公开(公告)号：US07117736B2

公开(公告)日：2006-10-10

申请号：US10399350

申请日：2001-10-17

申请人： Shoji Kamiunten ,  Yoshiyuki Ishikura ,  Shinichi Ike ,  Seiichiro Kinugasa ,  Hideyuki Tanaka

发明人： Shoji Kamiunten ,  Yoshiyuki Ishikura ,  Shinichi Ike ,  Seiichiro Kinugasa ,  Hideyuki Tanaka

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/6847 ,  G01F1/692

摘要： A flow sensor (1) is constituted by a substrate (4) having a front surface (4a) side facing a channel (3) for a measurement target fluid (2), and a channel forming member (5) and a plate (6) disposed oppositely across the substrate (4). The substrate (4) is formed of stainless steel having a thickness of about 50 μm to 150 μm into a plate. An electric insulating film is formed on that surface (4b) of the substrate (4) which is opposite to the channel (3) side, and a temperature detection sensor (7) for measuring the flow velocity (flow rate) of the fluid (2), an ambient temperature sensor (8), an electrode pad (9), and a thin metal film (10) for wiring are formed on it.

摘要翻译： 流量传感器（1）由具有面向测量目标流体（2）的通道（3）的前表面（4a）侧的基板（4）和通道形成部件（5）和板（ 6）相对设置在衬底（4）上。 基板（4）由厚度约50μm〜150μm的不锈钢制成板。 在与通道（3）侧相反的基板（4）的表面（4b）上形成电绝缘膜，以及用于测量流体（3）的流速（流量）的温度检测传感器 （2），在其上形成环境温度传感器（8），电极焊盘（9）和用于布线的金属薄膜（10）。

公开(公告)号：US20090078041A1

公开(公告)日：2009-03-26

申请号：US12191924

申请日：2008-08-14

申请人： Shinichi Ike ,  Shoji Kamiunten ,  Junji Kumasa

发明人： Shinichi Ike ,  Shoji Kamiunten ,  Junji Kumasa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845

摘要： A flow sensor may be formed of a sensor chip in which a flow rate detecting section is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper surface of a substrate and may also include a flow path forming member which is provided on the sensor chip and has a flow path of a fluid flowing through the flow rate detecting section formed therein.

摘要翻译： 流量传感器可以由传感器芯片形成，其中在用于覆盖形成在基板的上表面上的凹部的至少一部分上的电绝缘膜上形成有流量检测部，并且还可以包括流路 形成构件，其设置在所述传感器芯片上，并且具有流过所述流量检测部的流体的流路。

公开(公告)号：US06981410B2

公开(公告)日：2006-01-03

申请号：US10434563

申请日：2003-05-09

申请人： Koji Seki ,  Nobuhiko Zushi ,  Shinichi Ike ,  Seishi Nakano ,  Tarou Nakata ,  Shoji Kamiunten

发明人： Koji Seki ,  Nobuhiko Zushi ,  Shinichi Ike ,  Seishi Nakano ,  Tarou Nakata ,  Shoji Kamiunten

IPC分类号： G01F1/68

CPC分类号： G01F1/692 ,  G01F1/6845 ,  G01F1/6847

摘要： A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.

摘要翻译： 流量传感器包括基板，电绝缘膜和流速检测机构。 在基板中，与测量对象流体接触的第一表面的膜片部分和围绕隔膜部分的厚的固定部分一体地形成。 电绝缘膜形成在隔膜部分的与第一表面相对的一侧的第二表面上。 流速检测机构设置在电绝缘膜上。 还公开了一种制造流量传感器的方法。

公开(公告)号：US07765865B2

公开(公告)日：2010-08-03

申请号：US12191924

申请日：2008-08-14

申请人： Shinichi Ike ,  Shoji Kamiunten ,  Junji Kumasa

发明人： Shinichi Ike ,  Shoji Kamiunten ,  Junji Kumasa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845

摘要： A flow sensor may be formed of a sensor chip in which a flow rate detecting section is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper surface of a substrate and may also include a flow path forming member which is provided on the sensor chip and has a flow path of a fluid flowing through the flow rate detecting section formed therein.

