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公开(公告)号:US11908856B2
公开(公告)日:2024-02-20
申请号:US16719257
申请日:2019-12-18
申请人: Intel Corporation
发明人: Biswajeet Guha , William Hsu , Chung-Hsun Lin , Kinyip Phoa , Oleg Golonzka , Tahir Ghani , Kalyan Kolluru , Nathan Jack , Nicholas Thomson , Ayan Kar , Benjamin Orr
IPC分类号: H01L27/088 , H01L29/78 , H01L29/06
CPC分类号: H01L27/0886 , H01L29/0653 , H01L29/0673 , H01L29/785
摘要: Gate-all-around structures having devices with source/drain-to-substrate electrical contact are described. An integrated circuit structure includes a first vertical arrangement of horizontal nanowires above a first fin. A first gate stack is over the first vertical arrangement of horizontal nanowires. A first pair of epitaxial source or drain structures is at first and second ends of the first vertical arrangement of horizontal nanowires. One or both of the first pair of epitaxial source or drain structures is directly electrically coupled to the first fin. A second vertical arrangement of horizontal nanowires is above a second fin. A second gate stack is over the second vertical arrangement of horizontal nanowires. A second pair of epitaxial source or drain structures is at first and second ends of the second vertical arrangement of horizontal nanowires. Both of the second pair of epitaxial source or drain structures is electrically isolated from the second fin.
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公开(公告)号:US11869987B2
公开(公告)日:2024-01-09
申请号:US17860056
申请日:2022-07-07
申请人: Intel Corporation
发明人: Ayan Kar , Saurabh Morarka , Carlos Nieva-Lozano , Kalyan Kolluru , Biswajeet Guha , Chung-Hsun Lin , Brian Greene , Tahir Ghani
CPC分类号: H01L29/93 , H01L21/02532 , H01L21/02603 , H01L29/0673 , H01L29/66174
摘要: Gate-all-around integrated circuit structures including varactors are described. For example, an integrated circuit structure includes a varactor structure on a semiconductor substrate. The varactor structure includes a plurality of discrete vertical arrangements of horizontal nanowires. A plurality of gate stacks is over and surrounding corresponding ones of the plurality of discrete vertical arrangements of horizontal nanowires. The integrated circuit structure also includes a tap structure adjacent to the varactor structure on the semiconductor substrate. The tap structure includes a plurality of merged vertical arrangements of horizontal nanowires. A plurality of semiconductor structures is over and surrounding corresponding ones of the plurality of merged vertical arrangements of horizontal nanowires.
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公开(公告)号:US20230089395A1
公开(公告)日:2023-03-23
申请号:US17448373
申请日:2021-09-22
申请人: INTEL CORPORATION
发明人: Benjamin Orr , Nicholas A. Thomson , Ayan Kar , Nathan D. Jack , Kalyan C. Kolluru , Patrick Morrow , Cheng-Ying Huang , Charles C. Kuo
IPC分类号: H01L27/06 , H01L27/092 , H01L29/66 , H01L21/8238
摘要: Integrated circuits including vertical diodes. In an example, a first transistor is above a second transistor. The first transistor includes a first semiconductor body extending laterally from a first source or drain region. The first source or drain region includes one of a p-type dopant or an n-type dopant. The second transistor includes a second semiconductor body extending laterally from a second source or drain region. The second source or drain region includes the other of the p-type dopant or the n-type dopant. The first source or drain region and second source or drain region are at least part of a diode structure, which may have a PN junction (e.g., first and second source/drain regions are merged) or a PIN junction (e.g., first and second source/drain regions are separated by an intrinsic semiconductor layer, or a dielectric layer and the first and second semiconductor bodies are part of the junction).
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公开(公告)号:US20210167180A1
公开(公告)日:2021-06-03
申请号:US16699566
申请日:2019-11-30
申请人: Intel Corporation
发明人: Ayan Kar , Kalyan C. Kolluru , Nicholas A. Thomson , Mark Armstrong , Sameer Jayanta Joglekar , Rui Ma , Sayan Saha , Hyuk Ju Ryu , Akm A. Ahsan
IPC分类号: H01L29/423 , H01L27/02 , H01L29/78 , H01L29/08 , H01L29/40
摘要: Disclosed herein are transistor arrangements of field-effect transistors with dual thickness gate dielectrics. An example transistor arrangement includes a semiconductor channel material, a source region and a drain region, provided in the semiconductor material, and a gate stack provided over a portion of the semiconductor material that is between the source region and the drain region. The gate stack has a thinner gate dielectric in a portion that is closer to the source region and a thicker gate dielectric in a portion that is closer to the drain region, which may effectively realize tunable ballast resistance integrated with the transistor arrangement and may help increase the breakdown voltage and/or decrease the gate leakage of the transistor.
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公开(公告)号:US11961836B2
公开(公告)日:2024-04-16
申请号:US16147205
申请日:2018-09-28
申请人: Intel Corporation
CPC分类号: H01L27/0808 , H01L29/66174 , H01L29/93 , H10B99/00
摘要: An integrated circuit structure comprises one or more fins extending above a surface of a substrate over an N-type well. A gate is over and in contact with the one or more fins. A second shallow N-type doping is below the gate and above the N-type well.
