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1.Integrated circuits with active elements isolated by insulating material 失效
Title translation: 具有绝缘材料隔离的有源元件的集成电路公开(公告)号:US3354360A
公开(公告)日:1967-11-21
申请号:US42102964
申请日:1964-12-24
Applicant: IBM
Inventor: CAMPAGNA FRANK J , GREGOR LAWRENCE V , SERAPHIM DONALD P
IPC: H01L21/316 , H01L49/02
CPC classification number: H01L21/31662 , H01L21/02238 , H01L21/02255 , H01L21/02258 , H01L49/02 , Y10S148/049 , Y10S148/053 , Y10S148/085 , Y10S148/118 , Y10S148/15