Resist layer and process for forming resist pattern thereon
    1.
    发明授权
    Resist layer and process for forming resist pattern thereon 失效
    抗蚀剂层及其上形成抗蚀剂图案的工艺

    公开(公告)号:US4842989A

    公开(公告)日:1989-06-27

    申请号:US134060

    申请日:1987-12-17

    CPC分类号: G03F7/039 G03F7/167

    摘要: A resist layer comprising an organic polymer which is formed by subjecting a methacrylate incorporating fluorine and/or an acrylate incorporating fluorine to a glow-discharge plasma polymerization process.Further, a process for forming resist pattern on the resist layer comprising a step of forming the resist layer; a step of forming a latent image by exposing the resist layer to an electron beam; and a step of visualizing the latent image by plasma etching.

    摘要翻译: 包含有机聚合物的抗蚀层,该有机聚合物是通过使含有氟和/或含氟的丙烯酸酯的甲基丙烯酸酯进行辉光放电等离子体聚合过程而形成的。 此外,在抗蚀剂层上形成抗蚀剂图案的方法包括形成抗蚀剂层的步骤; 通过将抗蚀剂层暴露于电子束来形成潜像的步骤; 以及通过等离子体蚀刻使潜像可视化的步骤。

    Photosensitive member composed of amorphous carbon charge transporting
layer and charge generating layer
    3.
    发明授权
    Photosensitive member composed of amorphous carbon charge transporting layer and charge generating layer 失效
    由非晶碳电荷输送层和电荷产生层组成的感光元件

    公开(公告)号:US4939054A

    公开(公告)日:1990-07-03

    申请号:US382015

    申请日:1989-07-18

    IPC分类号: G03G5/082

    摘要: The practice of this invention provides a photosensitive member which comprises a charge transporting layer and a charge generating layer, said charge transporting layer comprising amorphous carbon containing hydrogen, said amorphous carbon comprising hydrogen bonded carbon N.sub.1, and carbon N.sub.2 free from linking with hydrogen, the ratio of the amount of N.sub.1 to that of N.sub.2 being 1:0.1 to 1:1, and said hydrogen being contained in an amount of 20 to 67 atomic %;or said amorphous carbon comprising unsaturated carbon N.sub.3 linked with hydrogen and saturated carbon N.sub.4 linked with hydrogen, the ratio of the amount of N.sub.3 to that of N.sub.4 being 1:1 to 1:16, said hydrogen being contained in an amount of 20 to 67 atomic %;or said amorphous carbon comprising unsaturated compound N.sub.5 free from linking with hydrogen and saturated carbon N.sub.6 free from linking with hydrogen, the ratio of the amount of N.sub.5 to that of N.sub.5 being 1:20 to 1:0.5, said hydrogen being contained in an amount of 20 to 67 atomic %.The photosensitive member obtained thereby is excellent in charge-transporting property and chargeability and, moreover, exhibits advantages in corona resistance and resistances to acids, moisture and heat and also in physical properties such as stiffness.

    摘要翻译: 本发明的实施例提供了一种感光构件,其包括电荷输送层和电荷产生层,所述电荷输送层包含含有无定形碳的氢,所述无定形碳包括氢键合碳N1和不与氢连接的碳N2 N 2的量与N 2的比例为1:0.1〜1:1,所述氢的含量为20〜67原子%。 或包含与氢连接的不饱和碳N3和与氢连接的饱和碳N4的无定形碳,N 3与N 4的比例为1:1至1:16,所述氢的含量为20至67 原子% 或包含不与氢气连接的不饱和化合物N5的无定形碳和不与氢连接的饱和碳N6,N5与N5的量的比例为1:20至1:0.5,所述氢含量为 为20〜67原子%。 由此得到的感光体具有优异的电荷传输性和带电性,此外,具有耐电晕性和耐酸性,水分和热量以及硬度等物理性能的优点。

    Photosensitive member having an amorphous carbon transport layer
    4.
    发明授权
    Photosensitive member having an amorphous carbon transport layer 失效
    具有无定形碳输送层的感光构件

    公开(公告)号:US4738912A

    公开(公告)日:1988-04-19

    申请号:US905540

    申请日:1986-09-10

    IPC分类号: G03G5/082 G03G5/14

    摘要: The present invention provides a photosensitive member comprising a hydrogen-containing carbon layer as a charge transporting layer, which contains an element selected from the group consisting of Si, Ge and Sn; the hydrogen-containing carbon layer facilitates the injection of charge and decreases residual potential, and memory and increases sensitivity. Accordingly, a photosensitive member of the present invention is excellent in charge transporting property, sensitivity, charge holding property and imaged copy can be obtained.

