公开(公告)号：US3577278A

公开(公告)日：1971-05-04

申请号：US3577278D

申请日：1968-12-23

Applicant: IBM

Inventor： ROHR ROBERT L

IPC: B08B3/02 ,  C23G3/00 ,  C23G5/04 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

CPC classification number: C23G5/04 ,  C23G3/00 ,  H01L21/00

Abstract: AN ARTICLE SURFACE TREATING APPARATUS IS DESCRIBED HEREIN IN WHICH AN ARTICLE HOLDER HAVING A PLURALITY OF ARTICLES MOUNTED THEREON IS BUOYANTLY DISPOSED IN A TANK CONTAINING A FLUID. THE ARTICLE HOLDER IS CONTINUOUSLY CAUSED TO ROTATE BY A STREAM OF A LIQUID SOLUTION IMPINGING THEREON, SO AS TO CAUSE THE SUCCESSIVE SURFACE TREATMENT OF THE ARTICLES. THE ARTICLES MAY BE SUBJECTED TO A PROCESS, E.G. (CLEANING AND RINSING OR ETCHING AND RINSING) WHEREIN SEVERAL SOLUTIONS MAY BE PROGRAMMED TO SERIALLY TREAT THE SURFACES OF THE PLURALITY OF ARTICLES.

公开(公告)号：US3342652A

公开(公告)日：1967-09-19

申请号：US35679364

申请日：1964-04-02

Applicant: IBM

Inventor： ARNOLD REISMAN ,  ROHR ROBERT L

IPC: C23F3/00 ,  H01L21/304 ,  H01L21/306

CPC classification number: H01L21/02019 ,  H01L21/30612 ,  H01L21/30625