公开(公告)号：US20210018041A1

公开(公告)日：2021-01-21

申请号：US16870439

申请日：2020-05-08

Applicant: Industrial Technology Research Institute

Inventor： Chien-Nan YEH ,  Chung-Yuan SU ,  Chao-Ta HUANG

IPC: F16C29/06 ,  G01B7/16 ,  F16C41/00

Abstract: A linear guideway with an embedded sensor includes a track, a slider, a plurality of rolling members, and a sensing module. The track extends in a first direction and has a first recess. The slider can move in the first direction and include a second recess, a channel, at least one hole, and a deforming region. The channel is formed by coupling the first recess and the second recess, and extends in the first direction. The hole extends from the surface of the slider along the insertion axis and into the slider. The rolling members are disposed in the channel. The sensing module is disposed in the hole, and contacts the deforming region to detect the amount of deformation.

公开(公告)号：US20130140655A1

公开(公告)日：2013-06-06

申请号：US13661690

申请日：2012-10-26

Applicant: Industrial Technology Research Institute

Inventor： Chien-Nan YEH ,  Chin-Hung WANG ,  Hsin-Li LEE ,  Jien-Ming CHEN ,  Tzong-Che HO ,  Li-Chi PAN

IPC: H01L29/84 ,  H01L21/56

CPC classification number: H01L21/56 ,  B81B7/0061 ,  B81B2201/0257 ,  B81B2207/012 ,  B81B2207/096 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/73265 ,  H01L2924/1461 ,  H01L2924/3025 ,  H04R19/005 ,  H04R31/006 ,  H04R2499/11 ,  H04R2499/15 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A MEMS acoustic transducer is provided, which includes a substrate, a MEMS chip, and a housing. The substrate has a first opening area and a lower electrode layer disposed over a surface of the substrate, wherein the first opening area includes at least one hole allowing acoustic pressure to enter the MEMS acoustic transducer. The MEMS chip is disposed over the surface of the substrate, including a second opening area and an upper electrode layer partially sealing the second opening area, wherein the upper electrode layer and the lower electrode layer, which are parallel to each other and have a gap therebetween, form an induction capacitor. The housing is disposed over the MEMS chip or the surface of the substrate creating a cavity with the MEMS chip or the substrate. In addition, a method for fabricating the above MEMS acoustic transducer is also provided.

Abstract translation: 提供了一种MEMS声换能器，其包括基板，MEMS芯片和壳体。 衬底具有设置在衬底的表面上的第一开口区域和下部电极层，其中第一开口区域包括允许声压进入MEMS声学换能器的至少一个孔。 MEMS芯片设置在基板的表面上，包括第二开口区域和部分地密封第二开口区域的上电极层，其中上电极层和下电极层彼此平行并且具有间隙 之间形成感应电容器。 壳体设置在MEMS芯片或衬底的表面上，从而产生具有MEMS芯片或衬底的空腔。 此外，还提供了一种用于制造上述MEMS声换能器的方法。

公开(公告)号：US20240183735A1

公开(公告)日：2024-06-06

申请号：US18140513

申请日：2023-04-27

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chien-Nan YEH ,  Meng-Chiao TSAI ,  Shih-Ting LIN ,  Chao-Ta HUANG

IPC: G01L19/14 ,  G01L1/16

CPC classification number: G01L19/143 ,  G01L1/16

Abstract: A force sensing apparatus with bridge portion comprises a first case, a second case, and a force sensing module. The first case comprises a first annular portion, a first bridge portion, and an inner wall portion. The first bridge portion is connected to an outer periphery of the first annular portion. The inner wall portion is connected to an inner periphery of the first annular portion. The second case comprises a second annular portion, a second bridge portion, and an outer wall portion. The second bridge portion is connected to an inner periphery of the second annular portion. The outer wall portion is connected to an outer periphery of the second annular portion. A stiffness of the second annular portion along an axial direction is greater than a stiffness of the second bridge portion along the axial direction. The second case is disposed on the first case along the axial direction to form a space. The force sensing module is disposed in the space.

公开(公告)号：US20220187149A1

公开(公告)日：2022-06-16

申请号：US17234263

申请日：2021-04-19

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chien-Nan YEH ,  Pei-Yu CHANG ,  Shih-Ting LIN ,  Chao-Ta HUANG

IPC: G01L3/10 ,  H02K21/22

Abstract: A spindle shaft device including a shaft, a first torque sensor, and a second torque sensor. The shaft extends along an axial direction and comprises a first side portion, a second side portion, and a central portion located between the first side portion and the second side portion. The central portion has a central torsional rigidity with respect to the axial direction. The first side portion has a first torsional rigidity with respect to the axial direction. The second side portion has a second torsional rigidity with respect to the axial direction. The first torsional rigidity is smaller than the central torsional rigidity. The second torsional rigidity is smaller than the central torsional rigidity. The first torque sensor is disposed on the first side portion. The second torque sensor is disposed on the second side portion.