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公开(公告)号：US20160169738A1
公开(公告)日：2016-06-16
申请号：US14964927
申请日：2015-12-10
IPC分类号： G01J1/42
CPC分类号： G01J1/4228 , G01J1/1626 , G01J5/0225 , G01J5/024 , G01J5/0285 , G01J5/045 , G01J5/06 , G01J5/061 , G01J5/12 , G01J5/14 , G01J5/20 , G01J2005/0048 , G01J2005/063 , G01J2005/065 , G01J2005/066 , G01J2005/068
摘要： A semiconductor device for measuring IR radiation is disclosed. It comprises a substrate and a cap enclosing a cavity, a sensor pixel in the cavity, comprising a first absorber for receiving said IR radiation, a first heater, first temperature measurement means for measuring a first temperature; a reference pixel in the same cavity, comprising a second absorber shielded from said IR radiation, a second heater, and second temperature measurement means for measuring a second temperature; a control circuit for applying a first/second power to the first/second heater such that the first temperature equals the second temperature; and an output circuit for generating an output signal indicative of the IR radiation based on a difference between the first and second power.
摘要翻译： 公开了一种用于测量IR辐射的半导体器件。 它包括衬底和封闭空腔的盖，空腔中的传感器像素，包括用于接收所述IR辐射的第一吸收体，第一加热器，用于测量第一温度的第一温度测量装置; 相同空腔中的参考像素，包括屏蔽所述IR辐射的第二吸收体，第二加热器和用于测量第二温度的第二温度测量装置; 控制电路，用于将第一/第二功率施加到第一/第二加热器，使得第一温度等于第二温度; 以及输出电路，用于基于第一和第二功率之间的差产生指示IR辐射的输出信号。
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公开(公告)号：US09274006B2
公开(公告)日：2016-03-01
申请号：US13959479
申请日：2013-08-05
发明人： Yuji Nitobe , Masahiro Saito , Shigemi Fujiwara , Akitoshi Shimo
CPC分类号： G01J5/34 , G01J5/0285 , G01J5/045 , H01L2924/0002 , H05K1/0219 , H05K1/181 , H05K2201/0723 , H05K2201/10151 , H05K2201/10166 , H05K2201/10515 , H05K2201/2036 , Y02P70/611 , H01L2924/00
摘要： An infrared sensor includes a circuit board, at least two support portions, a FET element and a pyroelectric element. The circuit board has an upper principal surface formed with plural electrodes. Each of the support portions has an upper surface, a lower surface, an upper conductive pattern formed on the upper surface and a lower conductive pattern formed on the lower surface. The upper conductive pattern is electrically connected with the lower conductive pattern. The lower conductive pattern is connected to an electrode of the upper principal surface of the circuit board. The FET element is located between the at least two support portions and arranged on the upper principal surface of the circuit board. The pyroelectric element is electrically connected with the upper conductive patterns of the support portions, and is supported by the support portions so as to be located above the FET element.
摘要翻译： 红外传感器包括电路板，至少两个支撑部分，FET元件和热电元件。 电路板具有形成有多个电极的上主面。 每个支撑部分具有形成在上表面上的上表面，下表面，上导电图案和形成在下表面上的下导电图案。 上导电图案与下导电图案电连接。 下导电图案连接到电路板的上主表面的电极。 FET元件位于至少两个支撑部分之间并且布置在电路板的上主表面上。 热电元件与支撑部分的上导电图案电连接，并被支撑部分支撑以便位于FET元件上方。
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公开(公告)号：US08785856B2
公开(公告)日：2014-07-22
申请号：US13178077
申请日：2011-07-07
申请人： Robert A. Maston
发明人： Robert A. Maston
CPC分类号： G01J5/061 , G01J5/0285 , G01J5/04 , G01J5/041 , G01J5/046 , G01J5/048 , G01J5/0875 , G01J5/12 , G01J5/20 , G01J2005/063 , G01J2005/068
摘要： Infrared (IR) temperature measurement and stabilization systems, and methods related thereto are provided. The innovation actively stabilizes temperatures of objects in proximity and within the path between an infrared (IR) sensor and target object. A temperature monitor and controller are employed to regulate power to resistive temperature devices (RTDs) thereby regulating current (and power) to the RTDs. As a result, temperatures of IR visible objects can be actively stabilized for changes, for example, changes in ambient temperatures, resulting in efficient and accurate temperature readings.
