High Speed Autofocus Interferometric Inspection Systems And Methods
    1.
    发明申请
    High Speed Autofocus Interferometric Inspection Systems And Methods 有权
    高速自动对焦干涉检测系统及方法

    公开(公告)号:US20120033198A1

    公开(公告)日:2012-02-09

    申请号:US13203752

    申请日:2010-01-26

    IPC分类号: G01L1/24

    摘要: High speed autofocus interferometric inspection systems and methods are discussed in this application. In accordance with some embodiments, an inspection system can generally include a laser module, an interferometer module, and a system controller. The laser can produce laser pulses to excite a device such as a silicon wafer, chip capacitor or chip packaged/silicon die containing a plurality of solder bumps into vibration. The interferometer module can be disposed to receive reflected laser energy from the device to sense vibration displacements created in the device with the laser pulses. The system controller to receive vibration data from the interferometer, the system controller configured to output a control signal for adjusting a relative distance and position between the laser module and the device. Other aspects, features, and embodiments are also claimed and discussed.

    摘要翻译: 本应用中讨论了高速自动对焦干涉检测系统和方法。 根据一些实施例,检查系统通常可以包括激光模块,干涉仪模块和系统控制器。 激光器可以产生激光脉冲以激发诸如硅晶片,芯片电容器或包含多个焊料凸块的芯片封装/硅晶片的器件振动。 干涉仪模块可以设置成从装置接收反射的激光能量,以用激光脉冲感测在装置中产生的振动位移。 所述系统控制器从所述干涉仪接收振动数据,所述系统控制器被配置为输出用于调整所述激光模块和所述装置之间的相对距离和位置的控制信号。 还要求和讨论其他方面,特征和实施例。

    High speed autofocus interferometric inspection systems and methods
    2.
    发明授权
    High speed autofocus interferometric inspection systems and methods 有权
    高速自动对焦干涉检测系统及方法

    公开(公告)号:US08760665B2

    公开(公告)日:2014-06-24

    申请号:US13203752

    申请日:2010-01-26

    IPC分类号: G01B11/02

    摘要: High speed autofocus interferometric inspection systems and methods are discussed in this Application. In accordance with some embodiments, an inspection system can generally include a laser module, an interferometer module, and a system controller. The laser can produce laser pulses to excite a device such as a silicon wafer, chip capacitor or chip packaged/silicon die containing a plurality of solder bumps into vibration. The interferometer module can be disposed to receive reflected laser energy from the device to sense vibration displacements created in the device with the laser pulses. The system controller to receive vibration data from the interferometer, the system controller configured to output a control signal for adjusting a relative distance and position between the laser module and the device. Other aspects, features, and embodiments are also claimed and discussed.

    摘要翻译: 本申请中讨论了高速自动对焦干涉检查系统和方法。 根据一些实施例,检查系统通常可以包括激光模块,干涉仪模块和系统控制器。 激光器可以产生激光脉冲以激发诸如硅晶片,芯片电容器或包含多个焊料凸块的芯片封装/硅晶片的器件振动。 干涉仪模块可以设置成从装置接收反射的激光能量,以用激光脉冲感测在装置中产生的振动位移。 所述系统控制器从所述干涉仪接收振动数据,所述系统控制器被配置为输出用于调整所述激光模块和所述装置之间的相对距离和位置的控制信号。 还要求和讨论其他方面,特征和实施例。

    Non-contact microelectronic device inspection systems and methods
    3.
    发明授权
    Non-contact microelectronic device inspection systems and methods 有权
    非接触式微电子器件检测系统及方法

    公开(公告)号:US08661905B2

    公开(公告)日:2014-03-04

    申请号:US12942047

    申请日:2010-11-09

    IPC分类号: G01N29/04

    摘要: Non-contact microelectronic device inspection systems and methods are discussed and provided. Some embodiments include a method of generating a virtual reference device (or chip). This approach uses a statistics to find devices in a sample set that are most similar and then averages their time domain signals to generate the virtual reference. Signals associated with the virtual reference can then be correlated with time domain signals obtained from the packages under inspection to obtain a quality signature. Defective and non-defective devices are separated by estimating a beta distribution that fits a quality signature histogram of inspected packages and determining a cutoff threshold for an acceptable quality signature. Other aspects, features, and embodiments are also claimed and described.

