Thermal Emitter With Embedded Heating Element

    公开(公告)号:US20210341433A1

    公开(公告)日:2021-11-04

    申请号:US17199211

    申请日:2021-03-11

    Abstract: A thermal emitter includes a freestanding membrane supported by a substrate, wherein the freestanding membrane includes in a lateral extension a center section, a conductive intermediate section and a border section, wherein the conductive intermediate section laterally surrounds the center section and is electrically isolated from the center section, the conductive intermediate section including a conductive semiconductor material that is encapsulated in an insulating material, wherein the border section at least partially surrounds the intermediate section and is electrically isolated from the conductive intermediate section, and wherein a perforation is formed through the border section.

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