摘要翻译： 流量传感器可以由传感器芯片形成，其中在用于覆盖形成在基板的上表面上的凹部的至少一部分上的电绝缘膜上形成有流量检测部，并且还可以包括流路 形成构件，其设置在所述传感器芯片上，并且具有流过所述流量检测部的流体的流路。

公开(公告)号：US07383726B2

公开(公告)日：2008-06-10

申请号：US11703581

申请日：2007-02-07

申请人： Shinichi Ike ,  Nobuhiko Zushi ,  Takeshi Nishi

发明人： Shinichi Ike ,  Nobuhiko Zushi ,  Takeshi Nishi

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/692

摘要： The package structure may includes: a sensor chip having a detecting device formed on a front surface of a substrate; through electrodes that are arranged at predetermined positions of the substrate around the detecting device, electrically insulated at circumferences thereof, pierce the substrate from the front surface to a rear surface, are connected with lead patterns of the detecting device on the front surface side, and connected with signal fetching means for the outside on the rear surface side; a flow path body on which the sensor chip is mounted and which has a flow path (a conduction path) for a fluid being formed on a surface facing the detecting device and sealing means.

摘要翻译： 封装结构可以包括：传感器芯片，其具有形成在基板的前表面上的检测装置; 通过布置在检测装置周围的基板的预定位置处的电极，其周边电绝缘，将基板从前表面穿透到后表面，与前表面侧的检测装置的引线图案相连， 与后表面侧的外部的信号取出装置连接; 流路主体，传感器芯片安装在该流路主体上，并且在面向检测装置的表面和密封装置上具有形成流体的流动路径（导电路径）。

公开(公告)号：US08166814B2

公开(公告)日：2012-05-01

申请号：US12191907

申请日：2008-08-14

申请人： Shinichi Ike ,  Hiroshi Hatakeyama ,  Satoshi Tsuchiya

发明人： Shinichi Ike ,  Hiroshi Hatakeyama ,  Satoshi Tsuchiya

IPC分类号： G01F1/68 ,  H01C17/06

CPC分类号： G01F1/6845 ,  G01F1/692 ,  Y10T29/49099

摘要： A flow sensor may be formed by bonding a sensor chip formed with a flow rate detecting part and a flow path-forming member that is provided on the sensor chip and is formed with a flow path for a fluid flowing in the flow rate detecting part to each other on the upper surface of a substrate. The flow path-forming member may be formed by bonding a transparent first flow path forming member and a second flow path-forming member to each other. The first flow path forming member has a plate shape, and is provided with an inflow port and a outflow port for the fluid to be measured, and the second flow path forming member has a plate shape, and is provided with a through hole that forms the flow path along the flow of the fluid flowing along the flow rate detecting part.

摘要翻译： 可以通过将形成有流量检测部的传感器芯片和设置在传感器芯片上的流路形成部件接合而形成流量传感器，并且形成有用于在流量检测部件中流动的流体的流路 彼此在基板的上表面上。 流路形成构件可以通过将透明第一流路形成构件和第二流路形成构件相互结合而形成。 第一流路形成构件具有板状，并且设置有用于待测量流体的流入口和流出口，并且第二流路形成构件具有板形，并且设置有形成为 沿着沿着流量检测部流动的流体的流动的流路。

公开(公告)号：USD654385S1

公开(公告)日：2012-02-21

申请号：US29385347

申请日：2011-02-11

申请人： Shinichi Ike

设计人： Shinichi Ike

公开(公告)号：US20070227260A1

公开(公告)日：2007-10-04

申请号：US11703581

申请日：2007-02-07

申请人： Shinichi Ike ,  Nobuhiko Zushi ,  Takeshi Nishi

发明人： Shinichi Ike ,  Nobuhiko Zushi ,  Takeshi Nishi

IPC分类号： G01F1/00

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/692

摘要： Please replace the current Abstract with the following new Abstract. The package structure may includes: a sensor chip having a detecting device formed on a front surface of a substrate; through electrodes that are arranged at predetermined positions of the substrate around the detecting device, electrically insulated at circumferences thereof, pierce the substrate from the front surface to a rear surface, are connected with lead patterns of the detecting device on the front surface side, and connected with signal fetching means for the outside on the rear surface side; a flow path body on which the sensor chip is mounted and which has a flow path (a conduction path) for a fluid being formed on a surface facing the detecting device and sealing means.

