公开(公告)号：US20210202472A1

公开(公告)日：2021-07-01

申请号：US16728111

申请日：2019-12-27

申请人： Intel Corporation

发明人： Nicholas A. Thomson ,  Kalyan C. Kolluru ,  Adam Clay Faust ,  Frank Patrick O'Mahony ,  Ayan Kar ,  Rui Ma

IPC分类号： H01L27/02

摘要： Disclosed herein are integrated circuit (IC) structures including backside vias, as well as related methods and devices. In some embodiments, an IC structure may include: a device layer, wherein the device layer includes a plurality of active devices; a first metallization layer over the device layer, wherein the first metallization layer includes a first conductive pathway in conductive contact with at least one of the active devices in the device layer; a second metallization layer under the device layer, wherein the second metallization layer includes a second conductive pathway; and a conductive via in the device layer, wherein the conductive via is in conductive contact with at least one of the active devices in the device layer and also in conductive contact with the second conductive pathway.

公开(公告)号：US20230402449A1

公开(公告)日：2023-12-14

申请号：US18457453

申请日：2023-08-29

申请人： Intel Corporation

发明人： Nicholas A. Thomson ,  Kalyan C. Kolluru ,  Adam Clay Faust ,  Frank Patrick O'Mahony ,  Ayan Kar ,  Rui Ma

IPC分类号： H01L27/02

CPC分类号： H01L27/0292 ,  H01L27/0288 ,  H01L27/0255

摘要： Disclosed herein are integrated circuit (IC) structures including backside vias, as well as related methods and devices. In some embodiments, an IC structure may include: a device layer, wherein the device layer includes a plurality of active devices; a first metallization layer over the device layer, wherein the first metallization layer includes a first conductive pathway in conductive contact with at least one of the active devices in the device layer; a second metallization layer under the device layer, wherein the second metallization layer includes a second conductive pathway; and a conductive via in the device layer, wherein the conductive via is in conductive contact with at least one of the active devices in the device layer and also in conductive contact with the second conductive pathway.

公开(公告)号：US11791331B2

公开(公告)日：2023-10-17

申请号：US17526199

申请日：2021-11-15

申请人： Intel Corporation

发明人： Nicholas A. Thomson ,  Kalyan C. Kolluru ,  Adam Clay Faust ,  Frank Patrick O'Mahony ,  Ayan Kar ,  Rui Ma

IPC分类号： H01L27/02

CPC分类号： H01L27/0292 ,  H01L27/0255 ,  H01L27/0288

摘要： Disclosed herein are integrated circuit (IC) structures including backside vias, as well as related methods and devices. In some embodiments, an IC structure may include: a device layer, wherein the device layer includes a plurality of active devices; a first metallization layer over the device layer, wherein the first metallization layer includes a first conductive pathway in conductive contact with at least one of the active devices in the device layer; a second metallization layer under the device layer, wherein the second metallization layer includes a second conductive pathway; and a conductive via in the device layer, wherein the conductive via is in conductive contact with at least one of the active devices in the device layer and also in conductive contact with the second conductive pathway.

公开(公告)号：US20220077140A1

公开(公告)日：2022-03-10

申请号：US17526199

申请日：2021-11-15

申请人： Intel Corporation

发明人： Nicholas A. Thomson ,  Kalyan C. Kolluru ,  Adam Clay Faust ,  Frank Patrick O'Mahony ,  Ayan Kar ,  Rui Ma

IPC分类号： H01L27/02

摘要： Disclosed herein are integrated circuit (IC) structures including backside vias, as well as related methods and devices. In some embodiments, an IC structure may include: a device layer, wherein the device layer includes a plurality of active devices; a first metallization layer over the device layer, wherein the first metallization layer includes a first conductive pathway in conductive contact with at least one of the active devices in the device layer; a second metallization layer under the device layer, wherein the second metallization layer includes a second conductive pathway; and a conductive via in the device layer, wherein the conductive via is in conductive contact with at least one of the active devices in the device layer and also in conductive contact with the second conductive pathway.