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公开(公告)号：US20230259034A1
公开(公告)日：2023-08-17
申请号：US18068229
申请日：2022-12-19
Applicant: ILLUMINA, INC.
Inventor： Jeffrey S. Fisher , Tanmay Ghonge , Sahngki Hong , Lewis J Kraft
IPC: G03F7/20
CPC classification number: G03F7/2026 , B29C59/026
Abstract: In a method, a resin layer of a stack (e.g., resin layer over sacrificial layer over transparent substrate) is imprinted to form a convex region including first region with first height and second region with second height
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