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公开(公告)号:US20170317187A1
公开(公告)日:2017-11-02
申请号:US15528793
申请日:2014-12-23
Applicant: INTEL CORPORATION
Inventor: Sanaz K. GARDNER , Willy RACHMADY , Matthew V. METZ , Gilbert DEWEY , Jack T. KAVALIEROS , Chandra S. MOHAPATRA , Anand S. MURTHY , Nadia RAHHAL-ORABI , Nancy M. ZELICK , Marc C. FRENCH , Tahir GHANI
IPC: H01L29/66 , H01L29/786 , H01L29/423 , H01L29/06 , H01L27/088 , H01L21/8234 , H01L21/02
CPC classification number: H01L29/66742 , B82Y10/00 , H01L21/02392 , H01L21/02546 , H01L21/02603 , H01L21/823412 , H01L27/088 , H01L29/0673 , H01L29/20 , H01L29/42392 , H01L29/66469 , H01L29/66522 , H01L29/66795 , H01L29/775 , H01L29/785 , H01L29/78681 , H01L29/78696
Abstract: An embodiment includes a device comprising: first and second fins adjacent one another and each including channel and subfin layers, the channel layers having bottom surfaces directly contacting upper surfaces of the subfin layers; wherein (a) the bottom surfaces are generally coplanar with one another and are generally flat; (b) the upper surfaces are generally coplanar with one another and are generally flat; and (c) the channel layers include an upper material and the subfin layers include a lower III-V material different from the upper III-V material. Other embodiments are described herein.
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公开(公告)号:US20170323963A1
公开(公告)日:2017-11-09
申请号:US15528802
申请日:2014-12-23
Applicant: INTEL CORPORATION
Inventor: Sanaz K. GARDNER , Willy RACHMADY , Matthew V. METZ , Gilbert DEWEY , Jack T. KAVALIEROS , Chandra S. MOHAPATRA , Anand S. MURTHY , Nadia RAHHAL-ORABI , Nancy M. ZELICK , Tahir GHANI
IPC: H01L29/78 , H01L29/10 , H01L29/205 , H01L29/66
CPC classification number: H01L29/785 , H01L29/1054 , H01L29/205 , H01L29/66795 , H01L29/66818
Abstract: An embodiment includes a device comprising: a fin structure including an upper portion and a lower portion, the upper portion having a bottom surface directly contacting an upper surface of the lower portion; wherein (a) the lower portion is included in a trench having an aspect ratio (depth to width) of at least 2:1; (b) the bottom surface has a bottom maximum width and the upper surface has an upper maximum width that is greater the bottom maximum width; (c) the bottom surface covers a middle portion of the upper surface but does not cover lateral portions of the upper surface; and (d) the upper portion includes an upper III-V material and the lower portion includes a lower III-V material different from the upper III-V material. Other embodiments are described herein.
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