公开(公告)号：US09791621B2

公开(公告)日：2017-10-17

申请号：US14971466

申请日：2015-12-16

Applicant: IMEC VZW

Inventor： Philippe Absil ,  Shankar Kumar Selvaraja

IPC: G02B6/12 ,  G02B6/132 ,  G02B6/13 ,  G02B6/136

CPC classification number: G02B6/12 ,  G02B6/13 ,  G02B6/132 ,  G02B6/136 ,  G02B2006/12038 ,  G02B2006/12061 ,  G02B2006/12169

Abstract: A method for fabricating an integrated semiconductor photonics device is disclosed. The method may include providing a first substrate having on its top surface a monocrystalline semiconductor layer suitable for supporting an optical mode and forming a homogenous and conformal first dielectric layer on a planar surface of the monocrystalline semiconductor layer. The method may further include providing a dielectric waveguide core on the first dielectric layer, the dielectric waveguide core optically coupled to a first region of the monocrystalline semiconductor layer through the first dielectric layer. The method may further include depositing a second dielectric layer on the dielectric waveguide core, thereby covering the dielectric waveguide core, and annealing the substrate to drive hydrogen out of the dielectric waveguide core.

公开(公告)号：US09632248B2

公开(公告)日：2017-04-25

申请号：US14580029

申请日：2014-12-22

Applicant: IMEC VZW ,  Universiteit Ghent

Inventor： Shankar Kumar Selvaraja

IPC: G02B6/12 ,  G02B6/124 ,  G02B6/30 ,  G02B6/136

CPC classification number: G02B6/124 ,  G02B6/136 ,  G02B6/30 ,  G02B2006/12107 ,  G02B2006/12176

Abstract: The present invention relates to an integrated photonic device comprising a photonic substrate, and an integrated waveguide provided in or on this substrate. The waveguide is adapted for conducting radiation of a predetermined wavelength. The device further comprises a sub-wavelength grating optically connected to the waveguide, which provides a first periodic variation of the refractive index in at least one first spatial direction. The device also comprises a diffracting grating arranged over the sub-wavelength grating for coupling radiation of the predetermined wavelength in and/or out of the integrated waveguide via the sub-wavelength grating. The diffracting grating provides a second periodic variation of the refractive index in at least one second spatial direction. The first periodic variation has a first pitch that is less than half of the predetermined wavelength, while the second periodic variation has a second pitch that is at least half of the predetermined wavelength.

公开(公告)号：US20150285996A1

公开(公告)日：2015-10-08

申请号：US14580029

申请日：2014-12-22

Applicant: IMEC VZW ,  Universiteit Gent

Inventor： Shankar Kumar Selvaraja

IPC: G02B6/124 ,  G02B6/136

CPC classification number: G02B6/124 ,  G02B6/136 ,  G02B6/30 ,  G02B2006/12107 ,  G02B2006/12176

Abstract: The present invention relates to an integrated photonic device comprising a photonic substrate, and an integrated waveguide provided in or on this substrate. The waveguide is adapted for conducting radiation of a predetermined wavelength. The device further comprises a sub-wavelength grating optically connected to the waveguide, which provides a first periodic variation of the refractive index in at least one first spatial direction. The device also comprises a diffracting grating arranged over the sub-wavelength grating for coupling radiation of the predetermined wavelength in and/or out of the integrated waveguide via the sub-wavelength grating. The diffracting grating provides a second periodic variation of the refractive index in at least one second spatial direction. The first periodic variation has a first pitch that is less than half of the predetermined wavelength, while the second periodic variation has a second pitch that is at least half of the predetermined wavelength.

Abstract translation: 本发明涉及一种集成光子器件，其包括光子衬底和设置在该衬底中或之上的集成波导。 波导适于进行预定波长的辐射。 该器件还包括与波导光学连接的亚波长光栅，其在至少一个第一空间方向上提供折射率的第一周期性变化。 该器件还包括布置在子波长光栅上的衍射光栅，用于将预定波长的辐射经由子波长光栅耦合到和/或离开集成波导。 衍射光栅在至少一个第二空间方向上提供折射率的第二周期性变化。 第一周期性变化具有小于预定波长的一半的第一间距，而第二周期性变化具有至少为预定波长的一半的第二间距。

公开(公告)号：US20160170139A1

公开(公告)日：2016-06-16

申请号：US14971466

申请日：2015-12-16

Applicant: IMEC VZW

Inventor： Philippe Absil ,  Shankar Kumar Selvaraja

IPC: G02B6/12 ,  G02B6/132

CPC classification number: G02B6/12 ,  G02B6/13 ,  G02B6/132 ,  G02B6/136 ,  G02B2006/12038 ,  G02B2006/12061 ,  G02B2006/12169

Abstract: A method for fabricating an integrated semiconductor photonics device is disclosed. The method may include providing a first substrate having on its top surface a monocrystalline semiconductor layer suitable for supporting an optical mode and forming a homogenous and conformal first dielectric layer on a planar surface of the monocrystalline semiconductor layer. The method may further include providing a dielectric waveguide core on the first dielectric layer, the dielectric waveguide core optically coupled to a first region of the monocrystalline semiconductor layer through the first dielectric layer. The method may further include depositing a second dielectric layer on the dielectric waveguide core, thereby covering the dielectric waveguide core, and annealing the substrate to drive hydrogen out of the dielectric waveguide core.

Abstract translation: 公开了一种用于制造集成半导体光子学器件的方法。 该方法可以包括提供第一衬底，其在其顶表面上具有适于支撑光学模式的单晶半导体层，并在单晶半导体层的平坦表面上形成均匀且适形的第一介电层。 该方法可以进一步包括在第一电介质层上提供电介质波导芯，电介质波导芯通过第一介电层光耦合到单晶半导体层的第一区域。 该方法还可以包括在电介质波导芯上沉积第二电介质层，从而覆盖电介质波导芯，并退火衬底以将氢驱出电介质波导芯。