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公开(公告)号：US4677416A
公开(公告)日：1987-06-30
申请号：US801173
申请日：1985-11-22
申请人： Ikuo Nishimoto , Shoji Kamiunten , Takaaki Kuroiwa
发明人： Ikuo Nishimoto , Shoji Kamiunten , Takaaki Kuroiwa
摘要： An integrated circuit cooling device and a dew point hygrometer employing such a cooling device having a substrate with a peripheral region surrounding a central aperture, the substrate being overlaid by an insulating layer with a Peltier cooling device formed thereon. The Peltier device includes a plurality of alternate metallic segments of dissimilar metals arranged and joined to form first and second groups of corresponding junctions of which the first group is located over the peripheral region of the substrate and the second group is located over the central aperture.
摘要翻译： 采用这种冷却装置的集成电路冷却装置和露点湿度计，其具有围绕中心孔的周边区域的基板，所述基板由形成在其上的珀耳帖冷却装置的绝缘层覆盖。 珀尔帖装置包括多个不同金属的交替金属段，其布置和连接以形成第一组和第二组对应结，其中第一组位于衬底的周边区域上方，第二组位于中心孔的上方。
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公开(公告)号：US5020373A
公开(公告)日：1991-06-04
申请号：US446415
申请日：1989-12-05
申请人： Shoji Kamiunten , Tetsuo Hisanaga
发明人： Shoji Kamiunten , Tetsuo Hisanaga
CPC分类号： G01F1/3209 , G01F1/6842 , G01F7/00
摘要： This flow meter uses two known flow responsive techniques and combines them in a unique structure and system to form an improved flow meter whose range extends from low to high flow rates. The meter comprises a flow tube with a region of reduced diameter between its inlet and outlet. A microbridge flow sensor of a suitable type known in the art, which responds to thermal changes caused by changes in the flow rate, is located in the region of reduced diameter. A post downstream of the microbridge sensor creates Karman vortices whose frequencies are a function of flow rate and which are detected through ports in the tube by a suitable detector. The output of the microbridge is linear from low flow rates to a mid range and the Karman flow meter output is linear from the mid range to high flow rates. A correction factor is applied to the thermal flow meter output. The correction factor is determined by a ratio of the Karman flow meter output to the thermal output for a flow rate in the mid range, allowing a smooth transition from thermal to Karman outputs and vice versa in the mid range.
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公开(公告)号：US5291781A
公开(公告)日：1994-03-08
申请号：US59890
申请日：1993-05-10
CPC分类号： G01F1/6845
摘要： A diaphragm-type sensor is disclosed which comprises a substrate including a cavity, a diaphragm formed on the cavity and supported by the substrate, a heater element arranged on the diaphragm, two sensor elements arranged on both sides of the heater means and slits between the heater means and the respective sensor means. The slits are effective in completely preventing the deformation of the diaphragm due to a heat propagated from the heater element, from influencing the sensor elements, whereby the diaphragm-type sensor exhibits stable output characteristics.
摘要翻译： 公开了一种隔膜式传感器，其包括：基板，包括腔体，形成在腔体上并由基板支撑的隔膜;布置在隔膜上的加热器元件;布置在加热器装置两侧的两个传感器元件; 加热器装置和相应的传感器装置。 狭缝有效地完全防止由加热器元件传播的热量引起的隔膜的变形，从而影响传感器元件，由此膜片式传感器表现出稳定的输出特性。
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公开(公告)号：US5014552A
公开(公告)日：1991-05-14
申请号：US446375
申请日：1989-12-05
CPC分类号： G01F1/6842
摘要： A flow sensor comprising a flow passage, a rectifying element such as a plurality of screens or a honeycomb structure or both, arranged in the flow passage, a flow passage reducer for reducing the flow passage behind the rectifying element, and a thermal flow sensor, such as for example a micro bridge sensor, mounted at a location immediately behind the reducer. The above structure can largely reduce disturbance in flow to thereby enable highly accurate measurements of a wide range of flow without a low pass filter.
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公开(公告)号：US07752909B2
公开(公告)日：2010-07-13
申请号：US11662121
申请日：2005-08-30
申请人： Shoji Kamiunten , Seishi Nakano
发明人： Shoji Kamiunten , Seishi Nakano
IPC分类号： G01F1/68
CPC分类号： G01F1/6884 , G01F1/6847 , G01F1/696
摘要： A flow sensor may include a heater for heating a partial region of the outer wall surface of a pipe forming a flow path or for heating a particular region in the pipe; and a temperature detector for measuring the temperatures of regions, the regions being on the upstream side and the downstream side of the pipe with respect to the heated region. The temperature detector may include an upstream-side non-contact temperature detector and a downstream-side non-contact temperature detector arranged near the outer wall surface of the pipe in a state of being not in contact with the outer wall surface, and the non-contact temperature detectors can measure the temperatures of the upstream-side heat energy radiating region and downstream-side heat energy radiating region in a state of being not in contact with the outer wall surface of the pipe.
