公开(公告)号：US20170108372A1

公开(公告)日：2017-04-20

申请号：US15312522

申请日：2015-05-19

申请人： IDT EUROPE GMBH

发明人： Thomas REICHEL ,  Lutz SCHIFFNER ,  Matthias GARZAROLLI ,  Matthias SANDIG ,  Lars GOPFERT

IPC分类号： G01J1/02 ,  G01J1/42 ,  G01J1/44 ,  H01L27/146

CPC分类号： G01J1/0214 ,  G01J1/0295 ,  G01J1/429 ,  G01J1/44 ,  G01J5/0285 ,  G01J5/045 ,  G01J2001/0276 ,  G01J2001/446 ,  H01L27/1462 ,  H01L27/14623 ,  H01L27/14636 ,  H01L27/14643 ,  H01L31/0203 ,  H01L31/02164 ,  H01L2224/48091 ,  H01L2224/49175 ,  H01L2924/00014

摘要： The invention relates to a UV light sensor produced in a CMOS method, comprising a substrate that has a surface, one or more sensor elements that detect radiation and are designed in said substrate, at least one passivation layer arranged over said substrate surface, and a functional layer that is arranged over said passivation layer and designed in the form of at least one filter. The problem addressed by the invention of providing a UV light sensor which is sensitive exclusively within the UV wavelength range is solved, in terms of arrangement, by means of filters designed directly on a planar passivation layer, and stray light suppressing means around said at least one sensor element and/or around the UV light sensor. In terms of the method, the problem is solved by measuring two output signal from at least two photo diodes fitted with different filters, and by determining a mathematical relationship between the two output signals.