摘要翻译： 提供红外（IR）温度测量和稳定系统及其相关方法。 创新主动地稳定了红外（IR）传感器和目标物体之间的距离内和物体内的物体的温度。 采用温度监视器和控制器来调节电阻温度器件（RTD）的功率，从而调节RTD的电流（和功率）。 因此，IR可见物体的温度可以主动地稳定，以改变，例如环境温度的变化，从而导致有效和准确的温度读数。
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公开(公告)号：US20130221219A1
公开(公告)日：2013-08-29
申请号：US13404277
申请日：2012-02-24
申请人： Abbas Torabi
发明人： Abbas Torabi
IPC分类号： G01J5/06 , H01L31/0232
CPC分类号： G01J5/06 , G01J1/0209 , G01J1/0252 , G01J1/0488 , G01J5/022 , G01J5/0285 , G01J5/046 , G01J5/0862 , G01J5/20 , G01J2001/448 , G01J2005/0077 , G01J2005/202 , H01L27/14621 , H01L27/14649
摘要： A detector structure having a sensor for detecting energy impinging on the structure in the infrared and/or optical frequency band; an electronics section disposed behind the sensor for processing electrical signal produced by the sensor in response to the sensor detecting the infrared and/or optical energy; and an electrically conductive layer for inhibiting electromagnetic energy outside of the visible and infrared portions of the spectrum, such electrically conductive layer being disposed between impinging energy and the electronics section, such layer having a transmissivity greater than 90 percent in the visible and infrared portions of the spectrum and being reflective and/or dissipative to portions of the impinging energy outside of the visible and infrared portions of the spectrum. In one embodiment an electrically conductive layer having a substantially constant absorptivity to electromagnetic energy within the visible and infrared portions of the spectrum. In one embodiment, the layer is graphene.
摘要翻译： 一种检测器结构，具有用于检测冲击在红外线和/或光频带中的结构的能量的传感器; 设置在所述传感器后面的电子部件，用于响应于所述传感器检测所述红外线和/或光能量而处理由所述传感器产生的电信号; 以及用于在光谱的可见光和红外部分之外抑制电磁能的导电层，这种导电层设置在入射能量和电子部分之间，这样的透光率在可见光和红外部分中的透射率大于90％ 光谱并且对于光谱的可见光和红外部分之外的部分冲击能量是反射和/或耗散的。 在一个实施例中，导电层具有对光谱的可见光和红外部分内的电磁能的基本上恒定的吸收性。 在一个实施例中，该层是石墨烯。
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公开(公告)号：US08471206B1
公开(公告)日：2013-06-25
申请号：US12502883
申请日：2009-07-14
IPC分类号： G01J5/46
CPC分类号： G01J5/045 , G01J5/0285 , G01J2005/0077
摘要： Systems and methods are directed to determining the vacuum integrity within a vacuum package assembly containing an infrared detector, such as within an infrared imaging device. For example for an embodiment, a method of performing a vacuum pressure test on a vacuum package includes changing a first parameter value associated with an infrared detector within the vacuum package to vary a temperature of the infrared detector; measuring a second parameter value associated with the infrared detector based on the changing of the first parameter value; comparing the second parameter value to a threshold value; and determining a vacuum pressure condition of the vacuum package based on the comparing of the second parameter value to the threshold value.