    摘要翻译: 本发明提供了一种感光构件,其包含含氢碳层作为电荷输送层,其含有选自Si,Ge和Sn的元素; 含氢碳层有助于注入电荷并降低残留电位,记忆并提高灵敏度。 因此,本发明的感光体具有优异的电荷传输性,灵敏度,电荷保持性和成像复印性。

    Photosensitive member of plasma polymerized amorphous carbon charge
transporting layer and charge generating layer
    5.
    发明授权
    Photosensitive member of plasma polymerized amorphous carbon charge transporting layer and charge generating layer 失效
    等离子聚合非晶碳电荷输送层和电荷产生层的光敏元件

    公开(公告)号:US4906544A

    公开(公告)日:1990-03-06

    申请号:US395188

    申请日:1989-08-18

    IPC分类号: G03G5/047 G03G5/07

    CPC分类号: G03G5/07 G03G5/047

    摘要: The practice of this invention provides a photosensitive member which comprises a charge generating layer, and a plasma-polymerized layer, wherein said plasma-polymerized layer having an infrared absorption spectrum of a ratio of coefficients of absorptivities attributed to methyl group (--CH.sub.3) to those of methylene group (--CH.sub.2 --), and is a coefficient of absorptivity attributed to methylene group (--CH.sub.2 --) at about 2925 cm.sup.-1. The photosensitive member obtained thereby is excellent in charge-transporting property and chargeability and, moreover, exhibits advantages in corona resistance and resistances to acids, moisture and heat and also in physical properties such as stiffness.

    摘要翻译: 本发明的实施例提供了一种感光构件,其包括电荷产生层和等离子体聚合层,其中所述等离子体聚合层具有红外吸收光谱,该吸收光谱的归属于甲基(-CH 3)的吸光系数与 亚甲基(-CH 2 - )的那些,并且是在约2925cm -1处归因于亚甲基(-CH 2 - )的吸收系数。 由此得到的感光体具有优异的电荷传输性和带电性,此外,具有耐电晕性和耐酸性,水分和热量以及硬度等物理性能的优点。

    Photosensitive member comprising charge generating layer and charge
transporting layer
    7.
    发明授权
    Photosensitive member comprising charge generating layer and charge transporting layer 失效
    感光构件包括电荷产生层和电荷输送层

    公开(公告)号:US4868076A

    公开(公告)日:1989-09-19

    申请号:US101286

    申请日:1987-09-25

    IPC分类号: G03G5/043 G03G5/082

    摘要: A photosensitive member of the present invention comprises an electrically conductive substrate, a hydrogenated and/or halogenated amorphous silicon:germanium charge generating layer and a hydrogen-containing amorphous carbon charge transporting layer which contains oxygen and/or nitrogen. The charge generating layer may further contain various elements such as boron or phosphorus, oxygen, nitrogen and carbon as a chemical modifier.

    摘要翻译: 本发明的感光构件包括导电衬底,氢化和/或卤化非晶硅:锗电荷产生层和含有氧和/或氮的含氢无定形碳电荷输送层。 电荷产生层还可以含有各种元素如硼或磷,氧,氮和碳作为化学改性剂。

    Photosensitive member having an overcoat layer and process for
manufacturing the same
    10.
    发明授权
    Photosensitive member having an overcoat layer and process for manufacturing the same 失效
    具有外涂层的感光构件及其制造方法

    公开(公告)号:US4965156A

    公开(公告)日:1990-10-23

    申请号:US318328

    申请日:1989-03-03

    IPC分类号: G03G5/043 G03G5/082 G03G5/147

    摘要: The disclosure discloses a photosensitive member comprising an electrically conductive substrate, an organic photoconductive layer comprising an organic material as a matrix, and an overcoat layer comprising an amorphous carbon as a matrix and formed on said organic photoconductive layer. Said overcoat layer comprises a first overcoat layer containing fluorine atoms in an amount of about 5 atomic % or more and a second overcoat layer formed on said first overcoat layer and containing fluorine atoms in an amount of less than about 5 atomic %. Said overcoat layer has a thickness of about 0.01 to about 4.0 microns and said second overcoat layer has a thickness of about 10 to about 400 angstroms.The disclosure also discloses a process for manufacturing the above-mentioned photosensitive member.

    摘要翻译: 本公开公开了一种感光构件,其包括导电基底,包含作为基质的有机材料的有机光电导层和包含无定形碳作为基质并形成在所述有机光电导层上的外涂层。 所述外涂层包含含有约5原子%以上的氟原子的第一外涂层和形成在所述第一外涂层上并含有少于约5原子%的量的氟原子的第二外涂层。 所述外涂层的厚度为约0.01至约4.0微米,所述第二外涂层的厚度为约10至约400埃。 本公开还公开了制造上述感光构件的方法。