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公开(公告)号：US3623818A
公开(公告)日：1971-11-30
申请号：US3623818D
申请日：1969-12-15
Applicant: IBM
Inventor： GARDNER EDWARD E , KEENAN WILLIAM A , SCHUMANN PAUL A JR
CPC classification number: G01R31/2637 , G01N21/21 , G01N21/55 , G01N2021/8461
Abstract: Carrier concentration of a semiconductive material is measured by directing monochromatic light at the material. The light is polarized with its electric vector in the plane of incidence. The angle of incidence is varied until a minimum in reflectivity occurs. The angle at which the minimum occurs, referred to as the pseudo-Brewster angle theta B, is related to the carrier concentration, whence the carrier concentration may be determined by comparison with a series of standards or by calculation.
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2.发明授权Measurement of semiconductor resistivity profiles by measuring voltages,calculating apparent resistivities and applying correction factors 失效通过测量电压测量半导体电阻率曲线，计算出具体的电阻值和应用校正因子
公开(公告)号：US3487301A
公开(公告)日：1969-12-30
申请号：US3487301D
申请日：1968-03-04
Applicant: IBM
Inventor： GARDNER EDWARD E , GOREY EDWARD F , SCHUMANN PAUL A JR , YEH TSU-HSING
CPC classification number: G01N27/041 , G01R31/2644
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