摘要翻译： 系统和方法涉及在包含红外检测器（例如在红外成像装置内）的真空封装组件内确定真空完整性。 例如，对于实施例，对真空包装件进行真空压力测试的方法包括改变与真空包装内的红外检测器相关联的第一参数值以改变红外检测器的温度; 基于所述第一参数值的改变来测量与所述红外检测器相关联的第二参数值; 将所述第二参数值与阈值进行比较; 以及基于所述第二参数值与所述阈值的比较来确定所述真空组件的真空压力条件。
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公开(公告)号：US20130028286A1
公开(公告)日：2013-01-31
申请号：US13625161
申请日：2012-09-24
发明人： Paul Janis Timans
CPC分类号： G01J5/0896 , G01J5/0003 , G01J5/0007 , G01J5/0285 , G01J5/06 , G01J5/08 , G01J5/0803 , G01J5/0821 , G01J5/0831 , G01J5/0846 , G01J5/089 , G01J5/522 , G01J5/58 , G01J2005/0048 , G01J2005/065 , H01L21/324 , H01L21/67115 , H01L21/67248
摘要： A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
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公开(公告)号：US20120006989A1
公开(公告)日：2012-01-12
申请号：US13178077
申请日：2011-07-07
申请人： Robert A. Maston
发明人： Robert A. Maston
IPC分类号： G01J5/02
CPC分类号： G01J5/061 , G01J5/0285 , G01J5/04 , G01J5/041 , G01J5/046 , G01J5/048 , G01J5/0875 , G01J5/12 , G01J5/20 , G01J2005/063 , G01J2005/068
摘要： Infrared (IR) temperature measurement and stabilization systems, and methods related thereto are provided. The innovation actively stabilizes temperatures of objects in proximity and within the path between an infrared (IR) sensor and target object. A temperature monitor and controller are employed to regulate power to resistive temperature devices (RTDs) thereby regulating current (and power) to the RTDs. As a result, temperatures of IR visible objects can be actively stabilized for changes, for example, changes in ambient temperatures, resulting in efficient and accurate temperature readings.
摘要翻译： 提供红外（IR）温度测量和稳定系统及其相关方法。 创新主动地稳定了红外（IR）传感器和目标物体之间的距离内和物体内的物体的温度。 采用温度监视器和控制器来调节电阻温度器件（RTD）的功率，从而调节RTD的电流（和功率）。 因此，IR可见物体的温度可以主动地稳定，以改变，例如环境温度的变化，从而导致有效和准确的温度读数。
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公开(公告)号：US20110024628A1
公开(公告)日：2011-02-03
申请号：US12808745
申请日：2008-07-30
申请人： Jeffrey Wright
发明人： Jeffrey Wright
IPC分类号： H01L31/0203
CPC分类号： G01J5/04 , G01J5/0285 , G01J5/045 , H01L27/14618 , H01L2924/0002 , H01L2924/00
摘要： An apparatus for detecting radiation has a substrate, a protective housing fitting on the substrate, which has an electrically conductive material and a top facing away from the substrate, and that has an aperture therein. A stack is fitted on the substrate inside the protective housing and includes at least one detector substrate having at least one thermal detector element thereon that converts incoming thermal radiation into an electrical signal, at least one circuit carrier having at least one read circuit for reading out the electrical signal, and at least one cover that covers the detector element. The detector substrate is located between the circuit substrate and the cover. The detector substrate and the cover are arranged on each other such that the detector element of the detector substrate and the cover have at least one first stack cavity of the stack therebetween, the stack cavity being defined by the detector support and the cover. The circuit substrate and the detector substrate are arranged on each other such that the detector substrate and the circuit substrate have at least one second stack cavity therebetween, the second stack cavity being defined by the circuit substrate and the detector substrate. At least one of the first stack cavity and the second stack cavity is evacuated. The stack top that faces the substrate is accessible from outside of the protective housing.
