公开(公告)号：US20230339743A1

公开(公告)日：2023-10-26

申请号：US18305905

申请日：2023-04-24

Applicant: Infineon Technologies AG

Inventor： Hans-Jörg Timme ,  Stefan Barzen ,  Marc Füldner ,  Stefan Geißler ,  Matthias Friedrich Herrmann ,  Maria Kiriak ,  Abidin Güçlü Onaran ,  Konstantin Tkachuk ,  Arnaud Walther

IPC: B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0307 ,  B81B2203/0361 ,  B81B2203/0353 ,  B81B2203/04

Abstract: A MEMS device includes a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration. The rigid electrode structure is arranged between the first and second deflectable membrane structures. The first and second deflectable membrane structures each includes a deflectable portion, and the deflectable portions of the first and second deflectable membrane structures are mechanically coupled by mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure. At least a subset of the mechanical connection elements are elongated mechanical connection elements. The elongated mechanical connection elements have a lateral cross-sectional area with a laterally elongated dimension along a direction which is within a tolerance range of +/−20° perpendicular to the local membrane deflection gradient of the first and second deflectable membrane structures at the lateral position of the respective elongated mechanical connection element.