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公开(公告)号:US20220199615A1
公开(公告)日:2022-06-23
申请号:US17133024
申请日:2020-12-23
Applicant: Intel Corporation
Inventor: Avyaya JAYANTHINARASIMHAM , Brian GREENE , Suresh Vishwanath
IPC: H01L27/07 , H01L27/088 , H01L29/861 , H01L29/78 , H01L29/06
Abstract: Substrate-less vertical diode integrated circuit structures, and methods of fabricating substrate-less vertical diode integrated circuit structures, are described. For example, a substrate-less integrated circuit structure includes a semiconductor fin in a dielectric layer, the semiconductor fin having a top and a bottom, and the dielectric layer having a top surface and a bottom surface. A first epitaxial semiconductor structure is on the top of the semiconductor fin. A second epitaxial semiconductor structure is on the bottom of the semiconductor fin. A first conductive contact is on the first epitaxial semiconductor structure. A second conductive contact is on the second epitaxial semiconductor structure.
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公开(公告)号:US20220102385A1
公开(公告)日:2022-03-31
申请号:US17033418
申请日:2020-09-25
Applicant: Intel Corporation
Inventor: Biswajeet GUHA , Brian GREENE , Avyaya JAYANTHINARASIMHAM , Ayan KAR , Benjamin ORR , Chung-Hsun LIN , Curtis TSAI , Kalyan KOLLURU , Kevin FISCHER , Lin HU , Nathan JACK , Nicholas THOMSON , Rishabh MEHANDRU , Rui MA , Sabih OMAR
IPC: H01L27/12
Abstract: Substrate-free integrated circuit structures, and methods of fabricating substrate-free integrated circuit structures, are described. For example, a substrate-less integrated circuit structure includes a fin, a plurality of gate structures over the fin, and a plurality of alternating P-type epitaxial structures and N-type epitaxial structures between adjacent ones of the plurality of gate structures.
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