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公开(公告)号：US3424629A
公开(公告)日：1969-01-28
申请号：US3424629D
申请日：1965-12-13
Applicant: IBM
Inventor： ERNST ERIC O , HURD DONALD J , SEELEY GERARD
CPC classification number: H01L21/00 , C23C16/00 , C30B23/00 , C30B25/08 , C30B28/08 , H01L21/02532 , H01L21/02576 , H01L21/0262
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