公开(公告)号：US20240258087A1

公开(公告)日：2024-08-01

申请号：US18535774

申请日：2023-12-11

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Thomas P. Nolan ,  Jae Ha Choi ,  Alexander Vassilievich Demtchouk ,  Terry Bluck

IPC: H01J37/34 ,  C23C14/35 ,  C23C14/50

CPC classification number: H01J37/3452 ,  C23C14/35 ,  C23C14/50 ,  H01J37/3423 ,  H01J2237/002 ,  H01J2237/332

Abstract: Sputtering system having cylindrical target with sputtering material on exterior surface; magnet arrangement inside the cylindrical target, having first set of magnets arranged on straight row, each having first pole facing interior wall of the target and second pole facing away from the interior wall, second set having plurality of magnets arranged in obround shape around the first set, each magnet having first pole facing away from the interior wall and second pole facing the interior wall; a keeper plate between the first set of magnets and the second set of magnets, such that straight line passing through an axis connecting the first pole and the second pole of a magnet from the second set intercepts the keeper plate prior to reaching the interior wall; and a cover.

公开(公告)号：US20230176259A1

公开(公告)日：2023-06-08

申请号：US18076590

申请日：2022-12-07

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Tom Nolan ,  Jae Ha Choi ,  Alexander Vassilievich Demtchouk ,  Terry Bluck

IPC: G02B1/14 ,  G02B1/11

CPC classification number: G02B1/14 ,  G02B1/11

Abstract: A protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an antireflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.

公开(公告)号：US20240201422A1

公开(公告)日：2024-06-20

申请号：US18391113

申请日：2023-12-20

Applicant: INTEVAC, INC.

Inventor： Thomas P. Nolan ,  Alexander Vassilievich Demtchouk ,  Samuel D. Harkness, IV ,  Jae Ha Choi

IPC: G02B1/14 ,  C23C14/06 ,  C23C14/35 ,  G02B1/11

CPC classification number: G02B1/14 ,  C23C14/0676 ,  C23C14/352 ,  G02B1/11

Abstract: A coated article comprising: a transparent substrate and a protective coating comprising: an adhesion layer formed over the substrate; a protective layer formed over the adhesion layer and may have refractive index of from 1.6 to 1.8; and an anti-reflective layer formed over the protective layer, the anti-reflective layer comprises a plurality of sublayers, wherein at least one sublayer has a refractive index higher than index of said protective layer and at least one sublayer has a refractive index lower than the index of said protective layer.

公开(公告)号：US20230176256A1

公开(公告)日：2023-06-08

申请号：US18076644

申请日：2022-12-07

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Tom Nolan ,  Jae Ha Choi ,  Alexander Vassilievich Demtchouk ,  Terry Bluck

IPC: G02B1/115 ,  G02B1/14 ,  B29D11/00

CPC classification number: G02B1/115 ,  B29D11/0073 ,  B29D11/00884 ,  G02B1/14

Abstract: A system and method for fabricating protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an anti-reflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.