公开(公告)号：US10930614B2

公开(公告)日：2021-02-23

申请号：US15659670

申请日：2017-07-26

Applicant: Infineon Technologies AG

Inventor： Manfred Mengel ,  Alexander Heinrich ,  Steffen Orso ,  Thomas Behrens ,  Oliver Eichinger ,  Lim Fong ,  Evelyn Napetschnig ,  Edmund Riedl

IPC: H01L23/00 ,  B23K35/30 ,  B23K35/26 ,  B23K35/28 ,  C22C13/00 ,  C22C18/00 ,  C22C18/04 ,  C22C30/04 ,  C22C30/06 ,  H01L23/488 ,  H01L23/495 ,  B23K1/00

Abstract: A chip arrangement including a chip comprising a chip back side; a back side metallization on the chip back side, the back side metallization including a plurality of layers; a substrate comprising a surface with a metal layer; a zinc-based solder alloy configured to attach the back side metallization to the metal layer, the zinc-based solder alloy having by weight 8% to 20% aluminum, 0.5% to 20% magnesium, 0.5% to 20% gallium, and the balance zinc; wherein the metal layer is configured to provide a good wettability of the zinc-based solder alloy on the surface of the substrate. The plurality of layers may include one or more of a contact layer configured to contact a semiconductor material of the chip back side; a barrier layer; a solder reaction, and an oxidation protection layer configured to prevent oxidation of the solder reaction layer.