PHOTOSENSITIVE POLYIMIDE AND NEGATIVE TYPE PHOTORESIST COMPOSITION CONTAINING THE SAME
    2.
    发明申请
    PHOTOSENSITIVE POLYIMIDE AND NEGATIVE TYPE PHOTORESIST COMPOSITION CONTAINING THE SAME 审中-公开
    含有它的感光性聚酰亚胺和负型类型的光电组合物

    公开(公告)号:US20140178823A1

    公开(公告)日:2014-06-26

    申请号:US13908082

    申请日:2013-06-03

    CPC classification number: G03F7/0387 G03F7/027 G03F7/0388

    Abstract: A photosensitive polyimide and negative type photo-resist composition containing the same are provided. The photosensitive polyimide is represented by formula (I): wherein X1 and X3 are the same or different organic functional groups having four covalent bonds; X2 and X4 are the same or different organic functional groups having two covalent bonds, and X2 contains functional groups of OH or COOH and any one selected from the functional groups below: wherein R is H or CH3, p and q are integers of 1 to 20, and m and n in formula (I) are numbers of repeat units.

    Abstract translation: 提供含有它们的光敏聚酰亚胺和负型光致抗蚀剂组合物。 光敏聚酰亚胺由式(I)表示:其中X1和X3是具有四个共价键的相同或不同的有机官能团; X 2和X 4是具有两个共价键的相同或不同的有机官能团,X 2包含OH或COOH的官能团和选自以下官能团的任何一个:其中R是H或CH 3,p和q是1至 20,式(I)中的m和n为重复单元数。

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