Slurry composition for secondary polishing of silicon wafer

    公开(公告)号:US20060242912A1

    公开(公告)日:2006-11-02

    申请号:US10531125

    申请日:2003-07-30

    IPC分类号: B24D3/02

    CPC分类号: H01L21/30625 C09G1/02

    摘要: Disclosed is a slurry composition for secondary polishing of silicon wafers comprising: 2˜10 weight % of colloidal silica having an average particle size of 30˜80 nm; 0.5˜1.5 % by weight of ammonia; 0.2˜1 weight % of a hydroxyalkycellulose-based polymer for modifying rheology of the composition; 0.03˜0.5 weight % of a polyoxyethylenealkylamine ether-based nonionic surfactant; 0.01˜1 weight % of a quaternary ammonium base and the balance of deionized water.

    Refrigerant cycle system
    3.
    发明申请
    Refrigerant cycle system 失效
    制冷循环系统

    公开(公告)号:US20050138957A1

    公开(公告)日:2005-06-30

    申请号:US10890239

    申请日:2004-07-14

    IPC分类号: F25B43/02 F25B43/00 F25B1/10

    摘要: A refrigerant cycle system in which the arrangement of a connecting pipe for connection between a compressor and an accumulator is improved effectively to recover oil collected in the accumulator to the compressor. The accumulator is installed to be separate from the compressor. A connecting pipe is arranged between the compressor and the accumulator to feed a refrigerant gas separated in the accumulator to the compressor. An oil recovery hole is provided at an inlet portion of the connecting pipe received in the accumulator such that it is arranged at a level higher than a highest level portion of the connecting pipe located outside of the accumulator. A second accumulator may be connected between the connecting pipe and the compressor while being directly installed at the compressor. In this case, the connecting pipe has an outlet portion connected to the second accumulator.

    摘要翻译: 一种制冷剂循环系统,其中有效地提高了用于压缩机和蓄能器之间连接的连接管的布置,以将收集在蓄能器中的油回收到压缩机。 蓄能器安装成与压缩机分离。 在压缩机和蓄能器之间设置连接管,以将分离在蓄能器中的制冷剂气体供给压缩机。 在接收在蓄电池中的连接管的入口部分处设置有一个油回收孔,使其设置在比位于蓄能器外侧的连接管的最高位置高的位置。 第二蓄能器可以直接安装在压缩机上,连接在连接管和压缩机之间。 在这种情况下,连接管具有连接到第二蓄能器的出口部分。