    摘要翻译: 讨论和提供非接触式微电子器件检查系统和方法。 一些实施例包括生成虚拟参考设备(或芯片)的方法。 该方法使用统计信息来查找最相似的样本集中的设备,然后对其时域信号进行平均以生成虚拟参考。 然后可以将与虚拟参考相关联的信号与从被检查的包获得的时域信号相关以获得质量签名。 通过估计匹配检查包的质量签名直方图的β分布并确定可接受的质量签名的截止阈值来分离有缺陷和无缺陷的设备。 还要求和描述其它方面,特征和实施例。

    METHODS AND SYSTEMS FOR CLASSIFYING THE TYPE AND SEVERITY OF DEFECTS IN WELDS
    4.
    发明申请
    METHODS AND SYSTEMS FOR CLASSIFYING THE TYPE AND SEVERITY OF DEFECTS IN WELDS 有权
    分类方法和系统的缺陷类型和严重程度在WELDS

    公开(公告)号:US20110023610A1

    公开(公告)日:2011-02-03

    申请号:US12534581

    申请日:2009-08-03

    IPC分类号: G01N29/024

    摘要: A method for determining the type of a defect in a weld may include determining a defect location and a corresponding defect signal by analyzing ultrasonic response signals collected from a plurality of measurement locations along the weld. The defect signal and the plurality of defect proximity signals corresponding to ultrasonic response signals from measurement locations on each side of the defect location may then be input into a trained artificial neural network. The trained artificial neural network may be operable to identify the type of the defect located at the defect location based on the defect signal and the plurality of defect proximity signals and output the type of the defect located at the defect location. The trained artificial neural network may also be operable to determine a defect severity classification based on the defect signal and the plurality of defect proximity signals and output the severity classification.

    摘要翻译: 用于确定焊缝中的缺陷类型的方法可以包括通过分析从沿着焊缝的多个测量位置收集的超声响应信号来确定缺陷位置和对应的缺陷信号。 然后可以将缺陷信号和对应于来自缺陷位置每侧的测量位置的超声波响应信号的多个缺陷接近信号输入到经过训练的人造神经网络中。 经训练的人造神经网络可以用于基于缺陷信号和多个缺陷接近信号来识别位于缺陷位置处的缺陷的类型,并输出位于缺陷位置处的缺陷的类型。 经训练的人造神经网络还可以用于基于缺陷信号和多个缺陷接近信号来确定缺陷严重性分类,并输出严重性分类。

    Inspection systems and methods
    5.
    发明授权
    Inspection systems and methods 失效
    检验系统和方法

    公开(公告)号:US07492449B2

    公开(公告)日:2009-02-17

    申请号:US11086473

    申请日:2005-03-22

    IPC分类号: G01N21/00

    CPC分类号: G01N21/95684 G01N21/95607

    摘要: Embodiments of inspection systems and methods are disclosed. One embodiment of an inspection system, among others, comprises logic configured to receive a reference signal and a target signal, the reference signal having first surface displacement information and the target signal having second surface displacement information, said logic configured to determine a correlation coefficient between the first surface displacement information and the second surface displacement information, the correlation coefficient indicating whether an inspected object exhibits a defect.

