公开(公告)号：US20230176259A1

公开(公告)日：2023-06-08

申请号：US18076590

申请日：2022-12-07

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Tom Nolan ,  Jae Ha Choi ,  Alexander Vassilievich Demtchouk ,  Terry Bluck

IPC: G02B1/14 ,  G02B1/11

CPC classification number: G02B1/14 ,  G02B1/11

Abstract: A protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an antireflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.

公开(公告)号：US20230274920A1

公开(公告)日：2023-08-31

申请号：US18110269

申请日：2023-02-15

Applicant: INTEVAC, INC.

Inventor： Terry Bluck ,  Samuel D. Harkness, IV ,  Tom Nolan

IPC: H01J37/34 ,  H01J37/32

CPC classification number: H01J37/3405 ,  H01J37/3452 ,  H01J37/32761 ,  H01J37/3244 ,  H01J37/32623

Abstract: A linear processing system having an entry loadlock, a first multi-pass processing chamber coupled to the entry loadlock, the first multi-pass processing chamber having a sputtering magnetron arrangement and configured to house a single substrate carrier for performing a multi-pass processing; a single-pass chamber coupled to the first multi-pass processing chamber and having a plurality of magnetron arrangements arranged along a carrier travel direction, the single-pass chamber configured to house multiple carriers arranged serially in a row and configured for a single-pass processing; a second multi-pass processing chamber coupled to the single-pass processing chamber, the second multi-pass processing chamber having a sputtering magnetron arrangement and configured to house a single substrate carrier for performing a multi-pass processing; and an exit loadlock chamber coupled to the second multi-pass processing chamber.

公开(公告)号：US20230176256A1

公开(公告)日：2023-06-08

申请号：US18076644

申请日：2022-12-07

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Tom Nolan ,  Jae Ha Choi ,  Alexander Vassilievich Demtchouk ,  Terry Bluck

IPC: G02B1/115 ,  G02B1/14 ,  B29D11/00

CPC classification number: G02B1/115 ,  B29D11/0073 ,  B29D11/00884 ,  G02B1/14

Abstract: A system and method for fabricating protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an anti-reflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.