摘要翻译： 流量传感器可以包括用于加热形成流路的管的外壁表面的部分区域或用于加热管道中的特定区域的加热器; 以及温度检测器，用于测量相对于加热区域在管的上游侧和下游侧的区域的温度。 温度检测器可以包括在不与外壁表面接触的状态下布置在管的外壁表面附近的上游侧非接触式温度检测器和下游侧非接触式温度检测器， - 接触式温度检测器可以在不与管的外壁表面接触的状态下测量上游侧热能辐射区域和下游侧热能辐射区域的温度。
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公开(公告)号：US20090078041A1
公开(公告)日：2009-03-26
申请号：US12191924
申请日：2008-08-14
申请人： Shinichi Ike , Shoji Kamiunten , Junji Kumasa
发明人： Shinichi Ike , Shoji Kamiunten , Junji Kumasa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： A flow sensor may be formed of a sensor chip in which a flow rate detecting section is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper surface of a substrate and may also include a flow path forming member which is provided on the sensor chip and has a flow path of a fluid flowing through the flow rate detecting section formed therein.
摘要翻译： 流量传感器可以由传感器芯片形成，其中在用于覆盖形成在基板的上表面上的凹部的至少一部分上的电绝缘膜上形成有流量检测部，并且还可以包括流路 形成构件，其设置在所述传感器芯片上，并且具有流过所述流量检测部的流体的流路。
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公开(公告)号：US06981410B2
公开(公告)日：2006-01-03
申请号：US10434563
申请日：2003-05-09
申请人： Koji Seki , Nobuhiko Zushi , Shinichi Ike , Seishi Nakano , Tarou Nakata , Shoji Kamiunten
发明人： Koji Seki , Nobuhiko Zushi , Shinichi Ike , Seishi Nakano , Tarou Nakata , Shoji Kamiunten
IPC分类号： G01F1/68
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/6847
摘要： A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.
摘要翻译： 流量传感器包括基板，电绝缘膜和流速检测机构。 在基板中，与测量对象流体接触的第一表面的膜片部分和围绕隔膜部分的厚的固定部分一体地形成。 电绝缘膜形成在隔膜部分的与第一表面相对的一侧的第二表面上。 流速检测机构设置在电绝缘膜上。 还公开了一种制造流量传感器的方法。
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公开(公告)号：US5081866A
公开(公告)日：1992-01-21
申请号：US530237
申请日：1990-05-30
申请人： Koichi Ochiai , Shigeru Aoshima , Shoji Kamiunten
发明人： Koichi Ochiai , Shigeru Aoshima , Shoji Kamiunten
CPC分类号： A61B5/0878 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F15/00
摘要： A respiratory air flowmeter includes a flow path forming member, a restricting portion, rectifying lattices, and a sensor. The flow path forming member forms a flow path in which respiratory air flows. The restricting portion and the rectifying lattices are arranged in the flow path in order to stabilize a respiratory air flow. The sensor is mounted in a sensor mounting portion of the flow path forming member, and detects a flow rate of respiratory air flowing in the flow path.
摘要翻译： 呼吸用空气流量计包括流路形成部件，限制部，精整格栅和传感器。 流路形成构件形成呼吸空气流动的流路。 限制部分和整流格架布置在流动路径中，以便稳定呼吸气流。 传感器安装在流路形成构件的传感器安装部分中，并且检测在流路中流动的呼吸空气的流量。
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公开(公告)号：US20080196493A1
公开(公告)日：2008-08-21
申请号：US12070303
申请日：2008-02-14
申请人： Masanori Anzai , Shoji Kamiunten
发明人： Masanori Anzai , Shoji Kamiunten
IPC分类号： G01F1/68
CPC分类号： G01F1/72 , G01F1/6842 , G01F5/00 , G05D7/0635
摘要： A simply structured flowmeter in which an influence of a dilatational wave on a thermal flow rate sensor is suppressed, and measurement accuracy is enhanced.The flowmeter has not only the thermal flow rate sensor that is placed to face a flow channel and detects a flow rate of fluid flowing through the flow channel but also a micro path (for example, narrow pipe) that is provided to the flow channel and blocks a dilatational wave created in the flow channel from being transmitted to the thermal flow rate sensor.
摘要翻译： 简单结构化的流量计，其中抑制了热流量传感器的膨胀波的影响，提高了测量精度。 流量计不仅具有面对流路的热流量传感器，而且检测流过流路的流体的流量，而且还设置在流路上的微流路（例如窄管） 阻止在流动通道中产生的膨胀波被传递到热流速传感器。
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公开(公告)号：US07117736B2
公开(公告)日：2006-10-10
申请号：US10399350
申请日：2001-10-17
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/6847 , G01F1/692
摘要： A flow sensor (1) is constituted by a substrate (4) having a front surface (4a) side facing a channel (3) for a measurement target fluid (2), and a channel forming member (5) and a plate (6) disposed oppositely across the substrate (4). The substrate (4) is formed of stainless steel having a thickness of about 50 μm to 150 μm into a plate. An electric insulating film is formed on that surface (4b) of the substrate (4) which is opposite to the channel (3) side, and a temperature detection sensor (7) for measuring the flow velocity (flow rate) of the fluid (2), an ambient temperature sensor (8), an electrode pad (9), and a thin metal film (10) for wiring are formed on it.
摘要翻译： 流量传感器（1）由具有面向测量目标流体（2）的通道（3）的前表面（4a）侧的基板（4）和通道形成部件（5）和板（ 6）相对设置在衬底（4）上。 基板（4）由厚度约50μm〜150μm的不锈钢制成板。 在与通道（3）侧相反的基板（4）的表面（4b）上形成电绝缘膜，以及用于测量流体（3）的流速（流量）的温度检测传感器 （2），在其上形成环境温度传感器（8），电极焊盘（9）和用于布线的金属薄膜（10）。
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