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公开(公告)号：US20240258087A1
公开(公告)日：2024-08-01
申请号：US18535774
申请日：2023-12-11
申请人： INTEVAC, INC.
发明人： Samuel D. Harkness, IV , Thomas P. Nolan , Jae Ha Choi , Alexander Vassilievich Demtchouk , Terry Bluck
CPC分类号： H01J37/3452 , C23C14/35 , C23C14/50 , H01J37/3423 , H01J2237/002 , H01J2237/332
摘要： Sputtering system having cylindrical target with sputtering material on exterior surface; magnet arrangement inside the cylindrical target, having first set of magnets arranged on straight row, each having first pole facing interior wall of the target and second pole facing away from the interior wall, second set having plurality of magnets arranged in obround shape around the first set, each magnet having first pole facing away from the interior wall and second pole facing the interior wall; a keeper plate between the first set of magnets and the second set of magnets, such that straight line passing through an axis connecting the first pole and the second pole of a magnet from the second set intercepts the keeper plate prior to reaching the interior wall; and a cover.
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公开(公告)号：US20240191341A1
公开(公告)日：2024-06-13
申请号：US18537523
申请日：2023-12-12
申请人： INTEVAC, INC.
发明人： Samuel D. Harkness, IV , Thomas P. Nolan , Stephen M. Daly , Jae Ha Choi , Zachary Lyons , Jim Sullivan , Mike Anthony , Todd Morimoto
CPC分类号： C23C14/352 , C23C14/50 , C23C14/568
摘要： A plasma chamber for physical vapor deposition, having an anode aperture shield that reduces the field of view to the substrate for deposition particles from the sputtering target. The anode aperture shield limits the deposition particles reaching the substrate to selected maximum angles from the vertical, and rejects particles approaching with a larger angle from the vertical. The node aperture shield is grounded and may be constructed of an upper plate and a lower plate spaced apart from the upper plate, wherein the upper plate may include perforations or may incorporate an electron filter.
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公开(公告)号：US20230176259A1
公开(公告)日：2023-06-08
申请号：US18076590
申请日：2022-12-07
申请人： INTEVAC, INC.
发明人： Samuel D. Harkness, IV , Tom Nolan , Jae Ha Choi , Alexander Vassilievich Demtchouk , Terry Bluck
摘要： A protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an antireflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.
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公开(公告)号：US10955589B2
公开(公告)日：2021-03-23
申请号：US15996323
申请日：2018-06-01
申请人： Intevac, Inc.
发明人： Terry Bluck , Gaurav Saraf , James Craig Hunter , Changwan Hwang , Paul R. Markoff Johnson , Jae Ha Choi
摘要： An optical coating, such as anti-reflective coating (ARC) or colored coating for optical devices, suitable especially for mobile devices. The ARC is made up of alternating layers of low refractive index and high refractive index. At least one of the layers, preferably the top layer, is made up of nano-laminate. The nano-laminate is a structure of alternating nano-layers, each nano-layer made out of a material having refractive index similar to the layer it replaces. Optionally, each of the layers are made up of nano-laminates, such that a layer having low refractive index is made up of nano-laminates of nano-layers having low refractive index, while high index layers are made up of nano-lamonate of nano-layers having high refractive index. Each of the nano-layers is of 2-10 nanometer thickness.
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5.发明公开公开(公告)号：US20240201422A1
公开(公告)日：2024-06-20
申请号：US18391113
申请日：2023-12-20
申请人： INTEVAC, INC.
CPC分类号： G02B1/14 , C23C14/0676 , C23C14/352 , G02B1/11
摘要： A coated article comprising: a transparent substrate and a protective coating comprising: an adhesion layer formed over the substrate; a protective layer formed over the adhesion layer and may have refractive index of from 1.6 to 1.8; and an anti-reflective layer formed over the protective layer, the anti-reflective layer comprises a plurality of sublayers, wherein at least one sublayer has a refractive index higher than index of said protective layer and at least one sublayer has a refractive index lower than the index of said protective layer.
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公开(公告)号：US20230176256A1
公开(公告)日：2023-06-08
申请号：US18076644
申请日：2022-12-07
申请人： INTEVAC, INC.
发明人： Samuel D. Harkness, IV , Tom Nolan , Jae Ha Choi , Alexander Vassilievich Demtchouk , Terry Bluck
CPC分类号： G02B1/115 , B29D11/0073 , B29D11/00884 , G02B1/14
摘要： A system and method for fabricating protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an anti-reflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.
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公开(公告)号：US20180348409A1
公开(公告)日：2018-12-06
申请号：US15996323
申请日：2018-06-01
申请人： Intevac, Inc.
发明人： Terry Bluck , Gaurav Saraf , James Craig Hunter , Changwan Hwang , Paul R. Markoff Johnson , Jae Ha Choi
摘要： An optical coating, such as anti-reflective coating (ARC) or colored coating for optical devices, suitable especially for mobile devices. The ARC is made up of alternating layers of low refractive index and high refractive index. At least one of the layers, preferably the top layer, is made up of nano-laminate. The nano-laminate is a structure of alternating nano-layers, each nano-layer made out of a material having refractive index similar to the layer it replaces. Optionally, each of the layers are made up of nano-laminates, such that a layer having low refractive index is made up of nano-laminates of nano-layers having low refractive index, while high index layers are made up of nano-lamonate of nano-layers having high refractive index. Each of the nano-layers is of 2-10 nanometer thickness.
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