摘要翻译： 用于检测辐射的装置具有衬底，衬底上的保护壳体配件，其具有导电材料和背离衬底的顶部，并且其中具有孔。 堆叠被安装在保护壳体内的衬底上，并且包括至少一个检测器衬底，其上具有至少一个热检测器元件，其将进入的热辐射转换成电信号，至少一个电路载体具有至少一个用于读出的读取电路 电信号和覆盖检测器元件的至少一个盖。 检测器基板位于电路基板和盖子之间。 检测器基板和盖彼此布置，使得检测器基板和盖的检测器元件具有其间的堆叠的至少一个第一堆叠空腔，堆叠腔由检测器支撑件和盖限定。 电路基板和检测器基板彼此布置，使得检测器基板和电路基板之间具有至少一个第二堆叠空腔，第二堆叠腔由电路基板和检测器基板限定。 将第一堆叠腔和第二堆叠腔中的至少一个排空。 面向基板的堆叠顶部可从保护外壳的外部进入。
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公开(公告)号：US07802918B2
公开(公告)日：2010-09-28
申请号：US11815649
申请日：2006-02-03
申请人： Manabu Dohi , Tetsuya Nagashima , Yoshimi Kawabata , Yasuo Ohmori
发明人： Manabu Dohi , Tetsuya Nagashima , Yoshimi Kawabata , Yasuo Ohmori
CPC分类号： G01J5/04 , G01J5/02 , G01J5/0205 , G01J5/0285 , G01J5/048 , G01J5/06 , G01J5/34 , G08B17/06
摘要： An object is to build a protective structure which can protect a ferroelectric material from a surrounding environment when the ferroelectric material is used as a heat detecting element of a heat detector, thereby enhancing the reliability of the heat detector.A heat detector includes a heat detecting unit 11 that senses heat in a monitoring area, and a casing 81 that holds the heat detecting unit 11, and the heat detecting unit is held by the casing 11 via a laminating portion 60 which serves to protect the heat detecting unit 11.
摘要翻译： 目的是建立一种保护结构，当将铁电材料用作热检测器的热检测元件时，可以保护铁电材料免受周围环境的影响，从而提高热检测器的可靠性。 热检测器包括感测监视区域中的热的热检测单元11和保持热检测单元11的壳体81，并且热检测单元通过层压部分60被壳体11保持，该层压部分60用于保护 热检测单元11。
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公开(公告)号：US07384192B2
公开(公告)日：2008-06-10
申请号：US11326764
申请日：2006-01-06
IPC分类号： G01N25/04
CPC分类号： G01J5/02 , G01J5/004 , G01J5/0044 , G01J5/0205 , G01J5/0285 , G01J5/041 , G01J5/08 , G01J5/0821 , G01K13/125
摘要： A method is provided for measuring the cooling curve of melts and/or the heating curve of melt samples with an optical fiber, wherein an immersion end of the optical fiber having an at least partially free surface is surrounded with a spacing by a temperature-resistant sample-receiving chamber. The optical fiber is immersed with its immersion end in the melt, and a sample is thereby formed in the sample-receiving chamber. The sample-receiving chamber with the sample and the optical fiber are thereafter pulled out of the molten metal. The cooling curve of the sample and/or, after previous solidification of the sample, the temperature profile during heating is measured with reference to a signal obtained by the optical fiber and forwarded to a measurement device. In addition, a corresponding device is provided for the measuring method.
摘要翻译： 提供了一种用于利用光纤测量熔体和/或熔体样品的加热曲线的冷却曲线的方法，其中具有至少部分自由表面的光纤的浸入端以间隔被耐温度包围 样品接收室。 将光纤浸入其熔融物中，由此在样品接收室中形成样品。 然后将带有样品和光纤的样品接收室从熔融金属中拉出。 参考样品的冷却曲线和/或在样品先前凝固之后，参考由光纤获得的信号测量加热期间的温度曲线并将其转发到测量装置。 此外，为测量方法提供相应的装置。
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