摘要:
High speed autofocus interferometric inspection systems and methods are discussed in this application. In accordance with some embodiments, an inspection system can generally include a laser module, an interferometer module, and a system controller. The laser can produce laser pulses to excite a device such as a silicon wafer, chip capacitor or chip packaged/silicon die containing a plurality of solder bumps into vibration. The interferometer module can be disposed to receive reflected laser energy from the device to sense vibration displacements created in the device with the laser pulses. The system controller to receive vibration data from the interferometer, the system controller configured to output a control signal for adjusting a relative distance and position between the laser module and the device. Other aspects, features, and embodiments are also claimed and discussed.
摘要:
High speed autofocus interferometric inspection systems and methods are discussed in this Application. In accordance with some embodiments, an inspection system can generally include a laser module, an interferometer module, and a system controller. The laser can produce laser pulses to excite a device such as a silicon wafer, chip capacitor or chip packaged/silicon die containing a plurality of solder bumps into vibration. The interferometer module can be disposed to receive reflected laser energy from the device to sense vibration displacements created in the device with the laser pulses. The system controller to receive vibration data from the interferometer, the system controller configured to output a control signal for adjusting a relative distance and position between the laser module and the device. Other aspects, features, and embodiments are also claimed and discussed.
摘要:
Non-contact microelectronic device inspection systems and methods are discussed and provided. Some embodiments include a method of generating a virtual reference device (or chip). This approach uses a statistics to find devices in a sample set that are most similar and then averages their time domain signals to generate the virtual reference. Signals associated with the virtual reference can then be correlated with time domain signals obtained from the packages under inspection to obtain a quality signature. Defective and non-defective devices are separated by estimating a beta distribution that fits a quality signature histogram of inspected packages and determining a cutoff threshold for an acceptable quality signature. Other aspects, features, and embodiments are also claimed and described.
摘要:
A method for determining the type of a defect in a weld may include determining a defect location and a corresponding defect signal by analyzing ultrasonic response signals collected from a plurality of measurement locations along the weld. The defect signal and the plurality of defect proximity signals corresponding to ultrasonic response signals from measurement locations on each side of the defect location may then be input into a trained artificial neural network. The trained artificial neural network may be operable to identify the type of the defect located at the defect location based on the defect signal and the plurality of defect proximity signals and output the type of the defect located at the defect location. The trained artificial neural network may also be operable to determine a defect severity classification based on the defect signal and the plurality of defect proximity signals and output the severity classification.
摘要:
Embodiments of inspection systems and methods are disclosed. One embodiment of an inspection system, among others, comprises logic configured to receive a reference signal and a target signal, the reference signal having first surface displacement information and the target signal having second surface displacement information, said logic configured to determine a correlation coefficient between the first surface displacement information and the second surface displacement information, the correlation coefficient indicating whether an inspected object exhibits a defect.
摘要:
A system and method for measuring various weld characteristics is presented. The system and method can comprise a means to measure penetration depth of butt welds in thin plates, for example, using laser generated ultrasounds. Superimposed line sources (SLS) can be used to generate narrowband ultrasounds. A signal processing procedure that combines wavenumber-frequency (k-ω) domain filtering and synthetic phase tuning (SPT) is used to reduce the complexity of Lamb wave signals. The reflection coefficients for different wavelengths corresponding to each wave mode can be calculated. Regression analysis that can include stepwise regression and corrected Akaike's information criterion (AIC) can be performed to build prediction models that use the reflection coefficients as predictors.
摘要:
A method for determining the type of a defect in a weld may include determining a defect location and a corresponding defect signal by analyzing ultrasonic response signals collected from a plurality of measurement locations along the weld. The defect signal and the plurality of defect proximity signals corresponding to ultrasonic response signals from measurement locations on each side of the defect location may then be input into a trained artificial neural network. The trained artificial neural network may be operable to identify the type of the defect located at the defect location based on the defect signal and the plurality of defect proximity signals and output the type of the defect located at the defect location. The trained artificial neural network may also be operable to determine a defect severity classification based on the defect signal and the plurality of defect proximity signals and output the severity classification.
摘要:
The present disclosure relates to an object inspection system. The object inspection system comprises an ultrasound source capable of exciting the object to be tested with a stimulus such that the object vibrates at an ultrasound frequency, at least one optical fiber optically connected to the ultrasound source and adapted to be positioned with its exit end in close proximity to a surface of the object to be tested to deliver the stimulus to the object, a vibration sensing device adapted to sense the ultrasonic vibration displacements created in the object by the ultrasound source, and a system controller which receives the ultrasonic vibration data from the vibration sensing device. In a preferred arrangement, the object inspection system comprises a solder joint inspection system for testing the integrity of solder joints used to connect a computer chip to a printed circuit board.
摘要:
A system and method for measuring various weld characteristics is presented. The system and method can comprise a means to measure penetration depth of butt welds in thin plates, for example, using laser generated ultrasounds. Superimposed line sources (SLS) can be used to generate narrowband ultrasounds. A signal processing procedure that combines wavenumber-frequency (k-ω) domain filtering and synthetic phase tuning (SPT) is used to reduce the complexity of Lamb wave signals. The reflection coefficients for different wavelengths corresponding to each wave mode can be calculated. Regression analysis that can include stepwise regression and corrected Akaike's information criterion (AIC) can be performed to build prediction models that use the reflection coefficients as predictors.
摘要:
A method for processing ultrasonic response signals collected from a plurality of measurement locations along a weld of a test sample to determine the presence of defects in the weld may include filtering an ultrasonic response signal from each measurement location to produce a plurality of filtered response signals for each measurement location, wherein each filtered response signal corresponds to specific types of defects. Thereafter, a plurality of energy distributions may be calculated for the weld based on the plurality of filtered response signals for each measurement location. The plurality of energy distributions may be compared to corresponding baseline energy distributions to determine the presence of defects in the weld.