摘要翻译： 请用以下摘要取代当前的摘要。 封装结构可以包括：传感器芯片，其具有形成在基板的前表面上的检测装置; 通过布置在检测装置周围的基板的预定位置处的电极，其周边电绝缘，将基板从前表面穿透到后表面，与前表面侧的检测装置的引线图案相连， 与后表面侧的外部的信号取出装置连接; 流路主体，传感器芯片安装在该流路主体上，并且在面向检测装置的表面和密封装置上具有形成流体的流动路径（导电路径）。

公开(公告)号：US20060288773A1

公开(公告)日：2006-12-28

申请号：US10570672

申请日：2004-08-26

申请人： Shinichi Ike ,  Nobuhiko Zushi

发明人： Shinichi Ike ,  Nobuhiko Zushi

IPC分类号： G01F1/68

CPC分类号： G01F1/6845

摘要： In a flow sensor (1) including an anticorrosion metallic diaphragm; an insulating film formed on one surface of the metallic diaphragm; and a flow rate measuring sensor formed on the insulating film, the other surface of the metallic diaphragm being in contact with a fluid under measure, between the insulating film (122) on which sensor devices (25) are formed and the metallic diaphragm, a buffer layer (121) having an intermediate linear expansion coefficient between the linear expansion coefficient of the insulating film (122) and the linear expansion coefficient of an anticorrosion metal is interposed. Thereby, the sensitivity and response of the flow sensor are improved, and also the heat resistance is improved, by which the flow sensor is made especially suitable for measuring the flow rate of a corrosive fluid.

摘要翻译： 在包括防腐金属隔膜的流量传感器（1）中; 形成在所述金属隔膜的一个表面上的绝缘膜; 和形成在绝缘膜上的流量测量传感器，金属隔膜的另一个表面与被测量的流体接触，在其上形成有传感器装置（25）的绝缘膜（122）和金属隔膜之间， 具有绝缘膜（122）的线膨胀系数与耐腐蚀金属的线膨胀系数之间的中间线膨胀系数的缓冲层（121）。 因此，提高了流量传感器的灵敏度和响应性，并且提高了耐热性，通过该传感器，流量传感器特别适合于测量腐蚀性流体的流量。

公开(公告)号：US20090078040A1

公开(公告)日：2009-03-26

申请号：US12191907

申请日：2008-08-14

申请人： Shinichi Ike ,  Hiroshi Hatakeyama ,  Satoshi Tsuchiya

发明人： Shinichi Ike ,  Hiroshi Hatakeyama ,  Satoshi Tsuchiya

IPC分类号： G01F1/68 ,  H01C17/06

CPC分类号： G01F1/6845 ,  G01F1/692 ,  Y10T29/49099

摘要： A flow sensor may be formed by bonding a sensor chip formed with a flow rate detecting part and a flow path-forming member that is provided on the sensor chip and is formed with a flow path for a fluid flowing in the flow rate detecting part to each other on the upper surface of a substrate. The flow path-forming member may be formed by bonding a transparent first flow path forming member and a second flow path-forming member to each other. The first flow path forming member has a plate shape, and is provided with an inflow port and a outflow port for the fluid to be measured, and the second flow path forming member has a plate shape, and is provided with a through hole that forms the flow path along the flow of the fluid flowing along the flow rate detecting part.

摘要翻译： 可以通过将形成有流量检测部的传感器芯片和设置在传感器芯片上的流路形成部件接合而形成流量传感器，并且形成有用于在流量检测部件中流动的流体的流路 彼此在基板的上表面上。 流路形成构件可以通过将透明第一流路形成构件和第二流路形成构件相互结合而形成。 第一流路形成构件具有板状，并且设置有用于待测量流体的流入口和流出口，并且第二流路形成构件具有板形，并且设置有形成为 沿着沿着流量检测部流动的流体的流动的流路。