    摘要翻译: 公开了检查系统和方法的实施例。 检查系统的一个实施例包括被配置为接收参考信号和目标信号的逻辑,参考信号具有第一表面位移信息,并且目标信号具有第二表面位移信息,所述逻辑被配置为确定 第一表面位移信息和第二表面位移信息,指示被检查物体是否表现出缺陷的相关系数。

    Weld analysis using laser generated narrowband Lamb waves
    6.
    发明授权
    Weld analysis using laser generated narrowband Lamb waves 有权
    使用激光产生的窄带兰姆波焊接分析

    公开(公告)号:US09201046B2

    公开(公告)日:2015-12-01

    申请号:US13883304

    申请日:2011-08-30

    摘要: A system and method for measuring various weld characteristics is presented. The system and method can comprise a means to measure penetration depth of butt welds in thin plates, for example, using laser generated ultrasounds. Superimposed line sources (SLS) can be used to generate narrowband ultrasounds. A signal processing procedure that combines wavenumber-frequency (k-ω) domain filtering and synthetic phase tuning (SPT) is used to reduce the complexity of Lamb wave signals. The reflection coefficients for different wavelengths corresponding to each wave mode can be calculated. Regression analysis that can include stepwise regression and corrected Akaike's information criterion (AIC) can be performed to build prediction models that use the reflection coefficients as predictors.

    摘要翻译: 提出了一种用于测量各种焊接特性的系统和方法。 该系统和方法可以包括测量薄板中对接焊缝的穿透深度的方法,例如使用激光产生的超声波。 叠加线源(SLS)可用于生成窄带超声波。 使用组合波数 - 频率(k-ω)域滤波和合成相位调谐(SPT)的信号处理过程来降低Lamb波信号的复杂度。 可以计算对应于每个波模式的不同波长的反射系数。 可以执行包括逐步回归和校正的Akaike信息准则(AIC)的回归分析,以构建使用反射系数作为预测因子的预测模型。

    Methods and systems for classifying the type and severity of defects in welds
    7.
    发明授权
    Methods and systems for classifying the type and severity of defects in welds 有权
    用于分类焊缝缺陷类型和严重程度的方法和系统

    公开(公告)号:US08146429B2

    公开(公告)日:2012-04-03

    申请号:US12534581

    申请日:2009-08-03

    IPC分类号: G01N29/04

    摘要: A method for determining the type of a defect in a weld may include determining a defect location and a corresponding defect signal by analyzing ultrasonic response signals collected from a plurality of measurement locations along the weld. The defect signal and the plurality of defect proximity signals corresponding to ultrasonic response signals from measurement locations on each side of the defect location may then be input into a trained artificial neural network. The trained artificial neural network may be operable to identify the type of the defect located at the defect location based on the defect signal and the plurality of defect proximity signals and output the type of the defect located at the defect location. The trained artificial neural network may also be operable to determine a defect severity classification based on the defect signal and the plurality of defect proximity signals and output the severity classification.

    摘要翻译: 用于确定焊缝中的缺陷类型的方法可以包括通过分析从沿着焊缝的多个测量位置收集的超声响应信号来确定缺陷位置和对应的缺陷信号。 然后可以将缺陷信号和对应于来自缺陷位置每侧的测量位置的超声波响应信号的多个缺陷接近信号输入到经过训练的人造神经网络中。 经训练的人造神经网络可以用于基于缺陷信号和多个缺陷接近信号来识别位于缺陷位置处的缺陷的类型,并输出位于缺陷位置处的缺陷的类型。 经训练的人造神经网络还可以用于基于缺陷信号和多个缺陷接近信号来确定缺陷严重性分类,并输出严重性分类。

    Object inspection method and system
    8.
    发明授权
    Object inspection method and system 失效
    对象检查方法和系统

    公开(公告)号:US06747268B1

    公开(公告)日:2004-06-08

    申请号:US09541571

    申请日:2000-04-03

    IPC分类号: G01J104

    摘要: The present disclosure relates to an object inspection system. The object inspection system comprises an ultrasound source capable of exciting the object to be tested with a stimulus such that the object vibrates at an ultrasound frequency, at least one optical fiber optically connected to the ultrasound source and adapted to be positioned with its exit end in close proximity to a surface of the object to be tested to deliver the stimulus to the object, a vibration sensing device adapted to sense the ultrasonic vibration displacements created in the object by the ultrasound source, and a system controller which receives the ultrasonic vibration data from the vibration sensing device. In a preferred arrangement, the object inspection system comprises a solder joint inspection system for testing the integrity of solder joints used to connect a computer chip to a printed circuit board.