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公开(公告)号:US11652107B2
公开(公告)日:2023-05-16
申请号:US16447874
申请日:2019-06-20
申请人: Intel Corporation
发明人: Nicholas Thomson , Ayan Kar , Kalyan Kolluru , Nathan Jack , Rui Ma , Mark Bohr , Rishabh Mehandru , Halady Arpit Rao
IPC分类号: H01L29/06 , H01L27/12 , H01L27/02 , H01L21/84 , H01L29/861
CPC分类号: H01L27/1203 , H01L21/84 , H01L27/0255 , H01L27/1211 , H01L29/8613
摘要: Embodiments include diode devices and transistor devices. A diode device includes a first fin region over a first conductive region and an insulator region, and a second fin region over a second conductive and insulator regions, where the second fin region is laterally adjacent to the first fin region, and the insulator region is between the first and second conductive regions. The diode device includes a first conductive via on the first conductive region, where the first conductive via is vertically adjacent to the first fin region, and a second conductive via on the second conductive region, where the second conductive via is vertically adjacent to the second fin region. The diode device may include conductive contacts, first portions on the first fin region, second portions on the second fin region, and gate electrodes between the first and second portions and the conductive contacts.
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公开(公告)号:US11417781B2
公开(公告)日:2022-08-16
申请号:US16830112
申请日:2020-03-25
申请人: Intel Corporation
发明人: Ayan Kar , Saurabh Morarka , Carlos Nieva-Lozano , Kalyan Kolluru , Biswajeet Guha , Chung-Hsun Lin , Brian Greene , Tahir Ghani
摘要: Gate-all-around integrated circuit structures including varactors are described. For example, an integrated circuit structure includes a varactor structure on a semiconductor substrate. The varactor structure includes a plurality of discrete vertical arrangements of horizontal nanowires. A plurality of gate stacks is over and surrounding corresponding ones of the plurality of discrete vertical arrangements of horizontal nanowires. The integrated circuit structure also includes a tap structure adjacent to the varactor structure on the semiconductor substrate. The tap structure includes a plurality of merged vertical arrangements of horizontal nanowires. A plurality of semiconductor structures is over and surrounding corresponding ones of the plurality of merged vertical arrangements of horizontal nanowires.
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公开(公告)号:US20210202472A1
公开(公告)日:2021-07-01
申请号:US16728111
申请日:2019-12-27
申请人: Intel Corporation
发明人: Nicholas A. Thomson , Kalyan C. Kolluru , Adam Clay Faust , Frank Patrick O'Mahony , Ayan Kar , Rui Ma
IPC分类号: H01L27/02
摘要: Disclosed herein are integrated circuit (IC) structures including backside vias, as well as related methods and devices. In some embodiments, an IC structure may include: a device layer, wherein the device layer includes a plurality of active devices; a first metallization layer over the device layer, wherein the first metallization layer includes a first conductive pathway in conductive contact with at least one of the active devices in the device layer; a second metallization layer under the device layer, wherein the second metallization layer includes a second conductive pathway; and a conductive via in the device layer, wherein the conductive via is in conductive contact with at least one of the active devices in the device layer and also in conductive contact with the second conductive pathway.
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公开(公告)号:US20240088136A1
公开(公告)日:2024-03-14
申请号:US17943557
申请日:2022-09-13
申请人: Intel Corporation
发明人: Ayan Kar , Nicholas A. Thomson , Kalyan C. Kolluru , Benjamin Orr
IPC分类号: H01L27/02
CPC分类号: H01L27/027
摘要: An integrated circuit structure includes a sub-fin, a source region in contact with a first portion of the sub-fin, and a drain region in contact with a second portion of the sub-fin. A body including semiconductor material is above the sub-fin, where the body extends laterally between the source region and the drain region. A gate structure is on the body and includes (i) a gate electrode, and (ii) a gate dielectric between the gate electrode and the body. In an example, a first distance between the drain region and the gate electrode is at least two times a second distance between the source region and the gate electrode, where the first and second distances are measured in a same horizontal plane that runs in a direction parallel to the body. In an example, the body is a nanoribbon, a nanosheet, a nanowire, or a fin.
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公开(公告)号:US20230420578A1
公开(公告)日:2023-12-28
申请号:US17848660
申请日:2022-06-24
申请人: Intel Corporation
发明人: Ayan Kar , Kalyan C. Kolluru , Nicholas A. Thomson , Vijaya Bhaskara Neeli , Said Rami , Saurabh Morarka , Karthik Krishaswamy , Mauro J. Kobrinsky
IPC分类号: H01L29/93 , H01L29/06 , H01L29/417
CPC分类号: H01L29/93 , H01L29/0673 , H01L29/417 , H01L29/42392
摘要: A varactor device includes a support structure, an electrically conductive layer at the backside of the support structure, two semiconductor structures including doped semiconductor materials, two contact structures, and a semiconductor region. Each contract structure is electrically conductive and is connected to a different one of the semiconductor structures A contract structure couples the corresponding semiconductor structure to the electrically conductive layer. The semiconductor region is between the two semiconductor structures and can be connected to the two semiconductor structures. The semiconductor region may include non-planar semiconductor structures coupled with a gate. The gate may be coupled to another electrically conductive layer at the frontside of the support structure. The varactor device may further include a pair of additional semiconductor regions that are electrically insulated from each other. The additional semiconductor regions may be coupled to two oppositely polarized gates, respectively.
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