal layer. The vertical electro-optical component thus has a low operational voltage of a vertical transistor and a high reaction speed of a photo diode, and may be used to form light-emitting transistors.

    摘要翻译: 提供了一种垂直电光部件及其形成方法。 垂直电光部件包括基板,形成在基板上的第一电极层,形成在第一电极层上的图案化绝缘层,形成在图案化绝缘层上的金属层,形成在第一电极层上的半导体层, 以及形成在所述半导体层上的第二电极层,其中所述半导体层封装所述图案化绝缘层和所述金属层。 因此,垂直电光部件具有垂直晶体管的低操作电压和光电二极管的高反应速度,并且可以用于形成发光晶体管。