    摘要翻译: 本公开涉及一种物体检查系统。 物体检查系统包括能够以刺激使得物体以超声频率振动的激励物体的超声源,至少一个光学连接到超声波源的光纤,并适于将其出口端定位在 靠近要测试的物体的表面以将刺激传递到物体;适于感测由超声波源在物体中产生的超声波振动位移的振动感测装置,以及从超声波源接收超声波振动数据的系统控制器 振动传感装置。 在优选的布置中,物体检查系统包括焊接检查系统,用于测试用于将计算机芯片连接到印刷电路板的焊接点的完整性。

    WELD ANALYSIS USING LASER GENERATED NARROWBAND LAMB WAVES
    9.
    发明申请
    WELD ANALYSIS USING LASER GENERATED NARROWBAND LAMB WAVES 有权
    使用激光生成的窄带波束的焊接分析

    公开(公告)号:US20140172399A1

    公开(公告)日:2014-06-19

    申请号:US13883304

    申请日:2011-08-30

    IPC分类号: G01N29/04

    摘要: A system and method for measuring various weld characteristics is presented. The system and method can comprise a means to measure penetration depth of butt welds in thin plates, for example, using laser generated ultrasounds. Superimposed line sources (SLS) can be used to generate narrowband ultrasounds. A signal processing procedure that combines wavenumber-frequency (k-ω) domain filtering and synthetic phase tuning (SPT) is used to reduce the complexity of Lamb wave signals. The reflection coefficients for different wavelengths corresponding to each wave mode can be calculated. Regression analysis that can include stepwise regression and corrected Akaike's information criterion (AIC) can be performed to build prediction models that use the reflection coefficients as predictors.

    摘要翻译: 提出了一种用于测量各种焊接特性的系统和方法。 该系统和方法可以包括测量薄板中对接焊缝的穿透深度的方法,例如使用激光产生的超声波。 叠加线源(SLS)可用于生成窄带超声波。 使用组合波数 - 频率(k-ω)域滤波和合成相位调谐(SPT)的信号处理过程来降低Lamb波信号的复杂度。 可以计算对应于每个波模式的不同波长的反射系数。 可以执行包括逐步回归和校正的Akaike信息准则(AIC)的回归分析,以构建使用反射系数作为预测因子的预测模型。

    Methods and systems for detecting defects in welded structures
    10.
    发明授权
    Methods and systems for detecting defects in welded structures 有权
    用于检测焊接结构缺陷的方法和系统

    公开(公告)号:US08297122B2

    公开(公告)日:2012-10-30

    申请号:US12488396

    申请日:2009-06-19

    IPC分类号: G01N29/04

    摘要: A method for processing ultrasonic response signals collected from a plurality of measurement locations along a weld of a test sample to determine the presence of defects in the weld may include filtering an ultrasonic response signal from each measurement location to produce a plurality of filtered response signals for each measurement location, wherein each filtered response signal corresponds to specific types of defects. Thereafter, a plurality of energy distributions may be calculated for the weld based on the plurality of filtered response signals for each measurement location. The plurality of energy distributions may be compared to corresponding baseline energy distributions to determine the presence of defects in the weld.

    摘要翻译: 一种用于处理从沿着测试样品的焊缝的多个测量位置收集的超声波响应信号以确定焊缝中缺陷的存在的方法可以包括从每个测量位置过滤超声波响应信号以产生多个经滤波的响应信号 每个测量位置,其中每个滤波的响应信号对应于特定类型的缺陷。 此后,可以基于针对每个测量位置的多个滤波响应信号来计算焊接的多个能量分布。 可以将多个能量分布与相应的基线能量分布进行比较,以确定焊缝中缺陷的存在。